Abstract: In one embodiment, a method for operating a substrate processing apparatus comprising a chamber in which a fluorine/silicon-containing substance is deposited on an inner wall through an oxide film removal process for a substrate placed therein, and an antenna installed outside the chamber to which RF power is applied, the method comprising: decomposing thermally the fluorine/silicon-containing substance through heating the inner wall of the chamber to 75° C. or more by supplying an inert gas to the inside of the chamber and applying RF power to the antenna.

Abstract: Provided is a substrate treating apparatus. The substrate treating apparatus includes an equipment front end module, a loadlock chamber, a transfer chamber, and a plurality of process chambers. The loadlock chamber includes a cooling unit for cooling a substrate treated in the process chambers, and the cooling unit includes a cooling chamber having an inner space, the cooling chamber having a gas inflow hole in one surface thereof, wherein support pins on which the substrate is placed are disposed around a circumference of the gas injection hole, a cooling gas injection part supplying a cooling gas toward the gas inflow hole, and a gas exhaust part exhausting the cooling gas supplied into the cooling chamber and fumes generated from the substrate to the outside of the cooling chamber.

Abstract: Provided is a substrate treating apparatus, which includes a plasma generating part configured to generate plasma, a housing disposed under the plasma generating part, and having a space therein, a susceptor disposed within the housing and supporting a substrate, and a baffle including injection holes injecting the plasma supplied from the plasma generating part, to the substrate. The baffle includes a base in which the injection holes are formed, and a central portion of the base is thicker than an edge thereof.

Abstract: Provided is a substrate treating apparatus including: a process chamber; a substrate support unit provided to support a substrate within the process chamber; a baffle positioned on the substrate support unit and formed with a plurality of injection holes; and a gas supply unit supplying a gas onto the baffle, wherein the baffle includes a slope region formed at an edge thereof and inclined such that the height of an upper surface thereof increases as it goes to an outer side surface.

Abstract: Provided is an apparatus for treating a substrate. The apparatus for treating the substrate includes a carrying unit between a second chamber and a loadlock chamber. The carrying unit includes an arm, a blade for supporting the substrate, and a rotation driver for rotating the arm. The carrying unit disposed between the second chamber and the loadlock chamber receives the substrate transferred in the loadlock chamber to transfer the substrate onto a substrate supporter in the second chamber.

Abstract: Provided is a substrate treating apparatus. The substrate treating apparatus includes an equipment front end module, a loadlock chamber, a transfer chamber, and a plurality of process chambers. The loadlock chamber includes a cooling unit for cooling a substrate treated in the process chambers, and the cooling unit includes a cooling chamber having an inner space, the cooling chamber having a gas inflow hole in one surface thereof, wherein support pins on which the substrate is placed are disposed around a circumference of the gas injection hole, a cooling gas injection part supplying a cooling gas toward the gas inflow hole, and a gas exhaust part exhausting the cooling gas supplied into the cooling chamber and fumes generated from the substrate to the outside of the cooling chamber.

Abstract: Provided is a substrate treating apparatus, which includes a plasma generating part configured to generate plasma, a housing disposed under the plasma generating part, and having a space therein, a susceptor disposed within the housing and supporting a substrate, and a baffle including injection holes injecting the plasma supplied from the plasma generating part, to the substrate. The baffle includes a base in which the injection holes are formed, and a central portion of the base is thicker than an edge thereof.

Abstract: The present invention relates to a health and diet footwear with buffering means that has a plurality of spring members mounted on the lower portion thereof, thereby obtaining substantially higher exercising effects as compared to a general footwear. The health and diet footwear with buffering means of the invention can detachably mount fixed plates on a sole by means of screws and have a plurality of spring members disposed between the fixed plates disposed on the upper ends of the spring members and a support plate disposed on the lower ends of the spring members by means of detachable mounting or spiral coupling, so that the spring members can be easily and rigidly coupled therebetween. Further, when a part of the spring members is damaged or broken, it can be exchanged individually.

Abstract: In a shock absorber type sports shoes for balance which is equipped with a coil type spring between a sole of a body forming a shoe and an elastic sole, there is provided a shock absorber type sports shoes for balance characterized in that a spring fixing member is provided in an upper end or a lower end of a spring and is equipped with a protrusion on which an end of the spring is wound on its center and is supported by the same, with a spring end insertion groove being formed along a circumference of the same in order for the end of the spring to be mounted and engaged to the same, and the spring fixing member is fixedly engaged into an engaging groove formed in the elastic sole.

Abstract: The present invention relates to a health and diet footwear with buffering means that has a plurality of spring members mounted on the lower portion thereof, thereby obtaining substantially higher exercising effects as compared to a general footwear. The health and diet footwear with buffering means of the invention can detachably mount fixed plates on a sole by means of screws and have a plurality of spring members disposed between the fixed plates disposed on the upper ends of the spring members and a support plate disposed on the lower ends of the spring members by means of detachable mounting or spiral coupling, so that the spring members can be easily and rigidly coupled therebetween. Further, when a part of the spring members is damaged or broken, it can be exchanged individually.