Patents by Inventor Shang-hua Wu
Shang-hua Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240385398Abstract: A structure including a photonic integrated circuit die, an electric integrated circuit die, a semiconductor dam, and an insulating encapsulant is provided. The photonic integrated circuit die includes an optical input/output portion and a groove located in proximity of the optical input/output portion, wherein the groove is adapted for lateral insertion of at least one optical fiber. The electric integrated circuit die is disposed over and electrically connected to the photonic integrated circuit die. The semiconductor dam is disposed over the photonic integrated circuit die. The insulating encapsulant is disposed over the photonic integrated circuit die and laterally encapsulates the electric integrated circuit die and the semiconductor dam.Type: ApplicationFiled: July 29, 2024Publication date: November 21, 2024Inventors: Chen-Hua Yu, Hsing-Kuo Hsia, Sung-Hui Huang, Kuan-Yu Huang, Kuo-Chiang Ting, Chi-Hsi Wu, Shang-Yun Hou
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Publication number: 20240359340Abstract: A gripper structure is disclosed and includes a screw-rod main body, a first rotatory nut, a second rotatory nut, a first driving module, a second driving module, a first clamping element and a second clamping element. The first rotatory nut and the second rotatory nut are disposed on two sides of the screw-rod main extended along a first direction body, respectively, and bilaterally symmetrical to each other. The first driving module and the second driving module are configured to drive the first rotatory nut and the second rotatory nut to rotate, respectively. The first rotatory nut and the second rotatory nut are allowed to pass through a midline of the screw-rod main body. When the first driving module drives the first rotatory nut or/and the second driving module drives the second rotatory nut, the first clamping element and the second clamping element are relatively displaced in the first direction to achieve a clamping operation.Type: ApplicationFiled: August 25, 2023Publication date: October 31, 2024Inventors: Hsin-Hua Chen, Shang-Wei Yang, Hsin-Hsien Wu
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Publication number: 20240365461Abstract: The present disclosure is directed to a modularized vessel droplet generator assembly (MGDVA) including a droplet generator assembly (DGA). Under a normal operation, the liquid fuel moves along an operation pathway extending through the DGA to eject or discharge the liquid fuel (e.g., liquid tin) from a nozzle of the DGA into a vacuum chamber. The liquid fuel in the vacuum chamber is then exposed to a laser generating an extreme ultra-violet (EUV) light. Under a service operation, the operation pathway is closed and a service pathway extending through the DGA is opened. A gas is introduced into the service pathway forming a gas-liquid interface between the gas and the liquid fuel. The gas-liquid interface is driven to an isolation valve directly adjacent to the DGA. In other words, the gas pushes back the liquid fuel to the isolation valve. Once the gas-liquid interface reaches the isolation valve, the isolation valve is closed isolating the DGA from the liquid fuel.Type: ApplicationFiled: July 11, 2024Publication date: October 31, 2024Inventors: Yu-Kuang SUN, Ming-Hsun TSAI, Wei-Shin CHENG, Cheng-Hao LAI, Hsin-Feng CHEN, Chiao-Hua CHENG, Cheng-Hsuan WU, Yu-Fa LO, Jou-Hsuan LU, Shang-Chieh CHIEN, Li-Jui CHEN, Heng-Hsin LIU
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Publication number: 20240361701Abstract: A method of inspecting an extreme ultraviolet (EUV) radiation source includes, in an idle mode, inserting a borescope mounted on a fixture through a first opening into a chamber of the EUV radiation source. The borescope includes a connection cable attached at a first end to a camera. The EUV radiation source includes an excitation laser that generates a light beam that is configured to focus onto tin droplets to generate EUV radiation inside the chamber of the EUV radiation source. The method further includes extending the extendible section, in a direction toward the second opening of the EUV radiation source, to move the camera beyond the blocking shield, and acquiring one or more images from a region beyond the blocking shield. The method also includes analyzing the one or more acquired images to determine an amount of tin debris deposited inside the chamber of the EUV radiation source.Type: ApplicationFiled: July 9, 2024Publication date: October 31, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chiao-Hua CHENG, Sheng-Kang YU, Shang-Chieh CHIEN, Wei-Chun YEN, Heng-Hsin LIU, Ming-Hsun TSAI, Yu-Fa LO, Li-Jui CHEN, Wei-Shin CHENG, Cheng-Hsuan WU, Cheng-Hao LAI, Yu-Kuang SUN, Yu-Huan CHEN
