Patents by Inventor Shao Chi Chang

Shao Chi Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10845699
    Abstract: A method for forming a photomask is provided. The method includes forming a light blocking layer over a transparent substrate. The method includes forming a mask layer over the light blocking layer. The mask layer covers a first portion of the light blocking layer, and the first portion is over a second portion of the transparent substrate. The method includes removing the light blocking layer, which is not covered by the mask layer. The method includes removing the mask layer. The first portion of the light blocking layer is removed during removing the mask layer. The method includes removing the second portion of the transparent substrate to form a first recess in the transparent substrate. The method includes forming a first light blocking structure in the first recess.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: November 24, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Ming Chang, Minfeng Chen, Min-An Yang, Shao-Chi Wei
  • Publication number: 20200363606
    Abstract: A driving mechanism for driving an optical element to move is provided, including a movable part, a fixed part, a housing connected to the fixed part, and a buffer member. The movable part is configured to hold the optical element. The fixed part is connected to the movable part, wherein the movable part is movable relative to the fixed part. The housing has a top cover and at least a sidewall connected to the top cover. The buffer member is disposed on the housing and extends from the top cover to the sidewall.
    Type: Application
    Filed: May 15, 2020
    Publication date: November 19, 2020
    Inventors: Chen-Hsin HUANG, Shao-Chung CHANG, Shou-Jen LIU, Chen-Chi KUO
  • Patent number: 10816891
    Abstract: A method of manufacturing a mask includes depositing an end-point layer over a light transmitting substrate, depositing a phase shifter over the end-point layer, depositing a hard mask layer over the phase shifter, and removing a portion of the hard mask layer and a first portion of the phase shifter to expose a portion of the end-point layer. The end-point layer and the light transmitting substrate are transparent to a predetermined wavelength.
    Type: Grant
    Filed: April 6, 2017
    Date of Patent: October 27, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hao-Ming Chang, Chien-Hung Lai, Cheng-Ming Lin, Hsuan-Wen Wang, Min-An Yang, S. C. Hsu, Shao-Chi Wei, Yuan-Chih Chu
  • Publication number: 20200133118
    Abstract: A method for manufacturing a photomask is provided. The method includes: receiving a substrate having a hard mask disposed thereover; forming a patterned photoresist over the hard mask; patterning the hard mask using the patterned photoresist as a mask; and removing the patterned photoresist. The removing of the patterned photoresist includes: oxidizing organic materials over the substrate; applying an alkaline solution onto the patterned photoresist; and removing the patterned photoresist by mechanical impact. A method for cleaning a substrate and a photomask are also provided.
    Type: Application
    Filed: February 14, 2019
    Publication date: April 30, 2020
    Inventors: YU-HSIN HSU, HAO-MING CHANG, SHAO-CHI WEI, SHENG-CHANG HSU, CHENG-MING LIN
  • Publication number: 20200126976
    Abstract: A device includes a dielectric layer, an interlayer metal pad in the dielectric layer, a first capacitor over the interlayer metal pad, and a second capacitor over the dielectric layer. The first capacitor includes a first bottom capacitor electrode over and in contact with the interlayer metal pad, a first top capacitor electrode, and a first inter-electrode dielectric layer between the first bottom capacitor electrode and the first top capacitor electrode. The second capacitor includes a second bottom capacitor electrode over and in contact with the dielectric layer, a second top capacitor electrode, and a second inter-electrode dielectric layer between the second bottom capacitor electrode and the second top capacitor electrode.
