Patents by Inventor Shaofeng Chen
Shaofeng Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12601363Abstract: A ventilation and heat dissipation apparatus of a wind-assisted rotor includes a cylinder, a top cover, and a rain shielding plate. The top cover is disposed at the top of the cylinder and covers the top of the cylinder, and the top cover is provided with a manhole communicating with an inner cavity of the cylinder. The rain shielding plate is disposed above the manhole and covers the manhole, and the rain shielding plate and the top cover are spaced apart to form a heat dissipation gap that communicates with an external atmosphere.Type: GrantFiled: March 12, 2021Date of Patent: April 14, 2026Assignee: CSIC Shanghai Marine Energy Saving Technology Development Co., LTDInventors: Fengshan Guo, Youhua Wu, Yuzhu Zhu, Zhenyu Huang, Zan Wu, Haochao Xia, Shaofeng Chen, Lu Zhao
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Patent number: 12577638Abstract: A substrate handling chamber body is formed from a castable aluminum alloy including a manganese (Mn) constituent and an iron (Fe) constituent. The castable aluminum alloy has a manganese (Mn) constituent-to-iron (Fe) constituent ratio that between about 1.125 and about 1.525 to limit microporosity and shrinkage porosity within the castable aluminum alloy forming the substrate handling chamber body. Semiconductor processing systems and methods of making substrate handling chamber bodies for semiconductor processing systems are also described.Type: GrantFiled: January 23, 2023Date of Patent: March 17, 2026Assignee: ASM IP Holding B.V.Inventors: Joaquin Aguilar Santillan, Hong Gao, Shanker Kuttath, Shaofeng Chen, Gary Urban Keppers, Felix Rabinovich
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Patent number: 12497697Abstract: A substrate support assembly and processing chamber having the same are disclosed herein. In one embodiment, a substrate support assembly is provided that includes a body. The body has a center, an outer perimeter connecting a substrate support surface and a backside surface. The body additionally has a pocket disposed on the substrate support surface at the center and a lip disposed between the pocket and the outer perimeter. A layer is formed in the pocket of the substrate support surface. A plurality of discrete islands are disposed in the layer, wherein the discrete islands are disposed about a center line extending perpendicular from the substrate support surface.Type: GrantFiled: October 8, 2021Date of Patent: December 16, 2025Assignee: Applied Materials, Inc.Inventors: Zhepeng Cong, Nyi Oo Myo, Hui Chen, Huy D. Nguyen, Shaofeng Chen, Xinning Luan, Kirk Allen Fisher, Aimee S. Erhardt, Shawn Joseph Bonham, Philip Michael Amos, James M. Amos
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Patent number: 12471679Abstract: A lacing device, including a main body, a winding wheel, an upper cover, and a ratchet mechanism. The winding wheel is rotatably arranged in the main body; the upper cover and the winding wheel can be connected or separated; the upper cover includes a cover body and a side wall arranged around the circumference of the cover body; there is a first meshing surface on an inner side surface of the side wall; two or more slide channels are formed in an upper end surface of the main body; the ratchet mechanism includes two or more sliding blocks sliding along the slide channels and an elastic member used for pushing the sliding blocks to slide towards the outside of the main body; and each sliding block is provided with a first ratchet tooth fitted with the first meshing surface to achieve engagement.Type: GrantFiled: June 13, 2025Date of Patent: November 18, 2025Assignee: SHISHI SENKE INTELLIGENT TECHNOLOGY CO., LTD.Inventors: Shanpao Wang, Shaofeng Chen, Huayun Yang
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Publication number: 20250302153Abstract: A lacing device, including a main body, a winding wheel, an upper cover, and a ratchet mechanism. The winding wheel is rotatably arranged in the main body; the upper cover and the winding wheel can be connected or separated; the upper cover includes a cover body and a side wall arranged around the circumference of the cover body; there is a first meshing surface on an inner side surface of the side wall; two or more slide channels are formed in an upper end surface of the main body; the ratchet mechanism includes two or more sliding blocks sliding along the slide channels and an elastic member used for pushing the sliding blocks to slide towards the outside of the main body; and each sliding block is provided with a first ratchet tooth fitted with the first meshing surface to achieve engagement.Type: ApplicationFiled: June 13, 2025Publication date: October 2, 2025Applicant: SHISHI SENKE INTELLIGENT TECHNOLOGY CO., LTD.Inventors: Shanpao WANG, Shaofeng CHEN, Huayun YANG
