Abstract: The inventive concept provides a substrate treating apparatus. The substrate includes a process chamber in which a substrate is treated, and a transfer robot that transfers the substrate and a focusing ring provided in a treatment space of the process chamber to the treatment space and having a hand, wherein the process chamber includes a treatment container that provides the treatment space, a chuck having a support surface supporting the substrate in the treatment space, and a lift pin module that lifts a lower surface of the focusing ring in a state in which the substrate is supported by the focusing ring, and the chuck is provided as a blocking plate in which a lift pin hole is not formed.

Abstract: A data acquisition system (DAS) for processing an input signal from a resistive sensor (e.g., Hall effect sensor) includes a sensor signal path that digitizes the input signal. An input impedance of the sensor signal path attenuates the input signal. A gain error corrector applies a gain error correction factor in a digital domain of the DAS to the digitized input signal to compensate for a loading effect to the resistive sensor. The sensor signal path includes an inverting amplifier that provides low distortion for the input signal and an ADC (e.g., delta-sigma, SAR, pipelined, auxiliary) that digitizes the input signal. A sensor characterization path digitizes the sensor resistance which the gain error corrector uses, along with the inverting amplifier input impedance, to calculate the gain error correction factor.

Abstract: A data acquisition system (DAS) for processing an input signal from a resistive sensor (e.g., Hall effect sensor) includes a sensor signal path that digitizes the input signal. An input impedance of the sensor signal path attenuates the input signal. A gain error corrector applies a gain error correction factor in a digital domain of the DAS to the digitized input signal to compensate for a loading effect to the resistive sensor. The sensor signal path includes an inverting amplifier that provides low distortion for the input signal and an ADC (e.g., delta-sigma, SAR, pipelined, auxiliary) that digitizes the input signal. A sensor characterization path digitizes the sensor resistance which the gain error corrector uses, along with the inverting amplifier input impedance, to calculate the gain error correction factor.

Abstract: A data acquisition system (DAS) for acquiring data from a Hall effect sensor includes one or more state variables, a multiplexer that periodically rotates a signal from the Hall effect sensor, and a controller that resets the one or more state variables in synchronization with rotation of the signal. The state variables may be digital states in a digital memory or voltages of capacitors the controller forces to a reset voltage. The state variables may be included in a noise-shaping SAR ADC, a delta-sigma ADC, a digital filter, an integrator, an analog filter, a VCO, an incremental ADC or an auxiliary ADC-assisted incremental ADC, or an auxiliary ADC of the DAS.

Abstract: Provided are a process gas supply apparatus which supplies a process gas onto a wafer to etch an oxide layer by dividing an edge zone into a first zone and a second zone located outside the first zone and dividing the second zone into a plurality of sub-zones and a wafer treatment system including the process gas supply apparatus.

Abstract: Provided are a process gas supply apparatus which supplies a process gas onto a wafer to etch an oxide layer by dividing an edge zone into a first zone and a second zone located outside the first zone and dividing the second zone into a plurality of sub-zones and a wafer treatment system including the process gas supply apparatus.

Abstract: The present invention relates to an apparatus for editing geological elements using a touch-based interface for retrieving geological information of a survey area, thereby mapping and displaying geometric elements of points, lines, and areas. The apparatus for editing geological elements according to the present invention includes a geological symbol storage module configured to store point symbols, line symbols, and area symbols; a geographic information storage module; a geological element edit module configured, by a user's operation, to read geological information on a specific map from the geological information storage module, to read the symbols from the geological symbol storage module, to rotate the point symbols, to connect the line symbols to each other, to automatically transform the line symbols to area symbols, and to automatically create outlines for the area symbols; a controller; and a display module.

Abstract: Reducing noise for an amplifier-based system circuit that comprises a first differential input pair and a second differential input pair, a first input stage circuit connected to the first differential input pair, wherein the first input stage is configured with a first transconductance value, a second input stage circuit connected to the second differential input pair, wherein the second input stage is configured with a second transconductance value that is less than the first transconductance value, a transimpedance circuit coupled to the first input stage circuit and the second input stage circuit, and a feedback loop circuit coupled to the transimpedance circuit and to the second differential input pair, wherein the feedback loop circuit is not connected to the first differential input pair.

Abstract: A method for controlling a curvature of a display device as a control method of the curvature of the display device including a flexible display panel, a curvature change member, a controller, and a photo sensor includes: measuring an amount of a light incident to the flexible display panel by using a photo sensor; confirming a position of a part where the amount of the measured light is more than a predetermined reference value in the flexible display panel when the amount of the measured light is more than the reference value; and changing the curvature around the part where the amount of the measured light is more than the reference value in the flexible display panel by using the curvature change member.

