Abstract: A flexible mold has a mold body having a nanoimprinting microstructure and is gradually thickened from its periphery to the middle. Also, a resist spreading nanoimprinting method that integrates a soft mold into a dovetailed meal ring and then deforms it to form a point contact with a substrate before an imprinting process is followed and then convert a loading force into a specific distributed contact pressure for driving the resist flow by using an elastomer cushion pad with a pre-designed convex surface.

Abstract: The present invention is a flexible mold with variable thickness which is a mold body with nano-imprinting micro-structure, and the mold body is gradually thickened from its periphery to the middle. When the flexible mold with variable thickness of the present invention is subjected to a force or displaced, a larger amount of compression may be produced to cause a larger contact pressure between the micro-structure at the bottom of the mold body and the imprinted object, and to control the amount of deformation of the mold body upon stripping by the thickness difference of the mold body for overcoming the previous defect caused by the excessive draft angle or sharp pressure release.