    Type: Application
    Filed: December 20, 2019
    Publication date: April 23, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shao-Yu CHEN, Chih-Ping CHAO, Chun-Hung CHEN, Chung-Long CHANG, Kuan-Chi TSAI, Wei-Kung TSAI, Hsiang-Chi CHEN, Ching-Chung HSU, Cheng-Chang HSU, Yi-Sin WANG
  • Patent number: 10583818
    Abstract: A brake device and an automatic driving vehicle using the same are provided. The brake device includes an electrically controlled brake assembly, a mechanically controlled brake assembly and a shaft. The electrically controlled brake assembly has a main body and a brake control link. The shaft is connected between the electrically controlled brake assembly and the mechanically controlled brake assembly. The mechanically controlled brake assembly includes a pedal, an elbow, a brake link group and a brake pump. The first end is connected to the pedal, and the fulcrum is between the first end and the second end and is located close to the second end. The brake link group is connected between the elbow and the brake control link. The brake pump has an adjustable rod, and one link of the brake link group is connected to the adjustable rod.
    Type: Grant
    Filed: April 2, 2018
    Date of Patent: March 10, 2020
    Assignee: Acer Incorporated
    Inventors: Kuo-Hui Chang, Shao-Chi Chuang, Wen-Shu Lee
  • Publication number: 20200075986
    Abstract: A battery unit includes two bases, two locking components, a plurality of battery cells and two electrode pieces. The two bases fixed to each other through the two locking components. The battery cells and the two electrode pieces are accommodated in the two bases. Two opposite ends of each battery cell respectively abut against the two electrode pieces. Each base has an engaging protrusion and an engaging groove. A battery set is also provided. The battery set is composed by the plurality of battery units and the battery units are electrically connected with each other through at least one electrical connecting component. One of the battery units is engaged with the engaging groove of the other one of battery units through the engaging protrusion.
    Type: Application
    Filed: November 25, 2018
    Publication date: March 5, 2020
    Applicant: Acer Incorporated
    Inventors: Shao-Chi Chuang, Wen-Pin Chang, Pu-De Ciou, Wen-Shu Lee
  • Publication number: 20200047725
    Abstract: A hybrid power brake control system and a control method thereof are provided. The hybrid power brake control system includes a computer, a motor, a connecting rod set, and a pedal brake. The motor is electrically connected with the computer, the connecting rod set includes the first connecting rod and the second connecting rod, the first connecting rod is connected with the motor, the first terminal end of the second connecting rod is connected with the first connecting rod, and the pedal brake is pivotally connected with the second terminal end of the second connecting rod.
    Type: Application
    Filed: December 28, 2018
    Publication date: February 13, 2020
    Applicant: Acer Incorporated
    Inventors: Chih-Kai Wang, Shao-Chi Chuang, Wen-Shu Lee, Tsung-Hsun Wu, Kuo-Hui Chang
  • Publication number: 20200000240
    Abstract: A sleep induction device for oscillating a bed to induce a user of the bed to sleep can be applied to a bed of any size. A bed including a drive leg support including a movable leg holder slidable in a predetermined direction within a predetermined range, a drive means for reciprocally sliding the movable leg holder within a predetermined range, and a driven leg support including the movable leg holder, wherein the sleep induction device oscillates a bed having legs mounted on the drive leg support and the driven leg support by reciprocally oscillated by reciprocally sliding the movable leg holder of the drive leg support.
    Type: Application
    Filed: February 27, 2017
    Publication date: January 2, 2020
    Inventors: Fujio HARA, Chun-Yuan HSIAO, Shao-Chi CHANG
  • Patent number: 10515949
    Abstract: An integrated circuit includes a stacked MIM capacitor and a thin film resistor and methods of fabricating the same are disclosed. A capacitor bottom metal in one capacitor of the stacked MIM capacitor and the thin film resistor are substantially at the same layer of the integrated circuit, and the capacitor bottom metal and the thin film resistor are also made of substantially the same materials. The integrated circuit with both of a stacked MIM capacitor and a thin film resistor can be made in a cost benefit way accordingly, so as to overcome disadvantages mentioned above.
