Patents by Inventor Shao-Yen Chang

Shao-Yen Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240088023
    Abstract: An interconnect structure includes a dielectric layer, a first conductive feature, a hard mask layer, a conductive layer, and a capping layer. The first conductive feature is disposed in the dielectric layer. The hard mask layer is disposed on the first conductive feature. The conductive layer includes a first portion and a second portion, the first portion of the conductive layer is disposed over at least a first portion of the hard mask layer, and the second portion of the conductive layer is disposed over the dielectric layer. The hard mask layer and the conductive layer are formed by different materials. The capping layer is disposed on the dielectric layer and the conductive layer.
    Type: Application
    Filed: November 20, 2023
    Publication date: March 14, 2024
    Inventors: Shao-Kuan LEE, Kuang-Wei YANG, Cherng-Shiaw TSAI, Cheng-Chin LEE, Ting-Ya LO, Chi-Lin TENG, Hsin-Yen HUANG, Hsiao-Kang CHANG, Shau-Lin SHUE
  • Patent number: 11923243
    Abstract: A method for manufacturing a semiconductor structure includes preparing a dielectric structure formed with trenches respectively defined by lateral surfaces of the dielectric structure, forming spacer layers on the lateral surfaces, filling an electrically conductive material into the trenches to form electrically conductive features, selectively depositing a blocking layer on the dielectric structure, selectively depositing a dielectric material on the electrically conductive features to form a capping layer, removing the blocking layer and the dielectric structure to form recesses, forming sacrificial features in the recesses, forming a sustaining layer to cover the sacrificial features; and removing the sacrificial features to obtain the semiconductor structure formed with air gaps confined by the sustaining layer and the spacer layers.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: March 5, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsin-Yen Huang, Ting-Ya Lo, Shao-Kuan Lee, Chi-Lin Teng, Cheng-Chin Lee, Shau-Lin Shue, Hsiao-Kang Chang
  • Patent number: 11661480
    Abstract: A poly(amide-imide) is provided. The poly(amide-imide) is represented by formula (1), wherein R is a C6 aryl group, a C7-C8 aralkyl group, a C2-C6 alkoxyalkyl group, or a C3-C18 alkyl group; and 0.02?X?0.5.
    Type: Grant
    Filed: December 31, 2020
    Date of Patent: May 30, 2023
    Assignee: Taiwan Textile Research Institute
    Inventors: Shang-Chih Chou, Shao-Yen Chang, Chun-Hung Lin
  • Publication number: 20230127585
    Abstract: A method of preparing a thermoplastic composition is provided. The method includes the following steps. A polyetherimide or a polyphenylene sulfide is provided. A polyimide is provided, wherein the glass transition temperature of the polyimide is between 128° C. and 169° C., the 10% thermogravimetric loss temperature of the polyimide is between 490° C. and 534° C., and when the polyimide is dissolved in N-methyl-2-pyrrolidone and the solid content of the polyimide is 30 wt %, the viscosity of the polyimide is between 100 cP and 250 cP. A melt process is performed to mix the polyetherimide and the polyimide or mix the polyphenylene sulfide and the polyimide to form a thermoplastic composition. Further, a thermoplastic composition is also provided.
    Type: Application
    Filed: December 21, 2022
    Publication date: April 27, 2023
    Applicant: Taiwan Textile Research Institute
    Inventors: Shang-Chih Chou, Shao-Yen Chang, Chun-Hung Lin, Yuan-Pei Liao, Yi-Cang Lai
  • Patent number: 11572639
    Abstract: A fiber masterbatch including a polyetherimide, a polyethylene terephthalate, and a polyimide is provided. A glass transition temperature of the polyimide is between 140° C. and 170° C., a 10% thermogravimetric loss temperature of the polyimide is between 500° C. and 550° C., and when the polyimide is dissolved in N-methyl-2-pyrrolidone and a solid content of the polyimide is 15 wt %, a viscosity of the polyimide is between 80 cP and 230 cP. A melt spun fiber obtained by using the fiber masterbatch is also provided.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: February 7, 2023
    Assignee: Taiwan Textile Research Institute
    Inventors: Shang-Chih Chou, Shao-Yen Chang, Chun-Hung Lin, Yuan-Pei Liao, Yi-Cang Lai
  • Publication number: 20220178071
    Abstract: A non-woven film for electronic components is provided in the present disclosure. The non-woven film for electronic components includes a polyetherimide substrate and an aerogel. The aerogel is disposed on the polyetherimide substrate. The aerogel has a moisture content between 0.7% and 0.9% and a porosity between 85% and 95%.
