Abstract: An electro-optical modulator includes a hybrid waveguide with electrodes located on both sides of the hybrid waveguide. A method of making the electro-optical modulator includes providing a first component, which includes a silicon layer and conductive wiring structures located on both sides of the silicon layer; providing a second component, which includes a nonlinear optical material layer and conductive wiring structures located on both sides of the nonlinear optical material layer; and bonding the first component to the second component, wherein the silicon layer and the nonlinear optical material layer are stacked to form the hybrid waveguide, and the conductive wiring structures located on both sides of the silicon layer are electrically connected to those located on both sides of the nonlinear optical material layer to form the electrodes.