Patents by Inventor Sergiu LANGA
Sergiu LANGA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230322546Abstract: A MEMS device includes a layer stack having a plurality of MEMS layers arranged along a layer stack direction. The MEMS device includes a movable element formed in a first MEMS layer and arranged between a second MEMS layer and a third MEMS layer of the layer stack. A driving unit is further provided, comprising a first drive structure mechanically firmly connected to the movable element and a second drive structure mechanically firmly connected to the second MEMS layer. The driving unit is configured to generate on the movable member a drive force perpendicular to the layer stack direction, and the drive force is configured to deflect the movable member.Type: ApplicationFiled: June 2, 2023Publication date: October 12, 2023Inventors: Sergiu LANGA, Bert KAISER, Anton MELNIKOV, Jorge Mario MONSALVE GUARACAO
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Publication number: 20230091340Abstract: An MEMS having a layered structure includes a cavity disposed in the layered structure and fluidically coupled to an external environment of the layered structure through at least one opening in the layered structure. The MEMS includes an interaction structure movably disposed in a first MEMS plane and in the cavity along a plane direction and configured to interact with a fluid in the cavity, wherein movement of the interaction structure is causally related to movement of the fluid through the at least one opening. The MEMS further includes an active structure disposed in a second MEMS perpendicular to the plane direction, the active structure mechanically coupled to the insulation structure and configured such that an electrical signal at an electrical contact of the active structure is causally related to a deformation of the active structure, wherein the deformation of the active structure is causally related to movement of the fluid.Type: ApplicationFiled: November 3, 2022Publication date: March 23, 2023Inventors: Anton MELNIKOV, Franziska WALL, Jorge Mario MONSALVE GUARACAO, Bert KAISER, Sergiu LANGA
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Publication number: 20220380201Abstract: The invention relates to a microelectromechanical drive for moving an object, having electrostatic bending actuators, wherein each electrostatic bending actuator has a cantilever having at least one active element which has a layer stack forming at least one capacitor positioned offset to a center-of-gravity-plane of the cantilever which leads alongside a longitudinal axis of the cantilever from a supported end of the cantilever to a loose end, which is averted from the supported end of the cantilever and which has a contact area for engaging with the object. The microelectromechanical drive can be used to displace any target objects from nanoscopic to macroscopic sizes that are within the force-displacement configurations of the electrostatic bending actuators. The microelectromechanical drive is suited to act as an inchworm drive.Type: ApplicationFiled: July 29, 2022Publication date: December 1, 2022Inventors: Bert KAISER, Holger CONRAD, Shashank SHASHANK, Keyvan NARIMANI, Matthieu GAUDET, Sergiu LANGA
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Publication number: 20220002143Abstract: An MEMS includes a substrate having a cavity. The MEMS includes a movable layer arrangement arranged in the cavity including a first beam, a second beam and a third beam that is arranged between the first beam and the second beam and that is fixed at discrete areas electrically insulated from the same. The movable layer arrangement is configured to perform a movement along a direction of movement in a substrate plane in response to an electrical potential between a first beam and a third beam or in response to an electrical potential between the second beam and the third beam. The first, second and third beams are part of a first layer of the movable layer arrangement. The movable layer arrangement includes a second layer arranged adjacent to the first layer along a direction perpendicular to the substrate plane. The second layer is arranged movably along the direction of movement.Type: ApplicationFiled: September 15, 2021Publication date: January 6, 2022Inventors: Sergiu LANGA, Holger CONRAD, Bert KAISER
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Patent number: 11186478Abstract: A MEMS includes a substrate having a cavity, and a moveable element arranged in the cavity, the moveable element including a first electrode, a second electrode and a third electrode that is arranged between the first electrode and the second electrode and is fixed in an electrically insulated manner from the same at discrete areas. The moveable element is configured to perform a movement along a movement direction in a substrate plan in response to an electric potential between the first electrode and the third electrode or in response to an electric potential between the second electrode and the third electrode. A dimension of the third electrode perpendicular to the substrate plane is lower than a dimension of the first electrode and a dimension of the second electrode perpendicular to the substrate plane.Type: GrantFiled: August 26, 2019Date of Patent: November 30, 2021Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FĂ–RDERUNG DER ANGEWANDTEN FORSCHUNG E.V.Inventors: Sergiu Langa, Holger Conrad, Klaus Schimmanz
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Publication number: 20190382257Abstract: A MEMS includes a substrate having a cavity, and a moveable element arranged in the cavity, the moveable element including a first electrode, a second electrode and a third electrode that is arranged between the first electrode and the second electrode and is fixed in an electrically insulated manner from the same at discrete areas. The moveable element is configured to perform a movement along a movement direction in a substrate plan in response to an electric potential between the first electrode and the third electrode or in response to an electric potential between the second electrode and the third electrode. A dimension of the third electrode perpendicular to the substrate plane is lower than a dimension of the first electrode and a dimension of the second electrode perpendicular to the substrate plane.Type: ApplicationFiled: August 26, 2019Publication date: December 19, 2019Inventors: Sergiu LANGA, Holger CONRAD, Klaus SCHIMMANZ
