Patents by Inventor Shane R. Chilton

Shane R. Chilton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for removing metallic contamination from fluids using silicon beads
    Patent number: 5164093
    Abstract: A method and apparatus is provided for removing metallic contamination from a fluid or liquid that passes through a recirculating system (10) that is used for cleaning and etching semiconductor wafers. A bath 11) and fluid is provided. A recirculared fluid flows through a silicon media, thereby removing the metallic contamination from the liquid. In a preferred embodiment, the silicon media is a plurality of silicon or polysilicon beads which provide a maximum surface area in a minimum of space. Additionally, removal of metallic contamination from the recirculating fluid is combined with particle filtration of the recirculating fluid single housing.
    Type: Grant
    Filed: November 29, 1991
    Date of Patent: November 17, 1992
    Assignee: Motorola, Inc.
    Inventors: Shane R. Chilton, Mark D. Griswold