Abstract: A method for manufacturing a semiconductor device is described. The method includes the following steps. A low-dimensional material (LDM) layer is formed on a semiconductor substrate, wherein the LDM layer includes sublayers stacked upon one another. A plasma treatment is performed to the LDM layer to transform at least one sublayer into an oxide layer, wherein the plasma treatment is performed under a temperature equivalent to or lower than about 80 degrees Celsius. At least one electrode is disposed over the oxide layer.

Abstract: A clamping and positioning device includes a base, a rotary member, a moving assembly and an elastic member. The rotary member is rotatably disposed on the base and includes a stopping surface facing the base. The moving assembly includes a moving member movably disposed on the base to have a first and a second position. When being at the first position, the moving member is pressed against the rotary member to allow the stopping surface to apply a normal force to the base; when being at the second position, a gap is formed between the moving member and the rotary member so the normal force applied by the stopping surface of the rotary member is released from the base. The elastic member has two ends connected to the base and the moving member, respectively. The elastic member normally causes the moving member to be at the first position.

Abstract: The present disclosure provides a hydrostatic bearing monitoring system and a hydrostatic bearing monitoring system method. A sensor detects a state parameter of a hydrostatic bearing device. A computing unit establishes a performance prediction model according to the state parameter, and compares the performance prediction model with reliability experimental data, so as to obtain variation of performance of the hydrostatic bearing device and provide a warning function.

Abstract: A clamping and positioning device includes a base, a rotary member, a moving assembly and an elastic member. The rotary member is rotatably disposed on the base and includes a stopping surface facing the base. The moving assembly includes a moving member movably disposed on the base to have a first and a second position. When being at the first position, the moving member is pressed against the rotary member to allow the stopping surface to apply a normal force to the base; when being at the second position, a gap is formed between the moving member and the rotary member so the normal force applied by the stopping surface of the rotary member is released from the base. The elastic member has two ends connected to the base and the moving member, respectively. The elastic member normally causes the moving member to be at the first position.

Abstract: A hydrostatic rail guide includes a guide rail, a guide carriage, a hydrostatic supply device, a measurement device and a controller. The guide carriage is hydrostatically mounted on the guide rail and has a hydrostatic channel filled with oil. The oil keeps the guide carriage and the guide rail at a gap. The hydrostatic supply device is adapted for supplying the oil to the hydrostatic channel and adjusting the pressure of the oil. The measurement device is installed on the guide carriage and adapted for detecting the gap between the guide carriage and the guide rail and for producing a distance signal of the measured gap. The controller is connected to the hydrostatic supply device and the measurement device. The controller is adapted for controlling the hydrostatic supply device, based on the distance signal, in order to adjust the hydrostatic pressure of the oil after being pressurized.

Abstract: The present invention relates to a tool change device, which comprises: a base, being arranged for enabling the same to move reciprocatingly between a first position and a second position; a guiding block, formed with a first engaging part and a second engaging part that are serially connected to each other; a lever, formed with a pivot point, a first end and a second end that are arranged opposite to each other while allowing the pivot point to be arranged therebetween; and a spindle, configured with a drive mechanism to be used for connecting the spindle to a tool, being disposed mounting on the base for allowing the same to move in synchronization with the reciprocating movement of the base; wherein, the lever is pivotally coupled to the base by the pivot point thereof for enabling the lever to move in synchronization with the reciprocating movement of the base.

Abstract: A hydrostatic rail guide includes a guide rail, a guide carriage, a hydrostatic supply device, a measurement device and a controller. The guide carriage is hydrostatically mounted on the guide rail and has a hydrostatic channel filled with oil. The oil keeps the guide carriage and the guide rail at a gap. The hydrostatic supply device is adapted for supplying the oil to the hydrostatic channel and adjusting the pressure of the oil. The measurement device is installed on the guide carriage and adapted for detecting the gap between the guide carriage and the guide rail and for producing a distance signal of the measured gap. The controller is connected to the hydrostatic supply device and the measurement device. The controller is adapted for controlling the hydrostatic supply device, based on the distance signal, in order to adjust the hydrostatic pressure of the oil after being pressurized.