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Publication number: 20240365460Abstract: The present disclosure is directed to a modularized vessel droplet generator assembly (MGDVA) including a droplet generator assembly (DGA). Under a normal operation, the liquid fuel moves along an operation pathway extending through the DGA to eject or discharge the liquid fuel (e.g., liquid tin) from a nozzle of the DGA into a vacuum chamber. The liquid fuel in the vacuum chamber is then exposed to a laser generating an extreme ultra-violet (EUV) light. Under a service operation, the operation pathway is closed and a service pathway extending through the DGA is opened. A gas is introduced into the service pathway forming a gas-liquid interface between the gas and the liquid fuel. The gas-liquid interface is driven to an isolation valve directly adjacent to the DGA. In other words, the gas pushes back the liquid fuel to the isolation valve. Once the gas-liquid interface reaches the isolation valve, the isolation valve is closed isolating the DGA from the liquid fuel.Type: ApplicationFiled: July 11, 2024Publication date: October 31, 2024Inventors: Yu-Kuang SUN, Ming-Hsun TSAI, Wei-Shin CHENG, Cheng-Hao LAI, Hsin-Feng CHEN, Chiao-Hua CHENG, Cheng-Hsuan WU, Yu-Fa LO, Jou-Hsuan LU, Shang-Chieh CHIEN, Li-Jui CHEN, Heng-Hsin LIU
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Publication number: 20240329302Abstract: A package includes silicon waveguides on a first side of an oxide layer; photonic devices on the first side of the oxide layer, wherein the photonic devices are coupled to the silicon waveguides; redistribution structures over the first side of the oxide layer, wherein the redistribution structures are electrically connected to the photonic devices; a hybrid interconnect structure on a second side of the oxide layer, wherein the hybrid interconnect structure includes a stack of silicon nitride waveguides that are separated by dielectric layers; and through vias extending through the hybrid interconnect structure and the oxide layer, wherein the through vias make physical and electrical connection to the redistribution structures.Type: ApplicationFiled: June 12, 2024Publication date: October 3, 2024Inventors: Chen-Hua Yu, Hsing-Kuo Hsia, Kuo-Chiang Ting, Jiun Yi Wu, Hung-Yi Kuo, Shang-Yun Hou
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Patent number: 12096543Abstract: A method for using an extreme ultraviolet radiation source is provided. The method includes performing a lithography process using an extreme ultraviolet (EUV) radiation source; after the lithography processes, inserting an extraction tube into a vessel of the EUV radiation source; and cleaning a collector of the EUV radiation source by using the extraction tube.Type: GrantFiled: January 9, 2023Date of Patent: September 17, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa Lo, Yu-Kuang Sun, Wei-Shin Cheng, Yu-Huan Chen, Ming-Hsun Tsai, Cheng-Hao Lai, Cheng-Hsuan Wu, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen, Sheng-Kang Yu
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Publication number: 20240297166Abstract: An integrated circuit package and a method of forming the same are provided. The method includes attaching an integrated circuit die to a first substrate. A dummy die is formed. The dummy die is attached to the first substrate adjacent the integrated circuit die. An encapsulant is formed over the first substrate and surrounding the dummy die and the integrated circuit die. The encapsulant, the dummy die and the integrated circuit die are planarized, a topmost surface of the encapsulant being substantially level with a topmost surface of the dummy die and a topmost surface of the integrated circuit die. An interior portion of the dummy die is removed. A remaining portion of the dummy die forms an annular structure.Type: ApplicationFiled: May 15, 2024Publication date: September 5, 2024Inventors: Shang-Yun Hou, Sung-Hui Huang, Kuan-Yu Huang, Hsien-Pin Hu, Yushun Lin, Heh-Chang Huang, Hsing-Kuo Hsia, Chih-Chieh Hung, Ying-Ching Shih, Chin-Fu Kao, Wen-Hsin Wei, Li-Chung Kuo, Chi-Hsi Wu, Chen-Hua Yu
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Patent number: 12066761Abstract: In a method of inspecting an extreme ultraviolet (EUV) radiation source, during an idle mode, a borescope mounted on a fixture is inserted through a first opening into a chamber of the EUV radiation source. The borescope includes a connection cable attached at a first end to a camera. The fixture includes an extendible section mounted from a first side on a lead screw, and the camera of the borescope is mounted on a second side, opposite to the first side, of the extendible section. The extendible section is extended to move the camera inside the chamber of the EUV radiation source. One or more images are acquired by the camera from inside the chamber of the EUV radiation source at one or more viewing positions. The one or more acquired images are analyzed to determine an amount of tin debris deposited inside the chamber of the EUV radiation source.Type: GrantFiled: August 30, 2021Date of Patent: August 20, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chiao-Hua Cheng, Sheng-Kang Yu, Shang-Chieh Chien, Wei-Chun Yen, Heng-Hsin Liu, Ming-Hsun Tsai, Yu-Fa Lo, Li-Jui Chen, Wei-Shin Cheng, Cheng-Hsuan Wu, Cheng-Hao Lai, Yu-Kuang Sun, Yu-Huan Chen
