Abstract: A method includes positioning a substrate in an optical path of a multiwavelength light source; generating a first detection result by exposing a first region of the substrate to a first light having a first wavelength band selected by the light source; and generating a second detection result by exposing a second region of the substrate to a second light having a second wavelength band selected by the multiwavelength light source. A system includes a multiwavelength light source including a light source and a wavelength selector in an optical path of light generated by the light source. The system further includes a spectrometer operable to measure a spectrum of a first light selected by the wavelength selector; a mask stage operable to position a mask in the optical path; and a controller operable to adjust a parameter of the multiwavelength light source responsive to the spectrum of the first light.

Abstract: An arrangement structure of a stacker and a reclaimer, comprises a stacker, a reclaimer, a stacker travelling track, a reclaimer travelling track, a material input conveyor, a material output conveyor, a material storage yard, and a closed material storage shed. The stacker and the material input conveyor are inside the reclaimer, and the reclaimer upwards straddles the stacker and the material input conveyor. The stacker and the material input conveyor penetrate through an internal space of the reclaimer. An arrangement form that a rack of the reclaimer upwards straddles the stacker is adopted so that a problem of interference caused when the stacker is as high as an upper travelling platform of the reclaimer is solved. The upper travelling platform of the reclaimer does not need to be independently arranged.

Abstract: An arrangement structure of a stacker and a reclaimer, comprises a stacker, a reclaimer, a stacker travelling track, a reclaimer travelling track, a material input conveyor, a material output conveyor, a material storage yard, and a closed material storage shed. The stacker and the material input conveyor are inside the reclaimer, and the reclaimer upwards straddles the stacker and the material input conveyor. The stacker and the material input conveyor penetrate through an internal space of the reclaimer. An arrangement form that a rack of the reclaimer upwards straddles the stacker is adopted so that a problem of interference caused when the stacker is as high as an upper travelling platform of the reclaimer is solved. The upper travelling platform of the reclaimer does not need to be independently arranged.