Patents by Inventor Shan-Yu Huang
Shan-Yu Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11855010Abstract: A semiconductor structure is provided. The semiconductor structure includes two circuit regions, two inner seal rings, an outer seal ring, a first redundant region, and an electrical circuit. Each of the inner seal rings surrounding one of the circuit regions. The outer seal ring is disposed around the inner seal rings, and each of the inner seal rings contacts the outer seal ring at different interior corners of the outer seal ring. The first redundant region is located between at least one of the inner seal rings and the outer seal ring. The electrical circuit is formed in the first redundant region and electrically connected to at least one of the circuit regions.Type: GrantFiled: August 6, 2021Date of Patent: December 26, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shan-Yu Huang, Shih-Chang Chen, Hsiao-Wen Chung, Yilun Chen, Huang-Sheng Lin
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Publication number: 20230402335Abstract: A first die includes a plurality of first transistors. A first seal ring surrounds the first die in a top view. A second die that a plurality of second transistors. A second seal ring surrounds the second die in the top view. A plurality of conductive elements extends into both the first die and the second die in the top view. The conductive elements electrically interconnect the first die with the second die. A third seal ring surrounds, in the top view, the first die, the second die, and the conductive elements.Type: ApplicationFiled: June 13, 2022Publication date: December 14, 2023Inventors: Shan-Yu Huang, Yilun Chen, Huang-Sheng Lin
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Publication number: 20230402406Abstract: An array of dies is formed over a substrate. Each of the dies contains a plurality of functional transistors. A plurality of first seal rings each surround a respective one of the dies in a top view. The first seal rings define a plurality of corner regions that are disposed outside of the first seal rings and between corners of respective subsets of the dies. A plurality of structures is disposed within the corner regions. The structures include test structures, dummy structures, process monitor patterns, alignment marks, or overlay marks. Electrical interconnection elements are disposed between each pair of adjacent dies in the array of dies in the top view. The electrical interconnection elements electrically interconnect the dies in the array with one another. A second seal ring surrounds the array of dies, the first seal rings, and the structures in the top view.Type: ApplicationFiled: June 14, 2022Publication date: December 14, 2023Inventors: Shan-Yu Huang, Shih-Chang Chen, Yilun Chen, Huang-Sheng Lin
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Publication number: 20230369148Abstract: A semiconductor structure includes first and second inner seal rings each having a first section and a second section substantially perpendicular to the first section. The semiconductor structure further includes an outer seal ring. The outer seal ring has a third section, and a fourth section, and a fifth section. The semiconductor structure further includes dummy patterns substantially uniformly distributed in each of regions between the first inner seal ring and the outer seal ring and between the second inner seal ring and the outer seal ring.Type: ApplicationFiled: July 19, 2023Publication date: November 16, 2023Inventors: Shan-Yu Huang, Hsiao-Wen Chung, Yi-Lun Chen, Huang-Sheng Lin
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Publication number: 20230360917Abstract: A method for fabricating a semiconductor device is provided. The method includes generating a redistribution layer (RDL) layout, wherein the RDL layout comprises a plurality of redistribution lines; determining a first dummy region in the RDL layout according to the redistribution lines; disposing a plurality of first dummy redistribution lines in the first dummy region; performing a first modification process to enlarge at least one of the first dummy redistribution lines; determining the enlarged one of the first dummy redistribution lines as a second dummy region in the RDL layout when an area of the enlarged one of the first dummy redistribution lines is greater than a threshold value; disposing a plurality of second dummy redistribution lines in the second dummy region; and patterning a metal layer according to the RDL layout after disposing the second dummy redistribution lines in the second dummy region.Type: ApplicationFiled: May 4, 2022Publication date: November 9, 2023Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Meng-Hsiu HSIEH, Hsiao-Wen CHUNG, Shan-Yu HUANG
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Publication number: 20230317638Abstract: A semiconductor structure includes a first circuit region; a first inner seal ring at least partially surrounding the first circuit region; and an outer seal ring at least partially surrounding the first inner seal ring. The outer seal ring includes a first corner and a substantially triangular corner seal ring (CSR) structure at the first corner. The first inner seal ring includes a second corner adjacent to and spaced away from the CSR structure. The semiconductor structure further includes a first region between a first side of the first corner and a first side of the second corner that is parallel to the first side of the first corner, and multiple functional patterns in the first region.Type: ApplicationFiled: April 1, 2022Publication date: October 5, 2023Inventors: Shan-Yu Huang, Yilun Chen, Huang-Sheng Lin
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Patent number: 11728229Abstract: A semiconductor structure that includes two circuit regions; two inner seal rings, each of the two inner seal rings surrounding one of the two circuit regions; an outer seal ring surrounding the two inner seal rings, wherein each of the inner seal rings and the outer seal ring has a substantially rectangular periphery with four interior corner seal ring structures; four first redundant regions between the two inner seal rings and the outer seal ring, each of the four first redundant regions being a substantially trapezoidal shape; and first dummy patterns substantially uniformly distributed in the four first redundant regions.Type: GrantFiled: June 2, 2021Date of Patent: August 15, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shan-Yu Huang, Hsiao-Wen Chung, Yi-Lun Chen, Huang-Sheng Lin