    Type: Application
    Filed: December 2, 2021
    Publication date: June 9, 2022
    Inventors: Shao-Yen CHANG, Shang-Chih CHOU, Chun-Hung LIN
  • Publication number: 20210301426
    Abstract: A fiber masterbatch including a polyetherimide, a polyethylene terephthalate, and a polyimide is provided. A glass transition temperature of the polyimide is between 140° C. and 170° C., a 10% thermogravimetric loss temperature of the polyimide is between 500° C. and 550° C., and when the polyimide is dissolved in N-methyl-2-pyrrolidone and a solid content of the polyimide is 15 wt %, a viscosity of the polyimide is between 80 cP and 230 cP. A melt spun fiber obtained by using the fiber masterbatch is also provided.
    Type: Application
    Filed: September 29, 2020
    Publication date: September 30, 2021
    Applicant: Taiwan Textile Research Institute
    Inventors: Shang-Chih Chou, Shao-Yen Chang, Chun-Hung Lin, Yuan-Pei Liao, Yi-Cang Lai
  • Publication number: 20210122880
    Abstract: A poly(amide-imide) is provided. The poly(amide-imide) is represented by formula (1), wherein R is a C6 aryl group, a C7-C8 aralkyl group, a C2-C6 alkoxyalkyl group, or a C3-C18 alkyl group; and 0.02?X?0.5.
    Type: Application
    Filed: December 31, 2020
    Publication date: April 29, 2021
    Applicant: Taiwan Textile Research Institute
    Inventors: Shang-Chih Chou, Shao-Yen Chang, Chun-Hung Lin
  • Patent number: 10975202
    Abstract: A poly(amide-imide) is provided. The poly(amide-imide) is represented by formula (1), wherein R is a C6 aryl group, a C7-C8 aralkyl group, a C2-C6 alkoxyalkyl group, or a C3-C18 alkyl group; and 0.02?X?0.5.
    Type: Grant
    Filed: February 25, 2019
    Date of Patent: April 13, 2021
    Assignee: Taiwan Textile Research Institute
    Inventors: Shang-Chih Chou, Shao-Yen Chang, Chun-Hung Lin
  • Publication number: 20210102321
    Abstract: A meltblown nonwoven fabric is provided. The meltblown nonwoven fabric includes a plurality of meltblown fibers adhered to each other. The material of each of the meltblown fibers includes a polyetherimide and a polyimide, or the material of each of the meltblown fibers includes a polyphenylene sulfide and a polyimide, wherein the glass transition temperature of the polyimide is between 128° C. and 169° C., the 10% thermogravimetric loss temperature of the polyimide is between 490° C. and 534° C., and when the polyimide is dissolved in N-methyl-2-pyrrolidone and the solid content of the polyimide is 30 wt %, the viscosity of the polyimide is between 100 cP and 250 cP.
    Type: Application
    Filed: February 5, 2020
    Publication date: April 8, 2021
    Applicant: Taiwan Textile Research Institute
    Inventors: Shang-Chih Chou, Shao-Yen Chang, Chun-Hung Lin, Yuan-Pei Liao, Yi-Cang Lai
  • Publication number: 20210017382
    Abstract: A method of preparing a thermoplastic composition is provided. The method includes the following steps. A polyetherimide or a polyphenylene sulfide is provided. A polyimide is provided, wherein the glass transition temperature of the polyimide is between 128° C. and 169° C., the 10% thermogravimetric loss temperature of the polyimide is between 490° C. and 534° C., and when the polyimide is dissolved in N-methyl-2-pyrrolidone and the solid content of the polyimide is 30 wt %, the viscosity of the polyimide is between 100 cP and 250 cP. A melt process is performed to mix the polyetherimide and the polyimide or mix the polyphenylene sulfide and the polyimide to form a thermoplastic composition. Further, a thermoplastic composition is also provided.
    Type: Application
    Filed: September 12, 2019
    Publication date: January 21, 2021
    Applicant: Taiwan Textile Research Institute
    Inventors: Shang-Chih Chou, Shao-Yen Chang, Chun-Hung Lin, Yuan-Pei Liao, Yi-Cang Lai
  • Publication number: 20200055988
    Abstract: A poly(amide-imide) is provided. The poly(amide-imide) is represented by formula (1), wherein R is a C6 aryl group, a C7-C8 aralkyl group, a C2-C6 alkoxyalkyl group, or a C3-C18 alkyl group; and 0.02?X?0.5.
    Type: Application
    Filed: February 25, 2019
    Publication date: February 20, 2020
    Applicant: Taiwan Textile Research Institute
    Inventors: Shang-Chih Chou, Shao-Yen Chang, Chun-Hung Lin