Abstract: The present disclosure relates to an internal pressure control apparatus capable of uniformly processing an upper surface of a semiconductor substrate and a substrate processing apparatus including the same. The substrate processing apparatus comprising a chamber housing including an exhaust hole for exhausting a process gas flowing thereinto, a substrate support unit inside the chamber housing, supporting a semiconductor substrate, a process gas supply unit providing the process gas to the inside of the chamber housing, a plasma generating unit generating plasma inside the chamber housing by using the process gas, and a ring body installed around the substrate support unit and provided as one body, and further comprising an internal pressure control apparatus controlling an internal pressure of the chamber housing, wherein the internal pressure control apparatus controls a posture of the ring body to control an exhaust amount of the process gas flowing into the chamber housing.

Abstract: A hybrid actuator includes a housing for defining an external appearance, a stator having a coil, a vibrator having a permanent magnet which vibrates due to a mutual electromagnetic force with the stator, an elastic member for elastically supporting the vibrator relative to the housing, and a piezoelectric element attached to one surface of the housing.

Abstract: A sound converter includes a rectangular frame, a first suspension seated on an upper side of the frame to vibrate, a second suspension attached to a bottom surface of the first suspension and electrically connected to a voice coil to vibrate, a magnetic circuit including a center magnet, a plurality of sub-magnets spaced apart from the center magnet by a certain distance to define a magnetic gap, a plurality of top plates positioned above the center magnet and each sub-magnet, and a bottom plate positioned below the center magnet and each sub-magnet, and a third suspension connecting a lower end or a lower end lateral surface of the voice coil to the frame to vibrate. The voice coil is attached to a bottom surface of the second suspension. The third suspension is positioned through spaces defined by the sub-magnets being spaced apart from each other.

Abstract: The present invention relates to a high power microspeaker having a separate sub-diaphragm on a top end surface of a coil, in addition to a diaphragm and a suspension. The present invention provides a structure in which an acoustic system including a main diaphragm and a conductive suspension of a microspeaker is attached to a top end surface of a coil and a separate sub-diaphragm is attached to the same surface of the coil.

Abstract: The present invention discloses a microspeaker enclosure with porous materials, including a microspeaker, an enclosure with the microspeaker therein, the enclosure defining a resonance space and having an upper casing and a lower casing, a sound absorber arranged in the resonance space and defining a space, and porous materials filled in the space defined by the sound absorber.

Abstract: A hybrid actuator includes a housing for defining an external appearance, a stator having a coil, a vibrator having a permanent magnet which vibrates due to a mutual electromagnetic force with the stator, an elastic member for elastically supporting the vibrator relative to the housing, and a piezoelectric element attached to one surface of the housing.

Abstract: A mobile apparatus has a linear actuator configured to generate vibration and sound, and further includes: a display panel; a frame; and a linear actuator arranged on the frame and configured to vibrate at 50 to 300 Hz to generate a vibration signal or to vibrate at 50 to 20000 Hz to generate a sound signal. The frame encompasses a case for defining the external appearance with the display and an inner bracket on which electronic parts are to be arranged. As compared with a linear actuator that excites a display panel to generate only sound, the linear actuator that performs the vibration function should provide a strong vibration power, which may damage the display panel. This is the reason why the linear actuator is arranged on the frame, not on the display panel.

Abstract: A sound converter includes a rectangular frame, a first suspension seated on an upper side of the frame to vibrate, a second suspension attached to a bottom surface of the first suspension and electrically connected to a voice coil to vibrate, a magnetic circuit including a center magnet, a plurality of sub-magnets spaced apart from the center magnet by a certain distance to define a magnetic gap, a plurality of top plates positioned above the center magnet and each sub-magnet, and a bottom plate positioned below the center magnet and each sub-magnet, and a third suspension connecting a lower end or a lower end lateral surface of the voice coil to the frame to vibrate. The voice coil is attached to a bottom surface of the second suspension. The third suspension is positioned through spaces defined by the sub-magnets being spaced apart from each other.

Abstract: The present invention relates to a high power microspeaker having a separate sub-diaphragm on a top end surface of a coil, in addition to a diaphragm and a suspension. The present invention provides a structure in which an acoustic system including a main diaphragm and a conductive suspension of a microspeaker is attached to a top end surface of a coil and a separate sub-diaphragm is attached to the same surface of the coil.

Abstract: The present invention discloses a microspeaker enclosure with porous materials, including a microspeaker, an enclosure with the microspeaker therein, the enclosure defining a resonance space and having an upper casing and a lower casing, a sound absorber arranged in the resonance space and defining a space, and porous materials filled in the space defined by the sound absorber.

Abstract: A microspeaker includes a frame, magnetic circuit, voice coil configured to generate vibration by mutual electromagnetic force with the magnetic circuit, vibration plate configured to vibrate together according to the vibration of the voice coil to generate a sound, and suspension configured to guide a vibration direction of the vibration plate and voice coil. The suspension has a central portion attached to the voice coil, an annular outer circumferential portion formed to be spaced apart from the central portion by a predetermined interval, and a connection portion connecting the central and outer circumferential portions and configured to perform a damping function. The central portion has an outer end having the same height as the connection and outer circumferential portions, an inner end positioned to be higher than the outer end, and a step portion connecting the outer end and inner end. The voice coil is attached to the inner end.

Abstract: A microspeaker includes a frame, magnetic circuit, voice coil configured to generate vibration by mutual electromagnetic force with the magnetic circuit, vibration plate configured to vibrate together according to the vibration of the voice coil to generate a sound, and suspension configured to guide a vibration direction of the vibration plate and voice coil. The suspension has a central portion attached to the voice coil, an annular outer circumferential portion formed to be spaced apart from the central portion by a predetermined interval, and a connection portion connecting the central and outer circumferential portions and configured to perform a damping function. The central portion has an outer end having the same height as the connection and outer circumferential portions, an inner end positioned to be higher than the outer end, and a step portion connecting the outer end and inner end. The voice coil is attached to the inner end.