Abstract: In order to provide a method to easily and surely adjust the focal distance as in a Wobbler apparatus of the transmission type electron microscope method, a crossover 11 of a charged particle beam 2 is established between a charged particle gun 1 and an objective lens 6 and a beam deflection device 4 is provided to deflect the charged particle beam at the crossover point as the supporting point. A total controller 9 calculates an amount of the out of focus from a moving amount of the microscopic image obtained by deflecting the beam and orders the objective lens power supply to move the microscopic image as the focal distance.

Abstract: A structure of aligning acceleration mode convergence electrostatic lenses is employed. One acceleration mode convergence electrostatic lens is formed in a range of the first, the second and the third electrodes, and the other acceleration mode convergence electrostatic lens is formed in a range of the third, the fourth and the fifth electrodes. Since energy of an ion beam passing through a position where convex lens action is produced is large, it is possible to maintain the characteristic that the chromatic aberration coefficient of the acceleration electrostatic lens is small. By increasing number of positions performing convex lens action, it is possible to obtain the acceleration mode convergence with a low lens voltage.

Abstract: In order to provide a method to easily and surely adjust the focal distance as in a Wobbler apparatus of the transmission type electron microscope method, a crossover 11 of a charged particle beam 2 is established between a charged particle gun 1 and an objective lens 6 and a beam deflection device 4 is provided to deflect the charged particle beam at the crossover point as the supporting point. A total controller 9 calculates an amount of the out of focus from a moving amount of the microscopic image obtained by deflecting the beam and orders the objective lens power supply to move the microscopic image as the focal distance.

Abstract: An apparatus for producing a highly accurate three-dimensional image of a solid in the micro order is provided. The apparatus is composed of an ion column, an electron column, a specimen chamber, a specimen stage, a diluent gas ion column, a control system, and so on. The apparatus has the following advantages: (1) correct three-dimensional information can be provided even if a specimen is composed of composite materials; (2) since a worked dimension can be accurately measured, highly accurate three-dimensional observation can be achieved in the micron order; (3) since a plurality of images can be stored for an observed surface, a plurality of three-dimensional images can be produced from a single specimen; and (4) since a side entry stage is employed as a specimen stage, a working column and an observation column can be positioned close to a specimen, so that beams from the respective columns can be well converged, thus making it possible to produce highly accurate three-dimensional images.

Abstract: A charged particle beam apparatus comprising a charged particle beam source(s) for generating an ion beam and an electron beam, a focusing lens system for finely focusing each of the generated ion beam and electron beam, a charged particle beam deflecting system for deflecting each of the focused ion beam and electron beam, and a specimen subjected to irradiation thereof with each of the focused ion beam and electron beam is provided with means for detecting the deviation of the irradiation positions of the ion beam and the electron beam on the specimen from each other and means for making the irradiation positions of the ion beam and the electron beam on the specimen coincident with each other on the basis of the result of detection of the deviation of the irradiation positions from each other.

Abstract: A focus control system used in a transmission electron microscope includes an electron lens for imaging the electron beam transmitted through a specimen onto the imaging plate, apparatus for deflecting the electron beam irradiation angle, and several electron beam sensors disposed of the imaging plane. Output signals produced by each sensor at two irradiation angles are integrated and stored in the memory separately. The difference between each pair of integrated values in the memory is calculated, and all differences for all sensor output pairs are summed up. The lens current of the electron lens is controlled so that the summed output is a minimum value.

Abstract: Focusing device for a transmission type electron microscope displaying an enlarged image on a television monitor, in which the incident angle of the electron beam on the sample is varied with a constant frequency and the focal length of the objective electron lens is so controlled that there is no change between the image observed before change of the incident angle of the electron beam and that observed thereafter, wherein timing for changing the incident angle is set during the blanking intervals of the vertical synchronizing signal of the television so that fluctuations of the image can be clearly detected.

Abstract: The present invention provides an electron holography microscope producing an interference pattern having contour moire lines which is displayed on a cathode-ray tube. With the invention the three-dimensional structure of a specimen can be readily observed on the cathode-ray tube. The electron holography microscope of the present invention comprises a television camera which picks up the interference pattern a straight line fringe output means for delivering a straight line fringe pattern the direction and interval of which are selected at will. Outputs of the television camera and the means are added in a multiplier and the result is displayed on the cathode-ray tube.

Abstract: In an X-ray tube comprising a cathode electrode including a filament for emitting electrons and a focusing electrode having a focusing groove adapted to contain the filament, and an anode electrode opposing the cathode electrode and maintained at a high potential which is positive relative to the filament, an electron emitting region of the filament facing the anode electrode is formed as a substantially flat surface, and the filament, the focusing electrode and the anode electrode are arranged such that a portion of the anode electrode upon which electron collide will be positioned in a focal plane of a cathode lens formed by the filament, the focusing electrode and the anode electrode.