    Type: Grant
    Filed: October 17, 2013
    Date of Patent: December 24, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shao-Yu Chen, Chih-Ping Chao, Chun-Hung Chen, Chung-Long Chang, Kuan-Chi Tsai, Wei-Kung Tsai, Hsiang-Chi Chen, Ching-Chung Hsu, Cheng-Chang Hsu, Yi-Sin Wang
  • Patent number: 10508953
    Abstract: A method for processing a substrate is provided. The method includes supplying a first flow of a chemical solution into a processing chamber, configured to process the substrate, via a first dispensing nozzle. The method further includes producing a first thermal image of the first flow of the chemical solution. The method also includes performing an image analysis on the first thermal image. In addition, the method includes moving the substrate into the processing chamber when the result of the analysis of the first thermal image is within the allowable deviation from the baseline.
    Type: Grant
    Filed: April 18, 2017
    Date of Patent: December 17, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Min-An Yang, Hao-Ming Chang, Shao-Chi Wei, Kuo-Chin Lin, Sheng-Chang Hsu, Li-Chih Lu, Cheng-Ming Lin
  • Publication number: 20190377151
    Abstract: An optical device includes an optical module, a lens, and a first adhesive member. The optical module includes a base seat, a frame member that defines a hollow region and that has a top surface, and an optical element that is connected to the base seat and that is received in the hollow region. The lens has a first surface that faces the base seat and the optical element, and that is connected to the frame member to cover the hollow region, a second surface that is opposite to the first surface, and a side surface that interconnects the first and second surfaces. The first adhesive member is connected to the side surface of the lens and the top surface of the frame member. A method for manufacturing optical devices is also disclosed.
    Type: Application
    Filed: June 10, 2019
    Publication date: December 12, 2019
    Inventors: Shao-Pin RU, Chia-Yi CHANG, Zzu-Chi CHIU
  • Patent number: 10459332
    Abstract: A method of fabricating a photomask includes providing a mask blank; removing a portion of the resist layer to form a patterned resist layer exposing a portion of the cooling layer; patterning the cooling layer by using the patterned resist layer as an etching mask; patterning the opaque layer; and removing the patterned resist layer and the patterned cooling layer. The mask blank includes a light-transmitting substrate and an opaque layer, a cooling layer, and a resist layer sequentially stacked thereon, wherein the cooling layer has a thermal conductivity ranging between 160 and 5000 and an effective atomic number ranging between 5 and 14.
    Type: Grant
    Filed: March 28, 2017
    Date of Patent: October 29, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hao-Ming Chang, Chih-Ming Chen, Cheng-Ming Lin, Sheng-Chang Hsu, Shao-Chi Wei, Hsao Shih, Li-Chih Lu
  • Publication number: 20190227337
    Abstract: An optical driving mechanism is provided, including a movable portion, a bottom plate and a biasing assembly. The movable portion is configured to sustain an optical element having an optical axis. The bottom plate has a moving member. The biasing assembly has at least one biasing element for driving the movable portion to move relative to the bottom plate. The bottom plate defines a first electrical connection portion and a second electrical connection portion, and the biasing element is connected to the first and second electrical connection portions. The first electrical connection portion has a fixed body, an insulating layer and a conductive layer, which are sequentially overlapped along the optical axis. The conductive layer is directly and electrically connected to the biasing element. When viewed along the optical axis, the insulating layer protrudes from the fixed body and the conductive layer.
    Type: Application
    Filed: January 25, 2019
    Publication date: July 25, 2019
    Inventors: Chen-Chi KUO, Chia-Hsiu LIU, Yen-Cheng CHEN, Shao-Chung CHANG, Sin-Jhong SONG
  • Publication number: 20190227256
    Abstract: An optical element driving mechanism is provided. The optical element driving mechanism includes a carrier, a base, and a first driving assembly. The carrier holds an optical element with an optical axis. The carrier is movably connected to the base. The first driving assembly drives the carrier to move relative to the base. The first driving assembly includes a driving coil disposed on the carrier, and the direction of the winding axis of the driving coil is different from the direction of the optical axis. The carrier has an abutting surface, which faces and is in direct contact with the driving coil. The maximum size of the abutting surface is greater than the maximum size of the driving coil in the direction of the optical axis.
