Patents by Inventor Seung Woo BAIK

Seung Woo BAIK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Conductive porous ceramic substrate and method of manufacturing same
    Patent number: 11521889
    Abstract: The present invention relates to a conductive porous ceramic substrate and a method of manufacturing the same, and more particularly to a conductive porous ceramic substrate, in which a porous ceramic substrate used as a chuck or stage for fixing a thin semiconductor wafer substrate or display substrate through vacuum adsorption is imparted with antistatic performance so as to prevent the generation of static electricity, and a method of manufacturing the same.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: December 6, 2022
    Assignees: MAX TECH CO., LTD., Tri-N CO., LTD.
    Inventors: Byoung Hak Kim, Seung Woo Baik, June Beom Choi, In Woong Kim, Jong Yeol Jung, Chun Moo Lee, Gyu Ha Kim, In Bum Shin
  • CONDUCTIVE POROUS CERAMIC SUBSTRATE AND METHOD OF MANUFACTURING SAME
    Publication number: 20200013665
    Abstract: The present invention relates to a conductive porous ceramic substrate and a method of manufacturing the same, and more particularly to a conductive porous ceramic substrate, in which a porous ceramic substrate used as a chuck or stage for fixing a thin semiconductor wafer substrate or display substrate through vacuum adsorption is imparted with antistatic performance so as to prevent the generation of static electricity, and a method of manufacturing the same.
    Type: Application
    Filed: June 28, 2019
    Publication date: January 9, 2020
    Inventors: Byoung Hak KIM, Seung Woo BAIK, June Beom CHOI, In Woong KIM, Jong Yeol JUNG, Chun Moo LEE, Gyu Ha KIM, In Bum SHIN