Abstract: The present invention provides a single wire programmable Micro Electromechanical System (MEMS) microphone and a programming method and system thereof. The single wire programmable MEMS microphone includes an MEMS sensor and an Application Specific Integrated Circuit (ASIC) chip connected to each other; the MEMS sensor is used for implementing acoustic-electric conversion; the ASIC chip includes an OUT interface, so that an upper computer judges, according to an output signal of the OUT interface, whether the ASIC chip is in a normal start mode or a programming mode, where if the output signal of the OUT interface is at a high level, the ASIC chip is in the normal start mode, and otherwise, the ASIC chip enters the programming mode.