Abstract: A substrate processing apparatus includes: a disk including a plurality of electrostatic chucks periodically disposed at a constant radius from a central axis; a disk support supporting the disk; a DC line electrically connected to the plurality of electrostatic chucks through the disk support; and a power supply configured to supply power to the DC line. The DC line includes: a first DC line penetrating through the disk support from the power supply; a power distribution unit configured to distribute the first DC line to connect the first DC line to each of the plurality of electrostatic chucks; and a plurality of second DC lines respectively connected to the plurality of electrostatic chucks in the power distribution unit.

Abstract: A substrate processing apparatus includes: a disk including a plurality of electrostatic chucks periodically disposed at a constant radius from a central axis; a disk support supporting the disk; a DC line electrically connected to the plurality of electrostatic chucks through the disk support; and a power supply configured to supply power to the DC line. The DC line includes: a first DC line penetrating through the disk support from the power supply; a power distribution unit configured to distribute the first DC line to connect the first DC line to each of the plurality of electrostatic chucks; and a plurality of second DC lines respectively connected to the plurality of electrostatic chucks in the power distribution unit.

Abstract: A substrate processing apparatus includes: a disk including a plurality of electrostatic chucks periodically disposed at a constant radius from a central axis; a disk support supporting the disk; a DC line electrically connected to the plurality of electrostatic chucks through the disk support; and a power supply configured to supply power to the DC line. The DC line includes: a first DC line penetrating through the disk support from the power supply; a power distribution unit configured to distribute the first DC line to connect the first DC line to each of the plurality of electrostatic chucks; and a plurality of second DC lines respectively connected to the plurality of electrostatic chucks in the power distribution unit.

Abstract: A time of flight (TOF) camera device and a method of operating the same is provided. The time of flight (TOF) camera device includes a pulse generator configured to generate a pulse signal, a light module configured to emit output light to at least one object in response to the pulse signal, a three-dimensional (3D) sensor configured to receive reflected light when the output light is reflected by the at least one object for a first frame, a distance calculator configured to receive an output of the 3D sensor and generate a distance data signal, and a light density control device configured to receive the distance data signal from the distance calculator and output a light density control signal. The light density control signal may adjust the size of an opening in the light module to change a projected area from the output light onto the at least one object.

Abstract: A substrate processing apparatus may include a first disk provided in a chamber and configured to perform a turning motion and to include a plurality of seating holes periodically arranged within a specific radius from a center axis, a plurality of second disks provided in the seating holes, respectively, and configured to perform a revolving and rotating motion in accordance with the turning motion of the first disk, a first rotary connector structure provided between the second disk and the seating hole to allow for a rotating motion of and for an electric connection to the second disk, an electrostatic chuck provided on the second disk and configured to hold a substrate using an electric power supplied through the first rotary connector structure, and a first magnetic gear fixed to the second disk and configured to exert a torque on the second disk, and a second magnetic gear.

Abstract: An ECG sensor chip used in a wearable appliance includes; a switch controlled —by a switching signal, an amplifier that amplifies a difference between first and second ECG signals, and a location indicator that generates the switching signal. The switch passes either a first ECG signal or second ECG signal in response to the switching signal.

Abstract: A substrate processing apparatus may include a first disk provided in a chamber and configured to perform a turning motion and to include a plurality of seating holes periodically arranged within a specific radius from a center axis, a plurality of second disks provided in the seating holes, respectively, and configured to perform a revolving and rotating motion in accordance with the turning motion of the first disk, a first rotary connector structure provided between the second disk and the seating hole to allow for a rotating motion of and for an electric connection to the second disk, an electrostatic chuck provided on the second disk and configured to hold a substrate using an electric power supplied through the first rotary connector structure, and a first magnetic gear fixed to the second disk and configured to exert a torque on the second disk, and a second magnetic gear provided in the chamber to be interact with the first magnetic gear but prevented from turning.

Abstract: A wearable device includes a case, a bio-processor embedded in the case, and a plurality of electrodes connected to the bio-processor. The bio-processor is configured to selectively and respectively operate the electrodes as sensing electrodes and sourcing electrodes in response to a selection signal. The selected one/ones of the electrodes operated as sensing electrodes which pick up a biological signal from (e.g. biological activity or a biological condition of) the wearer. The selected one/ones of the electrodes operated as sourcing electrodes supply current to the wearer regulated to cause the desired biological signal to be picked up by the sensing electrode(s).

