Patents by Inventor Sh-Pei Yang

Sh-Pei Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of edge bevel rinse
    Patent number: 7413963
    Abstract: A method of edge bevel rinse. First, a wafer having a coating material layer disposed thereon is provided. A light beam is optically projected on the wafer to form a reference pattern. The reference pattern defines a central region, and a bevel region surrounding the central region on the surface of the wafer. Subsequently, the coating material layer positioned in the bevel region is removed according to the reference pattern.
    Type: Grant
    Filed: April 12, 2006
    Date of Patent: August 19, 2008
    Assignee: Touch Micro-System Technology Inc.
    Inventors: Shih-Min Huang, Sh-Pei Yang
  • METHOD OF EDGE BEVEL RINSE
    Publication number: 20070190698
    Abstract: A method of edge bevel rinse. First, a wafer having a coating material layer disposed thereon is provided. A light beam is optically projected on the wafer to form a reference pattern. The reference pattern defines a central region, and a bevel region surrounding the central region on the surface of the wafer. Subsequently, the coating material layer positioned in the bevel region is removed according to the reference pattern.
    Type: Application
    Filed: April 12, 2006
    Publication date: August 16, 2007
    Inventors: Shih-Min Huang, Sh-Pei Yang