Patents by Inventor Shantanu Pathak

Shantanu Pathak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Workpiece handling scan arm for ion implantation system
    Patent number: 7560705
    Abstract: An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic electrical and fluid rotary connections associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.
    Type: Grant
    Filed: August 17, 2007
    Date of Patent: July 14, 2009
    Assignee: Axcelis Technologies, Inc.
    Inventors: Ari Eiriksson, Donovan Beckel, Robert Mitchell, Michel Pharand, Marvin LaFontaine, Ashwin Purohit, Steven Weed, Wayne Arseneault, Shantanu Pathak, Joseph Daniel Foley
  • WORKPIECE HANDLING SCAN ARM FOR ION IMPLANTATION SYSTEM
    Publication number: 20080105836
    Abstract: An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic electrical and fluid rotary connections associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.
    Type: Application
    Filed: August 17, 2007
    Publication date: May 8, 2008
    Inventors: Ari Eiriksson, Donovan Beckel, Robert Mitchell, Michel Pharand, Marvin LaFontaine, Ashwin Purohit, Steven Weed, Wayne Arseneault, Shantanu Pathak, Joseph Foley