Patents by Inventor Seung-Jun Lim

Seung-Jun Lim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Spin-coating apparatus for use in manufacturing semiconductor devices
    Patent number: 7276118
    Abstract: Spin-coating apparatus for use in manufacturing a semiconductor device includes a spin-chuck for rotating a wafer or the like, and a baffle plate disposed under the spin chuck to collect and discharge residue spun off of the wafer as the wafer is rotated by the spin chuck. The inner periphery of the baffle plate and a portion of a clamping plate adjacent the inner periphery of the baffle plate are configured to prevent the baffle plate from moving up relative to the clamping plate. Also, an outer peripheral surface of the clamping plate and a portion of the baffle plate adjacent the outer peripheral edge of the clamping plate may be configured as a guide to seat the baffle plate on the clamping plate and prevent the baffle plate from moving laterally relative to the clamping plate.
    Type: Grant
    Filed: May 6, 2005
    Date of Patent: October 2, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Seung-Jun Lim
  • Spin-coating apparatus for use in manufacturing semiconductor devices
    Publication number: 20050274315
    Abstract: Spin-coating apparatus for use in manufacturing a semiconductor device includes a spin-chuck for rotating a wafer or the like, and a baffle plate disposed under the spin chuck to collect and discharge residue spun off of the wafer as the wafer is rotated by the spin chuck. The inner periphery of the baffle plate and a portion of a clamping plate adjacent the inner periphery of the baffle plate are configured to prevent the baffle plate from moving up relative to the clamping plate. Also, an outer peripheral surface of the clamping plate and a portion of the baffle plate adjacent the outer peripheral edge of the clamping plate may be configured as a guide to seat the baffle plate on the clamping plate and prevent the baffle plate from moving laterally relative to the clamping plate.
    Type: Application
    Filed: May 6, 2005
    Publication date: December 15, 2005
    Inventor: Seung-Jun Lim