Patents by Inventor Shane W. Conley

Shane W. Conley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dual XY variable aperture in an ion implantation system
    Patent number: 11574796
    Abstract: An aperture diaphragm capable of varying the size of an aperture in two dimensions is disclosed. The aperture diaphragm may be utilized in an ion implantation system, such as between the mass analyzer and the acceleration column. In this way, the aperture diaphragm may be used to control at least one parameter of the ion beam. These parameters may include angular spread in the height direction, angular spread in the width direction, beam current or cross-sectional area. Various embodiments of the aperture diaphragm are shown. In certain embodiments, the size of the aperture in the height and width directions may be independently controlled, while in other embodiments, the ratio between height and width is constant.
    Type: Grant
    Filed: July 21, 2021
    Date of Patent: February 7, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Jun Lu, Frank Sinclair, Shane W. Conley, Michael Honan
  • Dual XY Variable Aperture In An Ion Implantation System
    Publication number: 20230021619
    Abstract: An aperture diaphragm capable of varying the size of an aperture in two dimensions is disclosed. The aperture diaphragm may be utilized in an ion implantation system, such as between the mass analyzer and the acceleration column. In this way, the aperture diaphragm may be used to control at least one parameter of the ion beam. These parameters may include angular spread in the height direction, angular spread in the width direction, beam current or cross-sectional area. Various embodiments of the aperture diaphragm are shown. In certain embodiments, the size of the aperture in the height and width directions may be independently controlled, while in other embodiments, the ratio between height and width is constant.
    Type: Application
    Filed: July 21, 2021
    Publication date: January 26, 2023
    Inventors: Jun Lu, Frank Sinclair, Shane W. Conley, Michael Honan