Patents by Inventor Shahab Arabshahi

Shahab Arabshahi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Real-time anomaly detection and classification during semiconductor processing
    Patent number: 11556117
    Abstract: A method of detecting and classifying anomalies during semiconductor processing includes executing a wafer recipe a semiconductor processing system to process a semiconductor wafer; monitoring sensor outputs from a sensors that monitor conditions associated with the semiconductor processing system; providing the sensor outputs to models trained to identify when the conditions associated with the semiconductor processing system indicate a fault in the semiconductor wafer; receiving an indication of a fault from at least one of the models; and generating a fault output in response to receiving the indication of the fault.
    Type: Grant
    Filed: October 21, 2019
    Date of Patent: January 17, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Shahab Arabshahi, Michael Nichols
  • REAL-TIME ANOMALY DETECTION AND CLASSIFICATION DURING SEMICONDUCTOR PROCESSING
    Publication number: 20210116896
    Abstract: A method of detecting and classifying anomalies during semiconductor processing includes executing a wafer recipe a semiconductor processing system to process a semiconductor wafer; monitoring sensor outputs from a sensors that monitor conditions associated with the semiconductor processing system; providing the sensor outputs to models trained to identify when the conditions associated with the semiconductor processing system indicate a fault in the semiconductor wafer; receiving an indication of a fault from at least one of the models; and generating a fault output in response to receiving the indication of the fault.
    Type: Application
    Filed: October 21, 2019
    Publication date: April 22, 2021
    Applicant: Applied Materials, Inc.
    Inventors: Shahab Arabshahi, Michael Nichols