Patents by Inventor Seung-hyung Nam

Seung-hyung Nam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for manufacturing a mask
    Patent number: 6444375
    Abstract: An exposing method comprises use of different kinds of aligning and exposing apparatuses having different alignment and exposure characteristics. Capability to select a suitable aligning and exposing apparatus for each layer to be formed is accomplished by manufacturing a mask used for the exposure to be compatible with different kinds of aligning and exposing apparatuses.
    Type: Grant
    Filed: November 12, 2001
    Date of Patent: September 3, 2002
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Seung-hyung Nam, Tae-ho Jang
  • Method for manufacturing a mask
    Publication number: 20020064715
    Abstract: An exposing method comprises use of different kinds of aligning and exposing apparatuses having different alignment and exposure characteristics. Capability to select a suitable aligning and exposing apparatus for each layer to be formed is accomplished by manufacturing a mask used for the exposure to be compatible with different kinds of aligning and exposing apparatuses.
    Type: Application
    Filed: November 12, 2001
    Publication date: May 30, 2002
    Inventors: Seung-Hyung Nam, Tae-Ho Jang
  • Exposing method in which different kinds of aligning and exposing apparatuses are used
    Patent number: 6361907
    Abstract: An exposing method comprises use of different kinds of aligning and exposing apparatuses having different alignment and exposure characteristics. Capability to select a suitable aligning and exposing apparatus for each layer to be formed is accomplished by manufacturing a mask used for the exposure to be compatible with different kinds of aligning and exposing apparatuses.
    Type: Grant
    Filed: January 18, 2000
    Date of Patent: March 26, 2002
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Seung-hyung Nam, Tae-ho Jang