Abstract: A substrate processing apparatus includes: a disk including a plurality of electrostatic chucks periodically disposed at a constant radius from a central axis; a disk support supporting the disk; a DC line electrically connected to the plurality of electrostatic chucks through the disk support; and a power supply configured to supply power to the DC line. The DC line includes: a first DC line penetrating through the disk support from the power supply; a power distribution unit configured to distribute the first DC line to connect the first DC line to each of the plurality of electrostatic chucks; and a plurality of second DC lines respectively connected to the plurality of electrostatic chucks in the power distribution unit.

Abstract: The present inventive concept relates to a substrate processing apparatus and a gas distribution apparatus for substrate processing apparatuses including: a plasma generator generating plasma for performing a processing process on a substrate supported by a substrate supporting unit; a ground body coupled to the plasma generator; and a plasma shield shielding the plasma generated by the plasma generator, wherein the plasma generator includes a first electrode for generating the plasma and a second electrode coupled to the ground body at a position spaced apart from the first electrode so that a gas distribution space for distributing a process gas is provided between the first electrode and the second electrode, and the plasma shield shields the plasma, generated by the plasma generator, in at least one of a top of the substrate and a bottom of the substrate.

Abstract: Provided is a broadcasting receiving apparatus and a control method thereof capable of receiving recommendation information, the control method of a broadcasting receiving apparatus receiving recommendation information about a broadcasting program; comparing a time of confirming the recommendation information and a broadcasting time of a recommended program included in the recommendation information; and supplying a function of the broadcasting receiving apparatus for using the recommendation information to correspond to a comparison result. Accordingly, a broadcasting receiving apparatus and a control method thereof capable of supplying a broadcasting service having an improved user convenience is provided.

Abstract: Disclosed is a substrate processing method including gas injection including a source material containing silicon towards substrates received in a reaction chamber, depositing the source material on the substrates by generating plasma including oxygen radicals so as to form deposition films, and executing surface treatment of the deposition films by injecting plasma gas including oxygen radicals.

Abstract: Provided is a broadcasting receiving apparatus and a control method thereof capable of receiving recommendation information, the control method of a broadcasting receiving apparatus receiving recommendation information about a broadcasting program; comparing a time of confirming the recommendation information and a broadcasting time of a recommended program included in the recommendation information; and supplying a function of the broadcasting receiving apparatus for using the recommendation information to correspond to a comparison result. Accordingly, a broadcasting receiving apparatus and a control method thereof capable of supplying a broadcasting service having an improved user convenience is provided.

Abstract: An ECG sensor chip used in a wearable appliance includes; a switch controlled by a switching signal, an amplifier that amplifies a difference between first and second ECG signals, and a location indicator that generates the switching signal. The switch passes either a first ECG signal or second ECG signal in response to the switching signal.

Abstract: Provided is a broadcasting receiving apparatus and a control method thereof capable of receiving recommendation information, the control method of a broadcasting receiving apparatus receiving recommendation information about a broadcasting program; comparing a time of confirming the recommendation information and a broadcasting time of a recommended program included in the recommendation information; and supplying a function of the broadcasting receiving apparatus for using the recommendation information to correspond to a comparison result. Accordingly, a broadcasting receiving apparatus and a control method thereof capable of supplying a broadcasting service having an improved user convenience is provided.

Abstract: An ECG sensor chip used in a wearable appliance includes; a switch controlled by a switching signal, an amplifier that amplifies a difference between first and second ECG signals, and a location indicator that generates the switching signal. The switch passes either a first ECG signal or second ECG signal in response to the switching signal.

Abstract: The present invention relates to a wearable device having a low frequency generation function and a health care system using the same, and more particularly, to a wearable device having a low frequency generation function and a health care system using the same capable of effectively preventing nausea and vomiting due to motion sickness, morning sickness, drugs, or the like by transmitting a low frequency to the median nerve of the wrist.

Abstract: Disclosed is a substrate processing method including gas injection including a source material containing silicon towards substrates received in a reaction chamber, depositing the source material on the substrates by generating plasma including oxygen radicals so as to form deposition films, and executing surface treatment of the deposition films by injecting plasma gas including oxygen radicals.

Abstract: Provided is a broadcasting receiving apparatus and a control method thereof capable of receiving recommendation information, the control method of a broadcasting receiving apparatus receiving recommendation information about a broadcasting program; comparing a time of confirming the recommendation information and a broadcasting time of a recommended program included in the recommendation information; and supplying a function of the broadcasting receiving apparatus for using the recommendation information to correspond to a comparison result. Accordingly, a broadcasting receiving apparatus and a control method thereof capable of supplying a broadcasting service having an improved user convenience is provided.