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Publication number: 20250105705Abstract: A motor arrangement includes a stator body, a rotor body, a permanent magnet and a fluid conduit. The stator body defines a rotary axis and has a bore. The rotor body is supported for rotary movement about the rotary axis in the bore and is separated from the stator body by a gap. The permanent magnet is arranged within the gap and is fixed to one of the stator body and the rotor body. The fluid conduit is supported above the gap and has an outlet in fluid communication with the gap to separate the permanent magnet from an infiltrant fluid resident within an atmosphere above of the gap by issuing a barrier fluid into the atmosphere above the gap and gravimetrically flowing the barrier fluid into the gap. Semiconductor processing systems, barrier fluid kits, and methods of purging motor arrangements are also described.Type: ApplicationFiled: September 23, 2024Publication date: March 27, 2025Inventors: Mario Gonzalez, Joseph Kraus, Dongyang Chen, Shaofeng Chen
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Publication number: 20240333667Abstract: The present disclosure provides an information processing method, an apparatus, an electronic device, and a storage medium. By establishing a session group including a first identity user and a second identity user in response to the first identity user satisfying a preset first condition, pushing a first session message for the first identity user within the session group according to a preset process node, and displaying a first information editing interface for the first identity user, in response to a first preset operation of the first identity user for the first session message, the present disclosure can achieve automatic group creation, automatic reminder through group session, and entry into a relevant information editing interface through group session, thereby achieving efficient distribution and processing of information.Type: ApplicationFiled: March 27, 2024Publication date: October 3, 2024Inventors: Jiayi FAN, Haoyu WANG, Yilin HUANGFU, Jinhong WANG, Yiqi WANG, Guoxing CUI, Ning MA, Shaofeng CHEN
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Publication number: 20240304492Abstract: A susceptor for use in a processing chamber for supporting a wafer includes a susceptor substrate having a front side and a back side opposite the front side, and a coating layer deposited on the susceptor substrate. The front side has a pocket configured to hold a wafer to be processed in a processing chamber, the pocket being textured with a first pattern. The back side is textured with a second pattern.Type: ApplicationFiled: May 17, 2024Publication date: September 12, 2024Inventors: Hui CHEN, Xinning LUAN, Kirk Allen FISHER, Shawn Joseph BONHAM, Aimee S. ERHARDT, Zhepeng CONG, Shaofeng CHEN, Schubert S. CHU, James M. AMOS, Philip Michael AMOS, John NEWMAN
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Publication number: 20240190534Abstract: An air supply system applicable to an air layer drag reduction ship includes an air tank and a cooling assembly. The air tank is provided with an air outlet pipeline and multiple air inlet pipelines. The air outlet pipeline and the air inlet pipelines are each provided with a first monitoring assembly and a first remote control valve. The cooling assembly is disposed inside the air tank and includes a liquid inlet pipe and a liquid outlet pipe, where the liquid outlet pipe is provided with a second monitoring assembly, the liquid inlet pipe is provided with a second remote control valve, and the second monitoring assembly and the first monitoring assembly are communicatively connected to the second remote control valve. The air supply system is capable of supplying stable and low-temperature air.Type: ApplicationFiled: March 4, 2021Publication date: June 13, 2024Applicant: CSSC Shanghai Marine Energy Saving Technology Co., Ltd.Inventors: Haochao Xia, Lijin Gao, Shaofeng Chen, Qiuqin Yun, Zan Wu, Guofu Huang, Shuquan Huang
