Patents by Inventor SHANKEERTHAN KALYANASUNDARAM

SHANKEERTHAN KALYANASUNDARAM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hybrid substrate carrier
    Patent number: 10777442
    Abstract: Embodiments of a hybrid substrate carrier are provided herein. In some embodiments, a substrate carrier includes: a carrier ring having an inner ledge adjacent a central opening of the carrier ring; and a carrier plate having a diameter greater than central opening and configured to rest upon the inner ledge, wherein the carrier plate includes an electrode disposed beneath a support surface to electrostatically clamp a substrate to the support surface of the carrier plate.
    Type: Grant
    Filed: November 16, 2017
    Date of Patent: September 15, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Sriskantharajah Thirunavukarasu, Shoju Vayyapron, Anand Mahadev, Shankeerthan Kalyanasundaram, Eng Sheng Peh
  • HYBRID SUBSTRATE CARRIER
    Publication number: 20180144969
    Abstract: Embodiments of a hybrid substrate carrier are provided herein. In some embodiments, a substrate carrier includes: a carrier ring having an inner ledge adjacent a central opening of the carrier ring; and a carrier plate having a diameter greater than central opening and configured to rest upon the inner ledge, wherein the carrier plate includes an electrode disposed beneath a support surface to electrostatically clamp a substrate to the support surface of the carrier plate.
    Type: Application
    Filed: November 16, 2017
    Publication date: May 24, 2018
    Inventors: SRISKANTHARAJAH THIRUNAVUKARASU, SHOJU VAYYAPRON, ANAND MAHADEV, SHANKEERTHAN KALYANASUNDARAM, ENG SHENG PEH