Patents by Inventor Sergiy BALANETSKYY

Sergiy BALANETSKYY has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CRYSTAL PIECE OF MONOCRYSTALLINE SILICON
    Publication number: 20230257906
    Abstract: A crystal piece of monocrystalline silicon suitable for the production of semiconductor wafers has a length of not less than 8 cm and not more than 50 cm and a diameter of not less than 280 mm and not greater than 320 mm, wherein the fraction of the semiconductor wafers produced therefrom that are free from pinholes having a size of not more than 30 ?m is greater than 98%.
    Type: Application
    Filed: June 30, 2021
    Publication date: August 17, 2023
    Applicant: SILTRONIC AG
    Inventors: Sergiy BALANETSKYY, Toni LEHMANN, Karl MANGELBERGER, Dirk ZEMKE
  • METHOD FOR PRODUCING SEMICONDUCTOR WAFERS FROM SILICON
    Publication number: 20220356601
    Abstract: Silicon single crystals having an oxygen concentration of greater than 2×1017 at/cm3, a concentration of pinholes having a diameter of greater than 100 ?m of less than 1.0×10?5 l/cm3, a carbon concentration of less than 5.5×1014 at/cm3, an iron concentration of less than 5.0×109 at/cm3, a COP concentration of fewer than 1000 defects/cm3, a LPIT concentration of fewer than 1 defect/cm2 and a crystal diameter of greater than 200 mm, are produced by the Czochralski method employing a purge gas at specified pressures and flow rates.
    Type: Application
    Filed: June 2, 2020
    Publication date: November 10, 2022
    Applicant: SILTRONIC AG
    Inventors: Sergiy BALANETSKYY, Matthias DANIEL