Patents by Inventor Shannon J. Kelsey

Shannon J. Kelsey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ceramic dome temperature control using heat pipe structure and method
    Patent number: 5894887
    Abstract: This invention relates to a structure and method for using heat pipe technology in combination with a ceramic dome of a vacuum processing chamber to help maintain the uniformity of temperature in the dome and avoid differences in temperature in the dome which may cause deleterious flaking of process deposition, or allow elevated temperatures in the dome to cause premature wear of the material. A heat pipe can be in thermal contact with the dome (process chamber surface) or can actually be part of the heat pipe/dome structure.
    Type: Grant
    Filed: November 30, 1995
    Date of Patent: April 20, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Shannon J. Kelsey, Philip M. Salzman
  • Method for supporting a wafer in a combined wafer support and temperature monitoring device
    Patent number: 5567909
    Abstract: A combined wafer support and thermocouple assembly comprising a wafer support basket having a plurality of wafer support fingers, one of which includes a low mass, low heat constant support for supporting a thermocouple against the backside of a wafer positioned on the basket.
    Type: Grant
    Filed: September 20, 1994
    Date of Patent: October 22, 1996
    Assignee: Applied Materials Inc.
    Inventors: Michael N. Sugarman, Michael Beesely, Shannon J. Kelsey, Robert J. Steger
  • Combined wafer support and temperature monitoring device
    Patent number: 5356486
    Abstract: A combined wafer support and thermocouple assembly comprising a wafer support basket having a plurality of wafer support fingers, one of which includes a low mass, low heat constant support for supporting a thermocouple against the backside of a wafer positioned on the basket.
    Type: Grant
    Filed: March 4, 1991
    Date of Patent: October 18, 1994
    Assignee: Applied Materials, Inc.
    Inventors: Michael N. Sugarman, Michael Beesely, Shannon J. Kelsey, Robert J. Steger