Abstract: An anesthetic gas delivery system includes a gas machine for supplying anesthetic gas to a patient; a scavenging control system that controls a level of vacuum suction to evacuate waste anesthetic gas; and a user interface electronically coupled to the scavenging control system. The scavenging control system includes an air flow sensor external from the gas machine that measures the flow rate of the waste anesthetic gas through the scavenging control system; a control valve, such as a proportional solenoid valve, that is controllable to adjust the level of vacuum suction to adjust the flow rate of the waste anesthetic gas; and electronic control circuitry that is configured to receive a measured flow rate from the sensor and to control the control valve to adjust the level of vacuum suction based on the flow rate measured by the sensor. The electronic control circuitry further is configured to transmit flow rate information corresponding to the flow rate measured by the sensor to the user interface.

Abstract: A method and system are provided for an integrated fluid and vapor delivery system design that optimizes vapor delivery. The method and system utilize a purgeable valve assembly which is closely coupled to a vaporizer. The purgeable valve assembly includes a liquid control valve and a purge gas valve which are connected by an outlet to the vaporizer in a manner minimizing the dead volume of the liquid supplied to the vaporizer. The system does not require the liquid precursor to be subjected to vacuum prior to entry into the vaporizer.

Abstract: A method and system are provided for an integrated fluid and vapor delivery system design that optimizes vapor delivery. The method and system utilize a purgeable valve assembly which is closely coupled to a vaporizer. The purgeable valve assembly includes a liquid control valve and a purge gas valve which are connected by an outlet to the vaporizer in a manner minimizing the dead volume of the liquid supplied to the vaporizer. The system does not require the liquid precursor to be subjected to vacuum prior to entry into the vaporizer.

Abstract: A method for purifying a precursor material for use in a chemical vapor deposition system comprising providing a precursor material suitable for chemical vapor deposition, and distilling the precursor material to provide, as a distillate, a purified precursor material from which at least one non-volatile component, at least one metal impurity, or a combination thereof has been removed. The method may be used to purify siloxane and silane precursor materials and reduce clogging of chemical vapor deposition components.

Abstract: An integrated fluid delivery system (IFDS) is provided for delivering fluid streams such as high purity fluid streams to a processing destination, such as a wafer processing chamber. The delivery system includes a first modular manifold for internally channeling the high purity fluid streams along seamless slots. The first modular manifold receives each of the high purity fluid streams at a corresponding porting aperture. At least one fluid device from a group consisting of a flow controller, a valve, a filter and a pressure transducer is provided. The at least one fluid device is in fluidic communication with a corresponding one of the high purity liquid streams of the first modular manifold to dispense the high purity fluid streams from the integrated liquid delivery system to the wafer processing chamber.

Abstract: An atomizer is provided for combining a precise mass of atomized liquid into a gas stream. The atomizer includes a mixing slot formed in a face of a base member. The mixing slot comprises a throat in fluid communication with a gas inlet side having a smoothly decreasing cross-sectional area and a mixture outlet side having a smoothly increasing cross-sectional area. A gas stream enters the mixing slot via gas inlet side and a liquid enters the mixing slot via a liquid inlet in fluid communication with the throat of the mixing slot. The mixing slot is sealed by a sealing member abutting the face of the base member with the mixing slot in it. The liquid is atomized and combined with a gas stream by venturi effect.

Abstract: A flow controller is provided for delivering a precise volume of fluid such as high purity fluid streams to a processing destination, such as a wafer processing chamber. The flow controller includes a base with a seamless slot formed in a face thereof, providing a predictable pressure drop. The seamless slot is in fluidic communication with a sensor channel extending downwardly from the seamless slot first having temperature sensors thereon for inferring the mass flow through the flow controller. A valve is in fluidic communication with the seamless slot and is operably connected to the temperature sensors such that the valve opening is adjusted until the mass flow inferred by the temperature sensors is equal to a desired mass flow.

Abstract: A vaporizer is provided for delivering vapor streams such as high purity streams to a processing destination, such as a wafer processing chamber. The vaporizer includes a heated base having one or more seamless slots formed in one of its faces for carrying a liquid which is vaporized by heat from the heated plate. In one embodiment, the vaporizer includes an atomizer for atomizing the liquid prior to vaporization to reduce the temperature of vaporization. In one embodiment, the vaporizer includes a heat exchanger having cross-slots intersecting a plurality of seamless slots to reduce unvaporized liquid from exiting the vaporizer.

Abstract: An atomizer is provided for combining a precise mass of atomized liquid into a gas stream. The atomizer includes a mixing slot formed in a face of a base member. The mixing slot comprises a throat in fluid communication with a gas inlet side having a smoothly decreasing cross-sectional area and a mixture outlet side having a smoothly increasing cross-sectional area. A gas stream enters the mixing slot via gas inlet side and a liquid enters the mixing slot via a liquid inlet in fluid communication with the throat of the mixing slot. The mixing slot is sealed by a sealing member abutting the face of the base member with the mixing slot in it. The liquid is atomized and combined with a gas stream by venturi effect.

Abstract: A flow controller is provided for delivering a precise volume of fluid such as high purity fluid streams to a processing destination, such as a wafer processing chamber. The flow controller includes a base with a seamless slot formed in a face thereof, providing a predictable pressure drop. The seamless slot is in fluidic communication with a sensor channel extending downwardly from the seamless slot first having temperature sensors thereon for inferring the mass flow through the flow controller. A valve is in fluidic communication with the seamless slot and is operably connected to the temperature sensors such that the valve opening is adjusted until the mass flow inferred by the temperature sensors is equal to a desired mass flow.

Abstract: An integrated fluid delivery system (IFDS) is provided for delivering fluid streams such as high purity fluid streams to a processing destination, such as a wafer processing chamber. The delivery system includes a first modular manifold for internally channeling the high purity fluid streams along seamless slots. The first modular manifold receives each of the high purity fluid streams at a corresponding porting aperture. At least one fluid device from a group consisting of a flow controller, a valve, a filter and a pressure transducer is provided. The at least one fluid device is in fluidic communication with a corresponding one of the high purity liquid streams of the first modular manifold to dispense the high purity fluid streams from the integrated liquid delivery system to the wafer processing chamber.

Abstract: A vaporizer is provided for delivering vapor streams such as high purity streams to a processing destination, such as a wafer processing chamber. The vaporizer includes a heated base having one or more seamless slots formed in one of its faces for carrying a liquid which is vaporized by heat from the heated plate. In one embodiment, the vaporizer includes an atomizer for atomizing the liquid prior to vaporization to reduce the temperature of vaporization. In one embodiment, the vaporizer includes a heat exchanger having cross-slots intersecting a plurality of seamless slots to reduce unvaporized liquid from exiting the vaporizer.