Patents by Inventor Seung Eun NA

Seung Eun NA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate treating apparatus
    Patent number: 11765793
    Abstract: An apparatus for treating a substrate includes a process chamber having a treatment space defined therein, a support unit for supporting the substrate in the treatment space, a liquid supply unit for supplying treating liquid to the substrate supported on the support unit, and a heating unit disposed in the support unit for heating the substrate supported on the support unit, wherein the heating unit includes a plurality of lamps to heat the substrate, and a window disposed above the lamps to transmit light emitted from the lamps, wherein the window includes a base in a form of a plate, and light adjustment means formed on the base to spread or converge light emitted from the lamps.
    Type: Grant
    Filed: July 17, 2020
    Date of Patent: September 19, 2023
    Assignee: SEMES CO., LTD.
    Inventors: Muhyeon Lee, Gui Su Park, Byungsun Bang, Jungbong Choi, Youngil Lee, Kangseop Yun, Seung Eun Na, Ye Jin Choi, Kyounghwan Kim
  • APPARATUS FOR TREATING SUBSTRATE
    Publication number: 20220297167
    Abstract: The inventive concept provides a substrate treating apparatus.
    Type: Application
    Filed: March 10, 2022
    Publication date: September 22, 2022
    Applicant: SEMES CO., LTD.
    Inventors: SHI HYUN PARK, IN HWANG PARK, SEUNG EUN NA, EUN WOO JANG, KYUNG MIN KIM, JE MYUNG CHA
  • SUBSTRATE TREATING APPARATUS
    Publication number: 20210022213
    Abstract: An apparatus for treating a substrate includes a process chamber having a treatment space defined therein, a support unit for supporting the substrate in the treatment space, a liquid supply unit for supplying treating liquid to the substrate supported on the support unit, and a heating unit disposed in the support unit for heating the substrate supported on the support unit, wherein the heating unit includes a plurality of lamps to heat the substrate, and a window disposed above the lamps to transmit light emitted from the lamps, wherein the window includes a base in a form of a plate, and light adjustment means formed on the base to spread or converge light emitted from the lamps.
    Type: Application
    Filed: July 17, 2020
    Publication date: January 21, 2021
    Inventors: Muhyeon LEE, Gui Su PARK, Byungsun BANG, Jungbong CHOI, Youngil LEE, Kangseop YUN, Seung Eun NA, Ye Jin CHOI, Kyounghwan KIM