Abstract: A shelf assembly can comprise a plurality of stanchions, each stanchion having an axis of elongation and comprising a pair of generally parallel legs that define a slot therebetween and respective front edges. A shelf can have an underside and an opposed upper surface that defines a plane. The shelf can be pivotably coupled to the stanchions about an axis about and between a stowed position and a use position. The axis can extend through the plurality of stanchions at a location above the plane when the shelf is in the use position. At least one biasing element can be disposed at least partially within the slot and configured to bias the shelf toward the stowed position.

Abstract: The object of the invention is to provide an automatic module and cassette station detecting and aligning semiconductor wafer/substrate material handling unit with a thermal processing chamber module having an integrated, sturdy, chemical and temperature resistant wafer lift pins and door actuation apparatus. One of the benefits that is derived from this apparatus is the ability to quickly and easily attach various processing modules at any docking position of the semiconductor wafer/substrate material handling unit (hereinafter MHU). The MHU of this apparatus has the additional benefit of a cassette station that automatically aligns and detects a plurality of different size and shape semiconductor wafer/substrate cassettes. The semiconductor wafer/substrate cassettes may also be functionally attached to a module that is docked to the MHU for use.

Abstract: A probe system for probing a device under test (DUT) includes a DUT support chuck for holding the DUT. A plurality of flexible probe needles are positioned along a "Z" axis that extends orthogonally from the surface of the DUT. Each probe needle is movable with respect to the DUT support chuck. A motor provides for relative movement, at least along the Z axis, between the probe needles and the DUT support chuck. A variable focus imaging system is positioned along the Z axis and provides image signals to a control processor. The control processor causes the variable focus imaging system to image the surface of the DUT and at least one probe needle. The control processor is responsive to a determined distance between focal planes containing the DUT surface and probe needle to cause the motor to move the probe needle and the DUT surface into physical engagement.