Abstract: A strained bilayer film with reinforcing members is used to open and close gas flow outlets in a microvalve array. The bottom layer of the bilayer film is compressive and the top layer is tensile. Reinforcing members are made from compressive material that accomplishes the dual objectives of reducing potential defects at the interface between the anchor region and the free region of the actuator, and controlling the stresses along the edges of the strained bilayer to avoid curling as the actuator unrolls from its normal coiled configuration in response to an applied voltage. Because of the configuration, the strained bilayer film occupies a minimal amount of space compared to other systems when the valve is opened, and it permits a higher density of microvalves to be utilized. Optional supports are provided over gas flow channel openings to increase the area over which the voltage is applied, increasing electrostatic stability of the actuators in maintaining their unrolled state for a variety of uses.

Abstract: A strained bilayer film with reinforcing members is used to open and close gas flow outlets in a microvalve array. The bottom layer of the bilayer film is compressive and the top layer is tensile. Reinforcing members are made from compressive material that accomplishes the dual objectives of reducing potential defects at the interface between the anchor region and the free region of the actuator, and controlling the stresses along the edges of the strained bilayer to avoid curling as the actuator unrolls from its normal coiled configuration in response to an applied voltage. Because of the configuration, the strained bilayer film occupies a minimal amount of space compared to other systems when the valve is opened, and it permits a higher density of microvalves to be utilized. Optional supports are provided over gas flow channel openings to increase the area over which the voltage is applied, increasing electrostatic stability of the actuators in maintaining their unrolled state for a variety of uses.

Abstract: A strained bilayer film with reinforcing members is used to open and close gas flow outlets in a microvalve array. The bottom layer of the bilayer film is compressive and the top layer is tensile. Reinforcing members are made from compressive material that accomplishes the dual objectives of reducing potential defects at the interface between the anchor region and the free region of the actuator, and controlling the stresses along the edges of the strained bilayer to avoid curling as the actuator unrolls from its normal coiled configuration in response to an applied voltage. Because of the configuration, the strained bilayer film occupies a minimal amount of space compared to other systems when the valve is opened, and it permits a higher density of microvalves to be utilized. Optional supports are provided over gas flow channel openings to increase the area over which the voltage is applied, increasing electrostatic stability of the actuators in maintaining their unrolled state for a variety of uses.

Abstract: A strained bilayer film with reinforcing members is used to open and close gas flow outlets in a microvalve array. The bottom layer of the bilayer film is compressive and the top layer is tensile. Reinforcing members are made from compressive material that accomplishes the dual objectives of reducing potential defects at the interface between the anchor region and the free region of the actuator, and controlling the stresses along the edges of the strained bilayer to avoid curling as the actuator unrolls from its normal coiled configuration in response to an applied voltage. Because of the configuration, the strained bilayer film occupies a minimal amount of space compared to other systems when the valve is opened, and it permits a higher density of microvalves to be utilized. Optional supports are provided over gas flow channel openings to increase the area over which the voltage is applied, increasing electrostatic stability of the actuators in maintaining their unrolled state for a variety of uses.

Abstract: The present invention relates to thermally driven pumps. More specifically, one embodiment of the present invention relates to the use of a thermoelectric material to create a thermally driven, bi-directional pump, such as a micro pump, with no moving parts using the thermal transpiration effect (a Knudsen pump). One embodiment of the thermally driven pump of the present invention utilizes a thermoelectric material to assist with the thermal transpiration process resulting in a substantially symmetrical, bidirectional pump. A thermoelectric module is used to induce a temperature gradient across a nanoporous article having at least one nanochannel thus creating fluid flow via thermal transpiration across the nanochannel.

Abstract: Infusion pumps that do not require electricity for operation are disclosed for various applications, including but not limited to pharmaceutical delivery of medications. A substance, which can be liquid, is stored in a reservoir and driven pneumatically by pressure generated by thermal transpiration, which requires a temperature difference existing between two ends of a narrow channel. In the case of pharmaceutical delivery, the medication is delivered to the treatment site via an applicator. Power sources other than electricity include, but are not limited to, the temperature of a person's body heat exceeding the ambient temperature of surrounding air.

Abstract: The present invention relates to thermally driven pumps. More specifically, one embodiment of the present invention relates to the use of a thermoelectric material to create a thermally driven, bi-directional pump, such as a micro pump, with no moving parts using the thermal transpiration effect (a Knudsen pump). One embodiment of the thermally driven pump of the present invention utilizes a thermoelectric material to assist with the thermal transpiration process resulting in a substantially symmetrical, bidirectional pump. A thermoelectric module is used to induce a temperature gradient across a nanoporous article having at least one nanochannel thus creating fluid flow via thermal transpiration across the nanochannel.

Abstract: Systems and methods are described for identifying characteristics and defects in material such as semiconductors. Methods include scanning a thermal probe in the vicinity of a semiconductor sample, applying stimuli to the thermal probe, and monitoring the interaction of the thermal probe and the semiconductor. The stimulus can be applied by a variety of methods, including Joule heating of a resistor in the proximity of the probe tip, or optically heating a tip of the thermal probe using a laser. Applications of the invention include identification of voids in metallic layers in semiconductors; mapping dopant concentration in semiconductors; measuring thickness of a sample material; mapping thermal hot spots and other characteristics of a sample material.

Abstract: Systems and methods are described for identifying characteristics and defects in material such as semiconductors. Methods include scanning a thermal probe in the vicinity of a semiconductor sample, applying stimuli to the thermal probe, and monitoring the interaction of the thermal probe and the semiconductor. The stimulus can be applied by a variety of methods, including Joule heating of a resistor in the proximity of the probe tip, or optically heating a tip of the thermal probe using a laser. Applications of the invention include identification of voids in metallic layers in semiconductors; mapping dopant concentration in semiconductors; measuring thickness of a sample material; mapping thermal hot spots and other characteristics of a sample material.