Abstract: According to an aspect of the present disclosure, there is provided a substrate treating apparatus comprising: a vessel part having a substrate treatment region formed therein and including a supply port through which a treating fluid is supplied to the substrate treatment region and an exhaust port through which the treating fluid is exhausted from the substrate treatment region; a fluid supply unit configured to supply the treating fluid to the substrate treatment region; an exhaust unit configured to exhaust the treating fluid from the vessel part. The exhaust unit comprises: a main line connected to the exhaust port; an extension line branched from at least one of first and second nodes of the main line and including at least one of a first orifice or a first check valve to control an exhaust speed; and an auxiliary line branched from a third node of the main line, where an orifice and a check valve are not formed.

Abstract: A substrate treating apparatus of the present disclosure comprises: a chamber member having an accommodation space configured to accommodate a vessel part where a substrate treatment region constituting a supercritical treatment space are formed, and an opening configured to move the substrate inside or outside; a shutter configured to open or close the chamber member; and a first exhaust part configured to discharge an internal air from the accommodation space to the outside, wherein the temperature of the substrate treatment region is increased.

Abstract: According to the present invention, a charging and discharging circuit is electrically connected to an operation signal line and a detection signal line, and repeats a charging and discharging operation of a node capacitor. The present invention also includes an integration capacitor electrically connected to the detection signal line and an integration circuit charging the integration capacitor to a unit charging voltage every charging and discharging operation of the node capacitor such that the integration capacitor is charged to a first voltage that is integrated according to a charging and discharging number. The integration circuit may include a reset switch electrically connected to the integration capacitor and discharging the first voltage integrated and charged to the integration capacitor for initializing.