Abstract: A display device includes a flexible display panel; a rolling driver including a rolling shaft connected to the flexible display panel and a rotation motor which rotates the rolling shaft; a housing which receives the flexible display panel in a rolled state, where a first opening is defined in the housing for unrolling and rolling the flexible display panel; a rolling stopper coupled to the flexible display panel; and a rolling controller which controls the rolling driver such that the rotation motor rotates in a clockwise or counterclockwise direction. The rolling controller rotates the rotating motor in a direction opposite to a rotating direction of the rotation motor for a previous rolling to unroll the flexible display panel. The rolling controller rotates the rotating motor in a same direction as a rotating direction of the rotation motor for a previous unrolling to roll the flexible display panel.

Abstract: An integrated force sensing element includes a piezoelectric sensor formed in an integrated circuit (IC) chip and a strain gauge at least partially overlying the piezoelectric sensor, where the piezoelectric sensor is able to flex. A human-machine interface using the integrated force sensing element is also disclosed and may include a conditioning circuit, temperature gauge, FRAM and a processor core.

Abstract: A method for controlling a curvature of a display device as a control method of the curvature of the display device including a flexible display panel, a curvature change member, a controller, and a photo sensor includes: measuring an amount of a light incident to the flexible display panel by using a photo sensor; confirming a position of a part where the amount of the measured light is more than a predetermined reference value in the flexible display panel when the amount of the measured light is more than the reference value; and changing the curvature around the part where the amount of the measured light is more than the reference value in the flexible display panel by using the curvature change member.

Abstract: The present invention relates to an apparatus for editing geological elements using a touch-based interface for retrieving geological information of a survey area, thereby mapping and displaying geometric elements of points, lines, and areas. The apparatus for editing geological elements according to the present invention includes a geological symbol storage module configured to store point symbols, line symbols, and area symbols; a geographic information storage module; a geological element edit module configured, by a user's operation, to read geological information on a specific map from the geological information storage module, to read the symbols from the geological symbol storage module, to rotate the point symbols, to connect the line symbols to each other, to automatically transform the line symbols to area symbols, and to automatically create outlines for the area symbols; a controller; and a display module.

Abstract: A display device is disclosed. The display device may include a display panel, a light blocking member, a distance sensing member, and a controlling member. The display panel may include a pixel region and a transmission region. The light blocking member may be disposed on a rear surface of the display panel and have an adjustable light transmittance. The distance sensing member may sense a viewing distance between a viewer and the display device. The controlling member may calculate a proper viewing distance range, may compare the viewing distance with the proper viewing distance range to generate a comparison result, and may adjust the light transmittance of the light blocking member based on the comparison result.

Abstract: An integrated force sensing element includes a piezoelectric sensor formed in an integrated circuit (IC) chip and a strain gauge at least partially overlying the piezoelectric sensor, where the piezoelectric sensor is able to flex. A human-machine interface using the integrated force sensing element may include a conditioning circuit, temperature gauge, FRAM and a processor core.

Abstract: A method for controlling a curvature of a display device as a control method of the curvature of the display device including a flexible display panel, a curvature change member, a controller, and a photo sensor includes: measuring an amount of a light incident to the flexible display panel by using a photo sensor; confirming a position of a part where the amount of the measured light is more than a predetermined reference value in the flexible display panel when the amount of the measured light is more than the reference value; and changing the curvature around the part where the amount of the measured light is more than the reference value in the flexible display panel by using the curvature change member.

Abstract: Reducing noise for an amplifier-based system circuit that comprises a first differential input pair and a second differential input pair, a first input stage circuit connected to the first differential input pair, wherein the first input stage is configured with a first transconductance value, a second input stage circuit connected to the second differential input pair, wherein the second input stage is configured with a second transconductance value that is less than the first transconductance value, a transimpedance circuit coupled to the first input stage circuit and the second input stage circuit, and a feedback loop circuit coupled to the transimpedance circuit and to the second differential input pair, wherein the feedback loop circuit is not connected to the first differential input pair.

Abstract: A display device, including a first transparent magnetic layer; a display panel on the first transparent magnetic layer; an upper member on the display panel; and a second transparent magnetic layer on the upper member, the second transparent magnetic layer being penetrated by light.

Abstract: A display device includes a foldable display panel module to fold in a folding region, a folding sensor to sense a folding state of the foldable display panel module, a support on the foldable display panel module in the rigid region, a vibrator on the foldable display panel module in the folding region, and a vibration controller to control a vibration operation of the vibrator based on the folding state.

Abstract: A display device includes a flexible display panel; a rolling driver including a rolling shaft connected to the flexible display panel and a rotation motor which rotates the rolling shaft; a housing which receives the flexible display panel in a rolled state, where a first opening is defined in the housing for unrolling and rolling the flexible display panel; a rolling stopper coupled to the flexible display panel; and a rolling controller which controls the rolling driver such that the rotation motor rotates in a clockwise or counterclockwise direction. The rolling controller rotates the rotating motor in a direction opposite to a rotating direction of the rotation motor for a previous rolling to unroll the flexible display panel. The rolling controller rotates the rotating motor in a same direction as a rotating direction of the rotation motor for a previous unrolling to roll the flexible display panel.