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Patent number: 12063734Abstract: The present disclosure is directed to a modularized vessel droplet generator assembly (MGDVA) including a droplet generator assembly (DGA). Under a normal operation, the liquid fuel moves along an operation pathway extending through the DGA to eject or discharge the liquid fuel (e.g., liquid tin) from a nozzle of the DGA into a vacuum chamber. The liquid fuel in the vacuum chamber is then exposed to a laser generating an extreme ultra-violet (EUV) light. Under a service operation, the operation pathway is closed and a service pathway extending through the DGA is opened. A gas is introduced into the service pathway forming a gas-liquid interface between the gas and the liquid fuel. The gas-liquid interface is driven to an isolation valve directly adjacent to the DGA. In other words, the gas pushes back the liquid fuel to the isolation valve. Once the gas-liquid interface reaches the isolation valve, the isolation valve is closed isolating the DGA from the liquid fuel.Type: GrantFiled: September 23, 2021Date of Patent: August 13, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yu-Kuang Sun, Ming-Hsun Tsai, Wei-Shin Cheng, Cheng-Hao Lai, Hsin-Feng Chen, Chiao-Hua Cheng, Cheng-Hsuan Wu, Yu-Fa Lo, Jou-Hsuan Lu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu
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Patent number: 12038599Abstract: A package includes silicon waveguides on a first side of an oxide layer; photonic devices on the first side of the oxide layer, wherein the photonic devices are coupled to the silicon waveguides; redistribution structures over the first side of the oxide layer, wherein the redistribution structures are electrically connected to the photonic devices; a hybrid interconnect structure on a second side of the oxide layer, wherein the hybrid interconnect structure includes a stack of silicon nitride waveguides that are separated by dielectric layers; and through vias extending through the hybrid interconnect structure and the oxide layer, wherein the through vias make physical and electrical connection to the redistribution structures.Type: GrantFiled: June 7, 2021Date of Patent: July 16, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chen-Hua Yu, Hsing-Kuo Hsia, Kuo-Chiang Ting, Jiun Yi Wu, Hung-Yi Kuo, Shang-Yun Hou
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Publication number: 20230260086Abstract: An image correction method, applicable to an image to be corrected having two boundary, comprises: extending a first and a second straight line in the image to be corrected to generate a first and a second extended straight line with both of them intersecting the first and second boundary to generate multiple intersection points; performing an extrapolation process based on multiple intersection points, center points of the two boundaries, and a half side length to generate a first and a second extrapolation line, rotating the image to be corrected when the first and second extrapolation lines have different slope values to generate a preliminary corrected image; and performing a Keystone correction process when the first and second extrapolation lines have same slope values or when obtaining the preliminary corrected image to generate a corrected image.Type: ApplicationFiled: February 10, 2023Publication date: August 17, 2023Applicant: AVER INFORMATION INC.Inventors: Yan-Zhen LAI, Kuo-Hao HUANG, Shang-Hua WU
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Patent number: 9468785Abstract: A mobile fire extinguishing device includes a motorbike having a base connected to a rear end thereof, and a foam-type fire extinguishing device is connected to the base. Two support units extend from two sides of the base respectively and each support unit has a retractable support rod. A support stand is pivotably connected to the rear end of the base and is positioned either at a retracted first position or an extended second position. When the two support rods are extended, the motorbike is lifted upward and the rear wheel of the motorbike is lifted from the ground. When the support stand is pivoted to the second position, the two support units are retracted, the support stand contacts against the ground so that the motorbike is stable on the ground to bear the reaction force due to the action of the foam-type fire extinguishing device.Type: GrantFiled: October 23, 2014Date of Patent: October 18, 2016Inventor: Shang-Hua Wu
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Publication number: 20150122514Abstract: A mobile fire distinguishing device includes a motorbike having a base connected to a rear end thereof, and a foam-type fire distinguishing device is connected to the base. Two support units extend from two sides of the base respectively and each support unit has a retractable support rod. A support stand is pivotably connected to the rear end of the base and is positioned either at a retracted first position or an extended second position. When the two support rods are extended, the motorbike is lifted upward and the rear wheel of the motorbike is lifted from the ground. When the support stand is pivoted to the second position, the two support units are retracted, the support stand contacts against the ground so that the motorbike is stable on the ground to bear the reaction force due to the action of the foam-type fire distinguishing device.Type: ApplicationFiled: October 23, 2014Publication date: May 7, 2015Inventor: Shang-Hua Wu