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Publication number: 20230253356Abstract: A chip structure is provided. The chip structure includes a substrate. The chip structure includes a first conductive line over the substrate. The chip structure includes an insulating layer over the substrate and the first conductive line. The chip structure includes a conductive pillar over and passing through the insulating layer. The conductive pillar is formed in one piece, the conductive pillar is in direct contact with the first conductive line, and a first sidewall of the first conductive line extends across a second sidewall of the conductive pillar in a top view of the first conductive line and the conductive pillar. The chip structure includes a solder bump on the conductive pillar. The solder bump is in direct contact with the conductive pillar.Type: ApplicationFiled: April 18, 2023Publication date: August 10, 2023Inventors: Shan-Yu HUANG, Ming-Da CHENG, Hsiao-Wen CHUNG, Ching-Wen HSIAO, Li-Chun HUNG, Yuan-Yao CHANG, Meng-Hsiu HSIEH
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Patent number: 11688708Abstract: A chip structure is provided. The chip structure includes a substrate. The chip structure includes a first conductive line over the substrate. The chip structure includes an insulating layer over the substrate and the first conductive line. The chip structure includes a conductive pillar over the insulating layer. The conductive pillar is formed in one piece, the conductive pillar has a lower surface and a bottom protruding portion protruding from the lower surface, the bottom protruding portion passes through the insulating layer over the first conductive line, the bottom protruding portion is in direct contact with the first conductive line, and a first linewidth of a first portion of the first conductive line under the conductive pillar is less than a width of the conductive pillar. The chip structure includes a solder bump on the conductive pillar. The solder bump is in direct contact with the conductive pillar.Type: GrantFiled: August 30, 2021Date of Patent: June 27, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shan-Yu Huang, Ming-Da Cheng, Hsiao-Wen Chung, Ching-Wen Hsiao, Li-Chun Hung, Yuan-Yao Chang, Meng-Hsiu Hsieh
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Publication number: 20230068503Abstract: A chip structure is provided. The chip structure includes a substrate. The chip structure includes a first conductive line over the substrate. The chip structure includes an insulating layer over the substrate and the first conductive line. The chip structure includes a conductive pillar over the insulating layer. The conductive pillar is formed in one piece, the conductive pillar has a lower surface and a bottom protruding portion protruding from the lower surface, the bottom protruding portion passes through the insulating layer over the first conductive line, the bottom protruding portion is in direct contact with the first conductive line, and a first linewidth of a first portion of the first conductive line under the conductive pillar is less than a width of the conductive pillar. The chip structure includes a solder bump on the conductive pillar. The solder bump is in direct contact with the conductive pillar.Type: ApplicationFiled: August 30, 2021Publication date: March 2, 2023Inventors: Shan-Yu HUANG, Ming-Da CHENG, Hsiao-Wen CHUNG, Ching-Wen HSIAO, Li-Chun HUNG, Yuan-Yao CHANG, Meng-Hsiu HSIEH
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Publication number: 20230041160Abstract: A semiconductor structure is provided. The semiconductor structure includes two circuit regions, two inner seal rings, an outer seal ring, a first redundant region, and an electrical circuit. Each of the inner seal rings surrounding one of the circuit regions. The outer seal ring is disposed around the inner seal rings, and each of the inner seal rings contacts the outer seal ring at different interior corners of the outer seal ring. The first redundant region is located between at least one of the inner seal rings and the outer seal ring. The electrical circuit is formed in the first redundant region and electrically connected to at least one of the circuit regions.Type: ApplicationFiled: August 6, 2021Publication date: February 9, 2023Inventors: Shan-Yu HUANG, Shih-Chang CHEN, Hsiao-Wen CHUNG, Yilun CHEN, Huang-Sheng LIN
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Publication number: 20230010037Abstract: A semiconductor structure includes two circuit regions and two inner seal rings, each of which surrounds one of the circuit regions. Each inner seal ring has a substantially rectangular periphery with four interior corner stress relief (CSR) structures. The semiconductor structure further includes an outer seal ring surrounding the two inner seal rings. The outer seal ring has a substantially rectangular periphery without CSR structures at four interior corners of the outer seal ring. The outer seal ring includes a plurality of first fin structures located between each of the two inner seal rings and a respective short side of the outer seal ring. Each first fin structure is parallel with the respective short side of the outer seal ring. Lengths of the first fin structures gradually decrease along a direction from the inner seal rings to the respective short side of the outer seal ring.Type: ApplicationFiled: May 6, 2022Publication date: January 12, 2023Inventors: Shan-Yu Huang, Hsueh-Heng Lin, Shih-Chang Chen, Hsiao-Wen Chung, Yilun Chen
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Publication number: 20220310464Abstract: A semiconductor structure that includes two circuit regions; two inner seal rings, each of the two inner seal rings surrounding one of the two circuit regions; an outer seal ring surrounding the two inner seal rings, wherein each of the inner seal rings and the outer seal ring has a substantially rectangular periphery with four interior corner seal ring structures; four first redundant regions between the two inner seal rings and the outer seal ring, each of the four first redundant regions being a substantially trapezoidal shape; and first dummy patterns substantially uniformly distributed in the four first redundant regions.Type: ApplicationFiled: June 2, 2021Publication date: September 29, 2022Inventors: Shan-Yu Huang, Hsiao-Wen Chung, Yi-Lun Chen, Huang-Sheng Lin