Abstract: A method and apparatus for ultraviolet (UV) and extreme ultraviolet (EUV) lithography patterning is provided. A UV or EUV light beam is generated and directed to the surface of a substrate disposed on a stage and coated with photoresist. A laminar flow of a layer of inert gas is directed across and in close proximity to the substrate surface coated with photoresist during the exposure, i.e. lithography operation. The inert gas is exhausted quickly and includes a short resonance time at the exposure location. The inert gas flow prevents flue gasses and other contaminants produced by outgassing of the photoresist, to precipitate on and contaminate other features of the lithography apparatus.

Abstract: An organic electro-luminescence device including an anode, a cathode, an organic light emitting layer and a hole-transporting layer is provided. The cathode has a calcium electrode and an aluminum electrode adjacent thereto. The organic light emitting layer is disposed between the anode and the calcium electrode, and has a polymer, a phosphorescence dopant and an organic electron-transporting material, wherein a ratio of contents of the organic electron-transporting material to contents of the polymer in the organic light emitting layer is substantially between 0.1 and 1. The organic electron-transporting material is 1,3-bis(N,Nt-butyl-phenyl)-1,3,4-oxadiazole. The hole-transporting layer is disposed between the light emitting layer and the anode.

Abstract: A manufacturing method of a polymer solar cell is illustrated. A substrate and a first conductive layer formed thereon are provided. An organic active semiconductor material and a functional organic material, which features modifying an interface between an organic layer and electrodes, are dissolved in an organic solvent to form a blend. The blend is deposited on the first conductive layer by solution process. The organic solvent is removed, such that the functional organic material and the organic active semiconductor material exhibit phase separation so as to form an organic modified layer on the top of the organic active semiconductor layer. A second conductive layer is deposited by thermal coating on the organic modified layer. Importantly, the organic modified layer formed by spontaneous phase separation effectively modifies the interface between the organic active semiconductor layer and a second conductive layer, thereby enhancing efficiency of an organic solar cell.