Abstract: An extreme ultraviolet (EUV) photolithography system generates EUV light by irradiating droplets with a laser. The system includes a droplet generator with a nozzle and a piezoelectric structure coupled to the nozzle. The generator outputs groups of droplets. A control system applies a voltage waveform to the piezoelectric structure while the nozzle outputs the group of droplets. The waveform causes the droplets of the group to have a spread of velocities that results in the droplets coalescing into a single droplet prior to being irradiated by the laser.

Abstract: The present disclosure is directed to a modularized vessel droplet generator assembly (MGDVA) including a droplet generator assembly (DGA). Under a normal operation, the liquid fuel moves along an operation pathway extending through the DGA to eject or discharge the liquid fuel (e.g., liquid tin) from a nozzle of the DGA into a vacuum chamber. The liquid fuel in the vacuum chamber is then exposed to a laser generating an extreme ultra-violet (EUV) light. Under a service operation, the operation pathway is closed and a service pathway extending through the DGA is opened. A gas is introduced into the service pathway forming a gas-liquid interface between the gas and the liquid fuel. The gas-liquid interface is driven to an isolation valve directly adjacent to the DGA. In other words, the gas pushes back the liquid fuel to the isolation valve. Once the gas-liquid interface reaches the isolation valve, the isolation valve is closed isolating the DGA from the liquid fuel.

Abstract: The present disclosure is directed to a modularized vessel droplet generator assembly (MGDVA) including a droplet generator assembly (DGA). Under a normal operation, the liquid fuel moves along an operation pathway extending through the DGA to eject or discharge the liquid fuel (e.g., liquid tin) from a nozzle of the DGA into a vacuum chamber. The liquid fuel in the vacuum chamber is then exposed to a laser generating an extreme ultra-violet (EUV) light. Under a service operation, the operation pathway is closed and a service pathway extending through the DGA is opened. A gas is introduced into the service pathway forming a gas-liquid interface between the gas and the liquid fuel. The gas-liquid interface is driven to an isolation valve directly adjacent to the DGA. In other words, the gas pushes back the liquid fuel to the isolation valve. Once the gas-liquid interface reaches the isolation valve, the isolation valve is closed isolating the DGA from the liquid fuel.

Abstract: A display device includes first and second display modules and first and second turning pieces that include a first coupling piece, a first turning piece, a second turning piece, and a third turning piece, a second coupling piece and a guiding device. When the first and second display modules are switched between folding and unfolding, the first turning piece pivots relative to the first coupling piece and the second turning piece, and the third turning piece pivots relative to the second coupling piece and the second turning piece. When the display module is switched from folded to unfolded, the other side of the first display module relative to the side is pulled, the side of the first display module is guided by one end of the guiding device and slides to the other end, the first and second display modules are symmetrically unfolded with the side edge as the center.

Abstract: A method for using an extreme ultraviolet radiation source is provided. The method includes performing a lithography process using an extreme ultraviolet (EUV) radiation source; after the lithography processes, inserting an extraction tube into a vessel of the EUV radiation source; and cleaning a collector of the EUV radiation source by using the extraction tube.

Abstract: The present disclosure is directed to a modularized vessel droplet generator assembly (MGDVA) including a droplet generator assembly (DGA). Under a normal operation, the liquid fuel moves along an operation pathway extending through the DGA to eject or discharge the liquid fuel (e.g., liquid tin) from a nozzle of the DGA into a vacuum chamber. The liquid fuel in the vacuum chamber is then exposed to a laser generating an extreme ultra-violet (EUV) light. Under a service operation, the operation pathway is closed and a service pathway extending through the DGA is opened. A gas is introduced into the service pathway forming a gas-liquid interface between the gas and the liquid fuel. The gas-liquid interface is driven to an isolation valve directly adjacent to the DGA. In other words, the gas pushes back the liquid fuel to the isolation valve. Once the gas-liquid interface reaches the isolation valve, the isolation valve is closed isolating the DGA from the liquid fuel.

Abstract: A hand-held photographing device capable of outputting panoramic images includes a screen, a plurality of camera modules, and a control device. The screen is curved and extends to cover multiple surfaces of the device. The camera modules are located on different surfaces of the device, and the camera modules which are on the same surfaces of the panoramic photographing device as the screen are covered by the screen. Each camera module includes a large wide-angle camera. The control device issues instructions to the camera modules. Images from different directions are collected and the multiple images are used to synthesize a panoramic image for storage or display. The present disclosure also provides a panoramic image photographing method, which is applied to a panoramic photographing device.

Abstract: An electronic device includes a main body, a front cover rotatably connected to the main body, a base, a slide guiding plate, three first magnets, and two second magnets. The main body defines a groove. The front cover defines a notch. The base is received in the groove and defines two first receiving grooves. The slide guiding plate is slidably received in the notch and defines three second receiving grooves. One of the three first magnets is received in one of the two first receiving grooves, and the other two first magnets are received in two of the three second receiving grooves respectively. One of the second magnets is receiving in the other first receiving groove, and the other second magnet is receiving in the other one of the three second receiving grooves and positioned between the two first magnets received in the two second receiving grooves.

Abstract: A magnetic levitation motor includes a fastening unit and a moving unit. The fastening unit includes a fixing frame and a first magnet assembly. The fixing frame includes a lower plate and four guiding poles extending upward from corners of the lower plate. The first magnet assembly includes four first magnets supported on the lower plate. Each first magnet is positioned between two adjacent guiding poles. The moving unit includes a moving frame and a second magnet assembly. The moving frame includes an outer surface and defines a receiving recess on the outer surface. The second magnet assembly includes four second magnets received in the receiving recess. The first magnets are positioned above the second magnets along an optical axis of the magnetic levitation motor.

Abstract: An electronic device includes a main body, a front cover rotatably connected to the main body, a base, a slide guiding plate, three first magnets, and two second magnets. The main body defines a groove. The front cover defines a notch. The base is received in the groove and defines two first receiving grooves. The slide guiding plate is slidably received in the notch and defines three second receiving grooves. One of the three first magnets is received in one of the two first receiving grooves, and the other two first magnets are received in two of the three second receiving grooves respectively. One of the second magnets is receiving in the other first receiving groove, and the other second magnet is receiving in the other one of the three second receiving grooves and positioned between the two first magnets received in the two second receiving grooves.

Abstract: A magnetic levitation motor includes a fastening unit and a moving unit. The fastening unit includes a fixing frame and a first magnet assembly. The fixing frame includes a lower plate and four guiding poles extending upward from corners of the lower plate. The first magnet assembly includes four first magnets supported on the lower plate. Each first magnet is positioned between two adjacent guiding poles. The moving unit includes a moving frame and a second magnet assembly. The moving frame includes an outer surface and defines a receiving recess on the outer surface. The second magnet assembly includes four second magnets received in the receiving recess. The first magnets are positioned above the second magnets along an optical axis of the magnetic levitation motor.