Abstract: A heating module for a substrate processing chamber includes heating lamps coupled to a reflector plate and a heat exchanger. The heat exchanger cools a gas within the heating module. A fan within the heating module circulates the gas through apertures in the reflector plate to cool the heating bulbs. The gas is cooled by the heat exchanger, and is recirculated. One or more shrouds directs the gas as the gas is being circulated.

Abstract: Apparatus for heating a substrate within a substrate processing chamber are described herein. More specifically, possible lamp modules for use within a substrate processing chamber are described. The lamp modules include a reflector body. The reflector body is a reflective material. The reflector body includes grooves disposed in a surface and configured to direct radiant energy towards a substrate. Each ring includes multiple grooves with different cross sections to allow radiant energy to be directed at different radial positions on the substrate from the same ring. The grooves may be either curved or linear grooves.

Abstract: A process chamber includes a chamber body having a ceiling disposed above a floor with a chassis and an injector ring disposed therebetween. Upper and lower clamp rings secure the upper and floors, respectively, in place. An upper heating module is coupled to the upper clamp ring above the ceiling. A lower heating module is coupled to the lower clamp ring below the floor.

Abstract: A floor stand system for mounting an electrical box above a floor includes an electrical box mount having a mechanical interface thereon. A set of substantially interchangeable floor supports have mating mechanical interfaces at their upper ends for connecting to the mechanical interface on the electrical box mount. The set of floor supports includes a plurality of floor supports having different fixed lengths. The floor supports are substantially interchangeable so that one of the floor supports having a fixed length suitable for supporting the electrical box mount at a desired elevation above the floor can be selected and connected to the electrical box mount using the mechanical interfaces to create a floor stand suitable for supporting the electrical box mount at the desired elevation above the floor.

Abstract: A floor stand system for mounting an electrical box above a floor includes an electrical box mount having a mechanical interface thereon. A set of substantially interchangeable floor supports have mating mechanical interfaces at their upper ends for connecting to the mechanical interface on the electrical box mount. The set of floor supports includes a plurality of floor supports having different fixed lengths. The floor supports are substantially interchangeable so that one of the floor supports having a fixed length suitable for supporting the electrical box mount at a desired elevation above the floor can be selected and connected to the electrical box mount using the mechanical interfaces to create a floor stand suitable for supporting the electrical box mount at the desired elevation above the floor.