Patents by Inventor Sergey Zaretskiy

Sergey Zaretskiy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE-SUPPORTING UNIT AND SUBSTRATE-PROCESSING APPARATUS COMPRISING SAME
    Publication number: 20120160419
    Abstract: A substrate-supporting unit includes: a mounting board on which a substrate is disposed; and a heater installed in the mounting board to heat the substrate disposed on the mounting board, wherein the mounting board includes: a non-contact surface which faces a center portion of the substrate and is spaced apart from the center portion of the substrate; and a contact member which extends outward from the non-contact surface and is arranged along an edge portion of the substrate disposed on the mounting board to support the edge portion of the substrate.
    Type: Application
    Filed: April 12, 2010
    Publication date: June 28, 2012
    Inventors: Dong-Keun Lee, Sergey Zaretskiy, Sung Tae Je, Wan Suk Oh