Abstract: Disclosed are a substrate processing method and a substrate processing apparatus, and more particularly, a substrate processing apparatus which treats a substrate by adjusting airflow supplied to a process space.

Abstract: A method for manufacturing a semiconductor device includes providing a first pre-reticle including a first overlay mark and a first on-cell pattern. A second pre-reticle is provided that includes a second overlay mark and a second on-cell pattern. A first pattern is formed from the first pre-reticle using a first illumination system. A second pattern is formed from the second pre-reticle using a second illumination system. An overlay error is measured between the first pattern and the second pattern. A corrected reticle is formed based on the measured overlay error.

Abstract: A secondary battery includes an electrode assembly including a positive electrode plate, a negative electrode plate, and a separator disposed between the positive electrode plate and the negative electrode plate, wherein the electrode assembly has a first end, a second end opposite the first end, a first side and a second side opposite the first side, a pouch configured to surround the electrode assembly, and an inner support installed between the pouch and the electrode assembly to support the inside of the pouch.

Abstract: A dual-mode coaxial fiber sensor has a structure in which a core fiber, a strain sensing layer formed on the core fiber and made of a conductive material, and a temperature sensing layer formed on the surface of the strain sensing layer and made of a conductive material are stacked, thereby simultaneously measuring a temperature and a strain using one sensor.

Abstract: A semiconductor memory device includes a cell unit including a stack structure and a channel structure penetrating through the stack structure, the stack structure including at least one string selection gate and a plurality of cell gates, cell separation structures separating the cell unit in a first direction, and gate cutting structures defining regions within the cell unit between adjacent cell separation structures. The cell unit includes a first region defined between a first cell separation structure and a first gate cutting structure and a second region defined between the first gate cutting structure and a second gate cutting structure. A ratio of a region of the at least one string selection gate that is occupied by a conductive material in the second region is greater than a ratio of a region of at least one cell gate that is occupied by the conductive material in the second region.

Abstract: Provided is an immunomodulatory treatment composition for a transplantation disease through combined administration of a microbiome and an immunosuppressant. According to the present disclosure, it was confirmed that in an allogeneic transplantation cell model, combined administration of FK506 and the microbiome suppressed alloresponse and regulated the activity of T cells and B cells. Further, it was confirmed that in an acute graft-versus-host disease animal model, the combined administration reduced the disease activity, increased the probability of survival, and protected the tissue damage. In addition, it was confirmed that the combined administration improved transplantation rejection diseases by reducing the activity of Th1 and Th17 and increasing the activity of Tregs, and thus can be usefully used as an immunomodulator for transplantation rejection.

Abstract: A fuel cell vehicle and a method for controlling power generation for the same are provided. The fuel cell includes a motor supplying driving power for driving the fuel cell vehicle, a fuel cell and a battery supplying electrical power for driving the motor, and a vehicle controller for operating the fuel cell in advance by predicting a shortage of discharge power of the battery by monitoring the discharge power of the battery.

Abstract: The method for preventing or treating of cancer includes administering a pharmaceutical composition to a subject in need thereof comprising a compound represented by Chemical Formula 1 below or a pharmaceutically acceptable salt thereof as an active ingredient. wherein the composition inhibits the growth of cancer cells.

Abstract: An electronic package molding device includes a planar heating element configured to mold an electronic package by approaching one surface of an electronic package to melt a molding agent disposed on the one surface of the electronic package and apply pressure to bring the epoxy molding compound into close contact with the electronic package and a gas pressure regulator configured to adjust gas pressure between the electronic package and the planar heating element.

Abstract: A fuel cell vehicle and a method for controlling power generation for the same are provided. The fuel cell includes a motor supplying driving power for driving the fuel cell vehicle, a fuel cell and a battery supplying electrical power for driving the motor, and a vehicle controller for operating the fuel cell in advance by predicting a shortage of discharge power of the battery by monitoring the discharge power of the battery.

Abstract: A battery module includes a module housing with a simplified assembling process and an improved energy density. The battery module includes a battery assembly configured to include a plurality of secondary batteries and has front, rear, upper, lower, left and right sides; and a module housing including a first frame located at the left side of the battery assembly and having a plate shape with opposing ends bent rightward so that bent portions thereof are respectively located at the upper side and the lower side of the battery assembly, and a second frame located at the right side of the battery assembly and having a plate shape with opposing ends bent leftward so that bent portions thereof are respectively located at the upper side and the lower side of the battery assembly and are coupled with the bent portions of the first frame, respectively.

Abstract: A method for fabricating a semiconductor device using an overlay measurement and a semiconductor device fabricated by the method are provided. The method includes forming a lower pattern including a lower overlay key pattern having a first pitch, on a substrate, forming an upper pattern including an upper overlay key pattern having a second pitch different from the first pitch, on the lower pattern, measuring an overlay between the lower overlay key pattern and the upper overlay key pattern, removing the upper overlay key pattern, and after removing the upper overlay key pattern, performing an etching process using the upper pattern as an etching mask.

Abstract: Provided is a dart game apparatus including: a body part in which a dart target is installed on a front surface; a support unit including a coupling unit coupled to an upper side of the body part and an extension unit formed to extend toward a front surface of the coupling unit; and a lid unit rotatably coupled to the support unit through at least one hinge.

Abstract: A battery module includes a module housing with a simplified assembling process and an improved energy density. The battery module includes a battery assembly configured to include a plurality of secondary batteries and has front, rear, upper, lower, left and right sides; and a module housing including a first frame located at the left side of the battery assembly and having a plate shape with opposing ends bent rightward so that bent portions thereof are respectively located at the upper side and the lower side of the battery assembly, and a second frame located at the right side of the battery assembly and having a plate shape with opposing ends bent leftward so that bent portions thereof are respectively located at the upper side and the lower side of the battery assembly and are coupled with the bent portions of the first frame, respectively.

Abstract: Disclosed are semiconductor devices, electronic systems including the same, and methods of fabricating the same. The semiconductor device comprises a first gate stack structure including a first dielectric pattern and a first conductive pattern that are alternately stacked with each other, a memory channel structure including a first memory portion that penetrates the first gate stack structure, a through contact including a first through portion at a level the same as a level of the first memory portion, and a connection contact including a first connection portion at a level the same as the level of the first memory portion and the level of the first through portion. A minimum width of the first memory portion is less than a minimum width of the first through portion and a minimum width of the first connection portion.

Abstract: An air supply control method of a fuel cell controls an amount of air supplied to the fuel cell according to an output of power required to be generated by the fuel cell. The method includes steps of: monitoring a charging level of a power storage device that stores power output from the fuel cell; modifying the amount of air supplied to the fuel cell on the basis of the monitored charging level of the power storage device; and controlling an air supply system that supplies air to the fuel cell on the basis of the modified amount of air supplied.

Abstract: A method includes forming a first photomask including N mask chip regions and a first mask scribe lane region surrounding each of the N mask chip regions, forming a second photomask including M mask chip regions and a second mask scribe lane region surrounding each of the M mask chip regions, performing a first semiconductor process including a first photolithography process using the first photomask on a semiconductor wafer; and performing a second semiconductor process including a second photolithography process using the second photomask on the semiconductor wafer. The first photolithography process is an extreme ultraviolet (EUV) photolithography process, the first photomask is an EUV photomask, N is a natural number of 2 or more, and M is two times N.