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Publication number: 20240140560Abstract: A pressure stabilizing cavum includes multiple PE pipes and a backing plate. The multiple PE pipes are inserted through a longitudinal keel of the ship. Each PE pipe is provided with a first opening. Both two sides of the each PE pipe in the width direction of the first opening are connected to a hull bottom plate of the ship to form a pressure stabilizing cavum. The backing plate is located between the each PE pipe and the hull bottom plate and is sealingly connected to the each PE pipe and the hull bottom plate. The backing plate is provided with a first through hole, and the hull bottom plate is provided with a second through hole communicating with the first through hole, and the pressure stabilizing cavum communicates with the outside of the ship through the first through hole and the second through hole.Type: ApplicationFiled: March 4, 2021Publication date: May 2, 2024Applicant: CSSC Shanghai Marine Energy Saving Technology Co., Ltd.Inventors: Lijin Gao, Shaofeng Chen, Guofu Huang, Qiuqin Yun, Haochao Xia, Zhouguang Yan, Zan Wu, Leiqiang Chen, Shuquan Huang
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Patent number: 11932950Abstract: A method includes machining a raw surface of a metal component to remove first native oxide from a metal base of the metal component to generate an as-machined surface of the metal component. A second native oxide is formed on the metal base of the as-machined surface of the metal component subsequent to the machining. The method further includes, subsequent to the machining, performing operations to generate a finished surface of the metal component. The operations include a surface machining of the as-machined surface of the metal component to remove the second native oxide.Type: GrantFiled: January 13, 2023Date of Patent: March 19, 2024Assignee: Applied Materials, Inc.Inventors: Yuanhong Guo, Sheng Michael Guo, Marek W. Radko, Steven Victor Sansoni, Nagendra Madiwal, Matvey Farber, Pingping Gou, Song-Moon Suh, Jeffrey C. Hudgens, Yuji Murayama, Anurag Bansal, Shaofeng Chen, Michael Kuchar
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Publication number: 20230407874Abstract: A ventilation and heat dissipation apparatus of a wind-assisted rotor includes a cylinder (2), a top cover (3), and a rain shielding plate (4). The top cover (3) is disposed at the top of the cylinder (2) and covers the top of the cylinder (2), and the top cover (3) is provided with a manhole (1) communicating with an inner cavity of the cylinder (2). The rain shielding plate (4) is disposed above the manhole (1) and covers the manhole (1), and the rain shielding plate (4) and the top cover (3) are spaced apart to form a heat dissipation gap that communicates with an external atmosphere.Type: ApplicationFiled: March 12, 2021Publication date: December 21, 2023Applicant: CSIC Shanghai Marine Energy Saving Technology Development Co., LTDInventors: Fengshan Guo, Youhua Wu, Yuzhu Zhu, Zhenyu Huang, Zan Wu, Haochao Xia, Shaofeng Chen, Lu Zhao
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Patent number: 11751636Abstract: A rotary push-pull rope retractor includes a top cover, a follower, a seat, a control member and a base. The seat is fixedly installed on the base. An upper surface of the seat is provided with an elastic member and a pawl connected with the elastic member. The follower includes a ratchet and a rope bin. The pawl is located on one side of the ratchet and engaged with the ratchet. The control member is slidably arranged on the upper surface of the seat, and the control member can push the pawl to move away from the ratchet and compress the elastic member to separate the pawl from the ratchet, so as to switch the meshing mode or the free mode of the rotary push-pull rope retractor. The top cover is arranged above the seat, and the top cover and the follower are connected in linkage.Type: GrantFiled: April 14, 2022Date of Patent: September 12, 2023Assignees: Shishi Senke Intelligent Technology Co., Ltd., Dongguan Yichuang Information Technology Co., Ltd.Inventors: Shanpao Wang, Wendong Li, Hongchao Li, Chaoqun Hong, Jinlong Cai, Kunliang Tan, Shaofeng Chen, Jianming Cai, Weidong Xu
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Publication number: 20230235428Abstract: A substrate handling chamber body is formed from a castable aluminum alloy including a manganese (Mn) constituent and an iron (Fe) constituent. The castable aluminum alloy has a manganese (Mn) constituent-to-iron (Fe) constituent ratio that between about 1.125 and about 1.525 to limit microporosity and shrinkage porosity within the castable aluminum alloy forming the substrate handling chamber body. Semiconductor processing systems and methods of making substrate handling chamber bodies for semiconductor processing systems are also described.Type: ApplicationFiled: January 23, 2023Publication date: July 27, 2023Inventors: Joaquin Aguilar Santillan, Hong Gao, Shanker Kuttath, Shaofeng Chen, Gary Urban Keppers, Felix Rabinovich