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Patent number: 10483876Abstract: A micromechanical device with electrostatically caused deflection by a plate capacitor extending along and spaced apart from the neutral fiber of the deflectable element is improved with regard to its manufacturing complexity and/or with regard to its operating characteristics, such as, for example, maximum voltage applicable or deflectability, by using a continuous insulation layer between the distal and proximal electrodes of the plate capacitor, or else the proximal electrode is structured so as to have gaps at the segment boundaries where the distal electrode is mechanically fixed so as to be laterally spaced apart from the distal electrode. Both procedures avoid the problems of generating a roughness of the surface of the proximal electrode facing the distal electrode, as would otherwise be necessitated by etching an insulation layer for providing spacers between the distal and proximal electrodes at the segment boundaries.Type: GrantFiled: December 14, 2015Date of Patent: November 19, 2019Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.Inventors: Sergiu Langa, Holger Conrad, Harald Schenk, Michael Stolz
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Patent number: 10457544Abstract: A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.Type: GrantFiled: December 15, 2017Date of Patent: October 29, 2019Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Harald Schenk, Holger Conrad, Matthieu Gaudet, Klaus Schimmanz, Sergiu Langa, Bert Kaiser
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Publication number: 20180179048Abstract: A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.Type: ApplicationFiled: December 15, 2017Publication date: June 28, 2018Inventors: Harald SCHENK, Holger CONRAD, Matthieu GAUDET, Klaus SCHIMMANZ, Sergiu LANGA, Bert KAISER
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Patent number: 9676607Abstract: Micromechanical devices include actively deflectable elements. The activation is performed by a layer stack which causes the deflection responsive to attractive forces acting upon the layers of the layer stack.Type: GrantFiled: April 13, 2016Date of Patent: June 13, 2017Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.Inventors: Matthieu Gaudet, Klaus Schimmanz, Michael Stolz, Sergiu Langa, Holger Conrad, Bert Kaiser
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Patent number: 9620375Abstract: A production methods includes providing a substrate including a lattice plane that extends in a non-symmetrical manner and such that it is offset at an angle ? from at least a first or second main surface region of the substrate, the first and second main surface regions extending parallel to each other; anisotropic etching, starting from the first main surface region, into the substrate so as to obtain an etching structure which includes, in a plane extending perpendicularly to the first main surface region, two different etching angles relative to the first main surface region; arranging a cover layer on the first main surface region, so that the cover layer lies against the etching structure in at least some sections; and removing, section-by-section, the material of the substrate starting from the second main surface region in the area of the deformed cover layer, so that the cover layer is exposed in at least one window region.Type: GrantFiled: March 26, 2015Date of Patent: April 11, 2017Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.Inventors: Sergiu Langa, Christian Drabe, Thilo Sandner
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Publication number: 20160304333Abstract: Micromechanical devices include actively deflectable elements. The activation is performed by a layer stack which causes the deflection responsive to attractive forces acting upon the layers of the layer stack.Type: ApplicationFiled: April 13, 2016Publication date: October 20, 2016Inventors: Matthieu Gaudet, Klaus Schimmanz, Michael Stolz, Sergiu Langa, Holger Conrad, Bert Kaiser
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Publication number: 20160173001Abstract: A micromechanical device with electrostatically caused deflection by a plate capacitor extending along and spaced apart from the neutral fiber of the deflectable element is improved with regard to its manufacturing complexity and/or with regard to its operating characteristics, such as, for example, maximum voltage applicable or deflectability, by using a continuous insulation layer between the distal and proximal electrodes of the plate capacitor, or else the proximal electrode is structured so as to have gaps at the segment boundaries where the distal electrode is mechanically fixed so as to be laterally spaced apart from the distal electrode. Both procedures avoid the problems of generating a roughness of the surface of the proximal electrode facing the distal electrode, as would otherwise be necessitated by etching an insulation layer for providing spacers between the distal and proximal electrodes at the segment boundaries.Type: ApplicationFiled: December 14, 2015Publication date: June 16, 2016Inventors: Sergiu Langa, Holger Conrad, Harald Schenk, Michael Stolz
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Publication number: 20150200105Abstract: A production methods includes providing a substrate including a lattice plane that extends in a non-symmetrical manner and such that it is offset at an angle ? from at least a first or second main surface region of the substrate, the first and second main surface regions extending parallel to each other; anisotropic etching, starting from the first main surface region, into the substrate so as to obtain an etching structure which includes, in a plane extending perpendicularly to the first main surface region, two different etching angles relative to the first main surface region; arranging a cover layer on the first main surface region, so that the cover layer lies against the etching structure in at least some sections; and removing, section-by-section, the material of the substrate starting from the second main surface region in the area of the deformed cover layer, so that the cover layer is exposed in at least one window region.Type: ApplicationFiled: March 26, 2015Publication date: July 16, 2015Inventors: Sergiu LANGA, Christian DRABE, Thilo SANDNER