Abstract: The present application discloses a microfabricated micron-scale battery having excellent performance attributes. The battery using a titanium anode which is etched to form a plurality of raised features on the titanium anode. The raised features are coated conformally with a highly conductive metal. A layer of titanium is then formed over the highly conductive metal. This titanium layer is then oxidized to provide further small scale roughness. The roughness increases the surface area which improves the uptake of lithium ions by the anode. The battery can be combined with a titanium thermal ground plane to further enhance performance by removing heat from the battery.