    Type: Application
    Filed: January 25, 2019
    Publication date: July 25, 2019
    Inventors: Chen-Chi KUO, Chia-Hsiu LIU, Yen-Cheng CHEN, Shao-Chung CHANG, Sin-Jhong SONG
  • Patent number: 10344383
    Abstract: In one or more embodiments, an apparatus for processing a wafer includes a ceramic wall, a metal wall and a frame. The ceramic wall defines a chamber for accommodating the wafer. The ceramic wall has a first surface defining a first opening. The metal wall surrounds the ceramic wall. The metal wall has a second surface defining a second opening adjacent to the first opening. The frame covers the second surface.
    Type: Grant
    Filed: August 3, 2017
    Date of Patent: July 9, 2019
    Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
    Inventors: Chuan-Yung Shih, Tai-Yuan Huang, Yu-Chi Wang, Chin-Feng Wang, Sing-Syuan Shiau, Chun-Wei Shih, Shao-Ci Huang, Huang-Hsien Chang, Yuan-Feng Chiang
  • Publication number: 20190163051
    Abstract: A method for forming a photomask is provided. The method includes forming a light blocking layer over a transparent substrate. The method includes forming a mask layer over the light blocking layer. The mask layer covers a first portion of the light blocking layer, and the first portion is over a second portion of the transparent substrate. The method includes removing the light blocking layer, which is not covered by the mask layer. The method includes removing the mask layer. The first portion of the light blocking layer is removed during removing the mask layer. The method includes removing the second portion of the transparent substrate to form a first recess in the transparent substrate. The method includes forming a first light blocking structure in the first recess.
    Type: Application
    Filed: July 26, 2018
    Publication date: May 30, 2019
    Inventors: Shih-Ming CHANG, Minfeng CHEN, Min-An YANG, Shao-Chi WEI
  • Patent number: D891504
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: July 28, 2020
    Assignee: TDK TAIWAN CORP.
    Inventors: Fu-Yuan Wu, Kun-Shih Lin, Shang-Yu Hsu, Yi-Ho Chen, Shih-Ting Huang, Shou-Jen Liu, Chien-Lun Huang, Yi-Hsin Nieh, Chen-Chi Kuo, Chia-Pin Hsu, Yu-Huai Liao, Shin-Hua Chen, Yu-Cheng Lin, Shao-Chung Chang, Kuo-Chun Kao, Chia-Hsiu Liu, Chao-Chun Chang, Yuan-Shih Liao
  • Patent number: D902981
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: November 24, 2020
    Assignee: TDK TAIWAN CORP.
    Inventors: Fu-Yuan Wu, Kun-Shih Lin, Shang-Yu Hsu, Yi-Ho Chen, Shih-Ting Huang, Shou-Jen Liu, Chien-Lun Huang, Yi-Hsin Nieh, Chen-Chi Kuo, Chia-Pin Hsu, Yu-Huai Liao, Shin-Hua Chen, Yu-Cheng Lin, Shao-Chung Chang, Kuo-Chun Kao, Chia-Hsiu Liu, Chao-Chun Chang, Yuan-Shih Liao
  • Patent number: D902982
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: November 24, 2020
    Assignee: TDK TAIWAN CORP.
    Inventors: Fu-Yuan Wu, Kun-Shih Lin, Shang-Yu Hsu, Yi-Ho Chen, Shih-Ting Huang, Shou-Jen Liu, Chien-Lun Huang, Yi-Hsin Nieh, Chen-Chi Kuo, Chia-Pin Hsu, Yu-Huai Liao, Shin-Hua Chen, Yu-Cheng Lin, Shao-Chung Chang, Kuo-Chun Kao, Chia-Hsiu Liu, Chao-Chun Chang, Yuan-Shih Liao