Abstract: The present disclosure relates to a thin film manufacturing apparatus including a chamber having an inner process space of a substrate, a substrate support unit connected to the chamber to support the substrate in the chamber, a heat source unit connected to the chamber and disposed opposite to the substrate support unit, a plasma generation unit connected to one side of the chamber to supply radicals between the substrate support unit and the heat source unit, and a baffle connected to the chamber and including a movement passage of the radicals therein and a plurality of first exhaust holes communicating with the movement passage, which are formed in a top surface thereof. The thin film manufacturing apparatus may improve uniformity of the thin film formed on the substrate.

Abstract: The present disclosure relates to a thin film manufacturing apparatus including a chamber having an inner process space of a substrate, a substrate support unit connected to the chamber to support the substrate in the chamber, a heat source unit connected to the chamber and disposed opposite to the substrate support unit, a plasma generation unit connected to one side of the chamber to supply radicals between the substrate support unit and the heat source unit, and a baffle connected to the chamber and including a movement passage of the radicals therein and a plurality of first exhaust holes communicating with the movement passage, which are formed in a top surface thereof. The thin film manufacturing apparatus may improve uniformity of the thin film formed on the substrate.

Abstract: A door operation apparatus for a vehicle is provided to open or shut a door at a speed corresponding to a user's force or information selected by the user. In particular, the door operating apparatus installed in a body to open and shut an internal room of the body includes: a power member connected to the door for applying a moving force to the door; a detector for detecting a force applied by the user to the door; a controller for determining an open and shut speed corresponding to the detected force and controlling the power member to be driven to open and shut the door at the determined open and shut speed; and a driver for driving the power member based on a command from the controller.

Abstract: A door operation apparatus for a vehicle is provided to open or shut a door at a speed corresponding to a user's force or information selected by the user. In particular, the door operating apparatus installed in a body to open and shut an internal room of the body includes: a power member connected to the door for applying a moving force to the door; a detector for detecting a force applied by the user to the door; a controller for determining an open and shut speed corresponding to the detected force and controlling the power member to be driven to open and shut the door at the determined open and shut speed; and a driver for driving the power member based on a command from the controller.

Abstract: A method for fabricating a light emitting diode lamp in a simplified procedure, and a high-output LED, that has a simple structure and can exhibit improvement in heat release property, fabricated by using the method which includes the steps of coating an insulating layer on a substrate and etching the insulating layer using a mask pack, coating a conductive metal layer on the insulating layer, forming an electrode pattern and a recess, on which an LED chip is mounted, on the metal layer using the mask pack, attaching the LED chip to the top of the recess, connecting a wire to the electrode pattern, and mounting a reflector having a vertical opening hole around the LED chip on the substrate to reflect light emitted from the LED chip in all directions, and molding the top of the substrate from a transparent resin to cover the LED chip, the electrode pattern and the reflector.