Patents by Inventor Sergiy Yulin

Sergiy Yulin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multilayer mirror for reflecting EUV radiation and method for producing the same
    Patent number: 11500137
    Abstract: A multilayer mirror for reflecting Extreme Ultraviolet (EUV) radiation and a method for producing the same are disclosed. In an embodiment a multilayer mirror includes a layer sequence having a plurality of alternating first layers and second layers, the first layers including lanthanum or a lanthanum compound and the second layers including boron, wherein the second layers are doped with carbon, and wherein a molar fraction of carbon in the second layers is 10% or less.
    Type: Grant
    Filed: September 25, 2017
    Date of Patent: November 15, 2022
    Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
    Inventors: Philipp Naujok, Sergiy Yulin, Norbert Kaiser
  • Multilayer Mirror for Reflecting EUV Radiation and Method for Producing the Same
    Publication number: 20190235141
    Abstract: A multilayer mirror for reflecting Extreme Ultraviolet (EUV) radiation and a method for producing the same are disclosed. In an embodiment a multilayer mirror includes a layer sequence having a plurality of alternating first layers and second layers, the first layers including lanthanum or a lanthanum compound and the second layers including boron, wherein the second layers are doped with carbon, and wherein a molar fraction of carbon in the second layers is 10% or less.
    Type: Application
    Filed: September 25, 2017
    Publication date: August 1, 2019
    Inventors: Philipp Naujok, Sergiy Yulin, Norbert Kaiser
  • Thermally stable multilayer mirror for the EUV spectral range
    Patent number: 7986455
    Abstract: A multilayer mirror includes a layer sequence arranged on a substrate and a plurality of layer pairs. Each layer pair includes a first layer composed of a first material and a second layer composed of a second material. The first layers and the second layers each have a thickness of more than 2 nm, and the first material or the second material is a silicon boride or a molybdenum nitride.
    Type: Grant
    Filed: August 8, 2008
    Date of Patent: July 26, 2011
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Torsten Feigl, Nicolas Benoit, Sergiy Yulin, Nobert Kaiser
  • Thermally stable multilayer mirror for the EUV spectral region
    Patent number: 7920323
    Abstract: In a multilayer mirror (1) for the reflection of EUV radiation containing a large number of alternating molybdenum layers (4) and silicon layers (3), a barrier layer (5) containing a silicon nitride or a silicon boride is included at a number of interfaces between the molybdenum layers (4) and the silicon layers (3). As a result of the barrier layers (5) of a silicon nitride or of a silicon boride, high thermal stability is achieved, in particular high long-term stability at temperatures of more than 300° C., whilst at the same time achieving high reflectivity in the multilayer mirror. A multilayer mirror (1) of this type can, in particular, be used as a heatable collector mirror for an EUV radiation source.
    Type: Grant
    Filed: December 23, 2005
    Date of Patent: April 5, 2011
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Nicolas Benoit, Torsten Feigl, Norbert Kaiser, Sergiy Yulin
  • Thermally Stable Multilayer Mirror for the EUV Spectral Range
    Publication number: 20090009858
    Abstract: A multilayer mirror includes a layer sequence arranged on a substrate and a plurality of layer pairs. Each layer pair includes a first layer composed of a first material and a second layer composed of a second material. The first layers and the second layers each have a thickness of more than 2 nm, and the first material or the second material is a silicon boride or a molybdenum nitride.
    Type: Application
    Filed: August 8, 2008
    Publication date: January 8, 2009
    Inventors: Torsten Feigl, Nicolas Benoit, Sergiy Yulin, Nobert Kaiser
  • Thermally Stable Multilayer Mirror for the Euv Spectral Region
    Publication number: 20080088916
    Abstract: In a multilayer mirror (1) for the reflection of EUV radiation containing a large number of alternating molybdenum layers (4) and silicon layers (3), a barrier layer (5) containing a silicon nitride or a silicon boride is included at a number of interfaces between the molybdenum layers (4) and the silicon layers (3). As a result of the barrier layers (5) of a silicon nitride or of a silicon boride, high thermal stability is achieved, in particular high long-term stability at temperatures of more than 300° C., whilst at the same time achieving high reflectivity in the multilayer mirror. A multilayer mirror (1) of this type can, in particular, be used as a heatable collector mirror for an EUV radiation source.
    Type: Application
    Filed: December 23, 2005
    Publication date: April 17, 2008
    Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
    Inventors: Nicolas Benoit, Torsten Feigl, Norbert Kaiser, Sergiy Yulin