Patents by Inventor Seyed ALAM

Seyed ALAM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • THERMALLY STABLE FLOW METERS FOR PRECISION FLUID DELIVERY
    Publication number: 20210003340
    Abstract: The present disclosure relates to a fluid delivery apparatus for deposition chambers. The fluid delivery device includes a fluid flow meter. The fluid flow meter is enclosed in an insulated box. An intake is provided on the insulated box for providing a forced cooling gas flow over the fluid flow meter. An exhaust is provided on the insulated box from which the forced cooling gas exits the insulated box.
    Type: Application
    Filed: March 14, 2019
    Publication date: January 7, 2021
    Inventors: Shailendra SRIVASTAVA, Seyed ALAM, Nikhil Sudhindrarao JORAPUR, Daemian Raj BENJAMIN RAJ, Juan Carlos ROCHA-ALVAREZ