Abstract: Several types of piezoelectric MEMS vibration energy harvesters are described herein as well as methods of fabricating the vibration energy harvesters. The vibration energy harvesters generally comprise a serpentine structure having a central longitudinal axis; a piezoelectric film deposited on a surface of the serpentine structure; a central mass located at a mid-portion of the central longitudinal axis; two lateral masses positioned at opposing corners of the serpentine structure; anchor points at two other opposing corners of the serpentine structure; and upper and lower electrode layers. The energy harvesters have a 180 degree rotational symmetry about the central mass and when the serpentine structure experiences a strain, the piezoelectric film generates a voltage. The geometry of the energy harvesters allows for lower frequency and wider bandwidth operation as well as higher power density.

Abstract: Microelectromechanical systems (MEMS) have found widespread applications across biotechnology, medicine, communications, and consumer electronics. These are typically one-dimensional MEMS (e.g. rotation, linear translation on a single axis) or two-dimensional MEMS (e.g. linear translation in two directions in the plane of the MEMS). It would be beneficial therefore for designers of components, circuits, and systems to exploit MEMS elements that produce both out-of-plane and in-plane motion thereby allowing for novel two-dimensional and three-dimensional MEMS micropositioners.

Abstract: A sensing microsystem that can be used to sense various physiological parameters of a subject is disclosed. The sensing microsystem comprises one or more sensors for collecting data that can be used to accurately determine various vital sign and/or other physiological parameters of the subject, and further comprises a communication module that allows the microsystem to communicate remotely with an external device via one or more communications protocols. The one or more sensors and the communication module are disposed on respective electronics-compatible substrates that are electrically coupled with a power source. An isolated communication channel that communicatively couples the one or more sensors and the communication interface is at least partially defined by and extends through the power source.

Abstract: One general aspect includes an intraoral sleep monitoring device, for determining a status of a user's breathing, including at least one measurement device, on one or more electronics-compatible substrate, adapted to produce data related to a status of a user's breathing and a data storage system recording the data from the at least one measurement device.

Abstract: Several types of piezoelectric MEMS vibration energy harvesters are described herein as well as methods of fabricating the vibration energy harvesters. The vibration energy harvesters generally comprise a serpentine structure having a central longitudinal axis; a piezoelectric film deposited on a surface of the serpentine structure; a central mass located at a mid-portion of the central longitudinal axis; two lateral masses positioned at opposing corners of the serpentine structure; anchor points at two other opposing corners of the serpentine structure; and upper and lower electrode layers. The energy harvesters have a 180 degree rotational symmetry about the central mass and when the serpentine structure experiences a strain, the piezoelectric film generates a voltage. The geometry of the energy harvesters allows for lower frequency and wider bandwidth operation as well as higher power density.