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Publication number: 20150122512Abstract: A The foam-type fire distinguishing device includes a water supply unit, a container, a mixing tank, an increasing pressure tank, a pressure device, a transmitting unit and a spray device. The transmitting unit delivers water from the water supply unit and the foam agent from the container to be mixed in the mixing tank to create the water-foam mixture which is then sent to the increasing pressure tank which introduces pressurized air to the water-foam mixture to create fine foams. The water-foam mixture with fine foams are sprayed from the spray device to increase the spread area to increase the efficiency of distinguishing fire.Type: ApplicationFiled: October 23, 2014Publication date: May 7, 2015Inventor: Shang-Hua Wu
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Publication number: 20060062416Abstract: An ear-cushion mechanism for safety helmet with hand-free cellular phone server. Its main feature is a circular cushion on the ear-muffs of a safety helmet, with an indentation along the inner circumference of the cushion. An elastic net is attached to the inner circumference of the cushion near the bottom. Between the net and the bottom of the indentation is an accommodating space for the hand-free cellular phone server. Besides, on one side of the cushion there is a narrow channel that connects the accommodating space of the cushion with the outside. The hand-free cellular phone server that contains both a speaker and a microphone is put into the accommodating space of the cushion through the narrow channel and held by the elastic net.Type: ApplicationFiled: September 21, 2004Publication date: March 23, 2006Inventor: Shang-Hua Wu
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Patent number: 6785385Abstract: A safety helmet structure includes a safety helmet formed with a base portion which is located at a position adjacent to a user's one ear. The base portion is provided with an insertion groove which is provided with a threaded seat. A seat is mounted on the base portion and provided with an insertion flange that may be inserted into the insertion groove of the base portion. The seat has a receiver, and a speaker. A signal connecting cord is extended from the seat, and connected to a mobile telephone. The seat is provided with a through hole for passage of a threaded rod. The threaded rod is provided with a thread that mates with the thread of the threaded seat. A spring is mounted between the base portion and the seat for adjusting the protruding position of the seat.Type: GrantFiled: September 20, 2001Date of Patent: August 31, 2004Inventor: Shang-Hua Wu
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Publication number: 20030053619Abstract: A safety helmet structure includes a safety helmet formed with a base portion which is located at a position adjacent to a user's one ear. The base portion is provided with an insertion groove which is provided with a threaded seat. A seat is mounted on the base portion and provided with an insertion flange that may be inserted into the insertion groove of the base portion. The seat has a receiver, and a speaker. A signal connecting cord is extended from the seat, and connected to a mobile telephone. The seat is provided with a through hole for passage of a threaded rod. The threaded rod is provided with a thread that mates with the thread of the threaded seat. A spring is mounted between the base portion and the seat for adjusting the protruding position of the seat.Type: ApplicationFiled: September 20, 2001Publication date: March 20, 2003Inventor: Shang-Hua Wu
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Patent number: 6220491Abstract: The invention relates to an auxiliary device for a paint barrel which comprises a supporting bar bridged at two opposite sides of a paint barrel body by means of a pivoting attachment structure, a supporting portion to lean on the abdomen of a user provided at the middle part of the supporting bar and a strap attached to the barrel body. In use, the strap hangs on the user's neck and the supporting portion of the supporting bar leans on the abdomen of the user so that said barrel body suspends naturally in front of the user. In this way, the user can easily take the paint from the paint barrel, thereby achieving the purpose of convenience in use.Type: GrantFiled: December 1, 1999Date of Patent: April 24, 2001Inventor: Shang-hua Wu
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Patent number: D426122Type: GrantFiled: July 14, 1999Date of Patent: June 6, 2000Inventor: Shang-Hua Wu