Abstract: A wafer processing method of the present invention includes mounting a wafer part on a chuck table, loading the wafer part on the chuck table, spraying, by a spray arm module, a first processing solution onto the wafer part to process the wafer part, spraying, by the spray arm module, a second processing solution onto the wafer part to process the wafer part, drying the wafer part on the chuck table, and unloading the wafer part from the chuck table.

Abstract: A vibration damper includes a first damping member coupled to a compressor, a second damping member coupled to the first damping member, and a dispersion member between the first and second damping members to disperse torsional vibration forces from the compressor. The dispersion member may also serve to disperse axial and torsional vibration forces received from the compressor through the first damping member.

Abstract: A door opening and closing device for a refrigerator includes plural doors for opening and closing a refrigerator main body; a hinge unit for connecting the corresponding door to the refrigerant main body so that the door can perform rotational motion or translational motion against the refrigerant main body; first interference units provided between the corresponding door and the refrigerant main body, and contacting from a state in which the door is closed to a state in which the door is opened to a designated angle for separating the doors; and second interference units provided between the corresponding door and the refrigerant main body, and contacting from the state in which the door is opened above the designated angle for separating the doors. The door opening and closing device reduces noise and impact generated by the opening and closing of the doors, allowing a user to open and close the doors more softly and smoothly.

Abstract: An air conditioner includes a heat-exchanger positioned in an outdoor unit and configured to conduct heat-exchange between air provided from outside of the outdoor unit and a refrigerant. The air conditioner also includes a fan configured to generate a flow of the air that is from the heat-exchanger to an outlet of the outdoor unit. The air conditioner further includes a driving unit configured to provide a driving force to the fan. In addition, the air conditioner includes a first member positioned in the flow of the air generated by the fan and a second member configured to guide a flow of the air to reduce collision between the air and the first member when the fan is operated.

Abstract: A compressor and device for reducing vibration therefor is provided herein. The compressor includes a compression device having a compression chamber, and configured to receive, compress, and output a refrigerant, a drive motor configured to rotate the compression device to compress a refrigerant within the compression chamber, and a torsional vibration absorbing device attached to the motor and configured to absorb torsional vibration.

Abstract: An air conditioner includes a heat-exchanger positioned in an outdoor unit and configured to conduct heat-exchange between air provided from outside of the outdoor unit and a refrigerant. The air conditioner also includes a fan configured to generate a flow of the air that is from the heat-exchanger to an outlet of the outdoor unit. The air conditioner further includes a driving unit configured to provide a driving force to the fan. In addition, the air conditioner includes a first member positioned in the flow of the air generated by the fan and a second member configured to guide a flow of the air to reduce collision between the air and the first member when the fan is operated.

Abstract: A scroll compressor includes a fixed scroll, an orbiting scroll orbiting the fixed scroll to perform compression on a refrigerant, a discharge cover provided at an upper end of the fixed scroll and guiding discharge of a compressed refrigerant, a first discharge chamber from which the compressed refrigerant is discharged; a second discharge chamber communicating with the first discharge chamber and separating oil from the discharged refrigerant, and a third discharge chamber communicating with the second discharge chamber and guiding discharge of the separated refrigerant.

Abstract: Provided is an outdoor unit of an air conditioner. In the outdoor unit, when an anti-vibration member is placed on the top surface of a base pan forming the bottom surface of the outdoor unit, the anti-vibration member is guided by a guide member disposed on the top surface of the base pan. In a state where a portion of the anti-vibration member is inserted through a base plate of a compressor, the base pan, the anti-vibration member, and the compressor are fixed using a coupling member. Therefore, the compressor can be fixed more easily and simply.

Abstract: Disclosed herein is a muffler of a scroll compressor. The muffler includes a first muffler having a pair of chambers defined above an outlet of a fixed scroll to communicate with the outlet and a gas passage hole formed at the center of an upper end thereof, and a second muffler located around the first muffler to be spaced apart from the gas passage hole of the first muffler and having a chamber including one or more guidance paths of the fixed scroll. The muffler can achieve reduction of operational noise, sufficient separation of oil contained in discharge gas, and efficient isolation between a discharge pressure inside the muffler and outside suction pressure.

Abstract: An oil pump of a scroll compressor is provided. The oil pump includes a pump body to which a drive shaft is inserted; a gear unit inserted to a lower side of the pump body and rotating by the rotation of the drive shaft; and a pump cover coupled to a lower side of the pump body and including an inlet through which oil is introduced, an outlet through which the introduced oil is discharged to the drive shalt, and one or more noise reducing portions reducing noise generated during a pumping process.

Abstract: An oil pump for a compressor is provided. The oil pump includes a pump body coupled to a driving shaft, and a pumping member coupled to the pump body so as to define a pumping part and a pump cover is coupled to a lower side of the pump body therebetween. A lower suction unit provided at a lower side of the pump body draws fluid into the pump from a lower portion of a supply area, and an upper suction unit draws fluid into the pump from an upper portion of the oil supply area.

Abstract: A compressor and device for reducing vibration therefor is provided herein. The compressor includes a compression device having a compression chamber, and configured to receive, compress, and output a refrigerant, a drive motor configured to rotate the compression device to compress a refrigerant within the compression chamber, and a torsional vibration absorbing device attached to the motor and configured to absorb torsional vibration.

Abstract: A hermetic compressor uses an oil pump that includes a trochoid gear. Therefore, regardless of the rotation speed of a driving motor of the compressor, a sufficient amount of oil can always be pumped. The oil pump unit may include a plurality of suction holes with openings at different heights. If the refrigerant and oil separate, at least one of the openings will admit oil into the oil pump unit, to ensure lubricating oil is supplied to the moving parts of the compressor.

Abstract: Disclosed herein is a muffler of a scroll compressor. The muffler includes a first muffler having a pair of chambers defined above an outlet of a fixed scroll to communicate with the outlet and a gas passage hole formed at the center of an upper end thereof, and a second muffler located around the first muffler to be spaced apart from the gas passage hole of the first muffler and having a chamber including one or more guidance paths of the fixed scroll. The muffler can achieve reduction of operational noise, sufficient separation of oil contained in discharge gas, and efficient isolation between a discharge pressure inside the muffler and outside suction pressure.

Abstract: A scroll compressor includes a fixed scroll, an orbiting scroll orbiting the fixed scroll to perform compression on a refrigerant, a discharge cover provided at an upper end of the fixed scroll and guiding discharge of a compressed refrigerant, a first discharge chamber from which the compressed refrigerant is discharged; a second discharge chamber communicating with the first discharge chamber and separating oil from the discharged refrigerant, and a third discharge chamber communicating with the second discharge chamber and guiding discharge of the separated refrigerant.

Abstract: An oil pump of a scroll compressor is provided. The oil pump includes a pump body to which a drive shaft is inserted; a gear unit inserted to a lower side of the pump body and rotating by the rotation of the drive shaft; and a pump cover coupled to a lower side of the pump body and including an inlet through which oil is introduced, an outlet through which the introduced oil is discharged to the drive shalt, and one or more noise reducing portions reducing noise generated during a pumping process.

Abstract: A hermetic compressor uses an oil pump that includes a trochoid gear. Therefore, regardless of the rotation speed of a driving motor of the compressor, a sufficient amount of oil can always be pumped. The oil pump unit may include a plurality of suction holes with openings at different heights. If the refrigerant and oil separate, at least one of the openings will admit oil into the oil pump unit, to ensure lubricating oil is supplied to the moving parts of the compressor.