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Publication number: 20230151497Abstract: A method includes machining a raw surface of a metal component to remove first native oxide from a metal base of the metal component to generate an as-machined surface of the metal component. A second native oxide is formed on the metal base of the as-machined surface of the metal component subsequent to the machining. The method further includes, subsequent to the machining, performing operations to generate a finished surface of the metal component. The operations include a surface machining of the as-machined surface of the metal component to remove the second native oxide.Type: ApplicationFiled: January 13, 2023Publication date: May 18, 2023Inventors: Yuanhong Guo, Sheng Michael Guo, Marek W. Radko, Steven Victor Sansoni, Nagendra Madiwal, Matvey Farber, Pingping Gou, Song-Moon Suh, Jeffrey C. Hudgens, Yuji Murayama, Anurag Bansal, Shaofeng Chen, Michael Kuchar
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Publication number: 20230114751Abstract: A substrate support assembly and processing chamber having the same are disclosed herein. In one embodiment, a substrate support assembly is provided that includes a body. The body has a center, an outer perimeter connecting a substrate support surface and a backside surface. The body additionally has a pocket disposed on the substrate support surface at the center and a lip disposed between the pocket and the outer perimeter. A layer is formed in the pocket of the substrate support surface. A plurality of discreet islands are disposed in the layer, wherein the discreet islands are disposed about a center line extending perpendicular from the substrate support surface.Type: ApplicationFiled: October 8, 2021Publication date: April 13, 2023Inventors: Zhepeng CONG, Nyi Oo MYO, Hui CHEN, Huy D. NGUYEN, Shaofeng CHEN, Xinning LUAN, Kirk Allen FISHER, Aimee S. ERHARDT, Shawn Joseph BONHAM, Philip Michael AMOS, James M. AMOS
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Publication number: 20230014996Abstract: A rotary push-pull rope retractor includes a top cover, a follower, a seat, a control member and a base. The seat is fixedly installed on the base. An upper surface of the seat is provided with an elastic member and a pawl connected with the elastic member. The follower includes a ratchet and a rope bin. The pawl is located on one side of the ratchet and engaged with the ratchet. The control member is slidably arranged on the upper surface of the seat, and the control member can push the pawl to move away from the ratchet and compress the elastic member to separate the pawl from the ratchet, so as to switch the meshing mode or the free mode of the rotary push-pull rope retractor. The top cover is arranged above the seat, and the top cover and the follower are connected in linkage.Type: ApplicationFiled: April 14, 2022Publication date: January 19, 2023Applicants: SHISHI SENKE INTELLIGENT TECHNOLOGY CO., LTD., Dongguan Yichuang Information Technology Co., Ltd.Inventors: Shanpao WANG, Wendong LI, Hongchao LI, Chaoqun HONG, Jinlong CAI, Kunliang TAN, Shaofeng CHEN, Jianming CAI, Weidong XU
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Patent number: 11555250Abstract: A method includes receiving a metal component including a raw surface that includes a metal base, a first native oxide disposed on the metal base, and hydrocarbons disposed on the metal base. The method further includes machining the raw surface of the metal component to remove the first native oxide and a first portion of the hydrocarbons from the metal base. The machining generates an as-machined surface of the metal component including the metal base without the first native oxide and without the first portion of the hydrocarbons. The method further includes performing a surface machining of the as-machined surface of the metal component to remove a second portion of the hydrocarbons. The method further includes surface treating the metal component to remove a third portion of the hydrocarbons. The method further includes performing a cleaning of the metal component and drying the metal component.Type: GrantFiled: April 27, 2021Date of Patent: January 17, 2023Assignee: Applied Materials, Inc.Inventors: Yuanhong Guo, Sheng Michael Guo, Marek W Radko, Steven Victor Sansoni, Nagendra Madiwal, Matvey Farber, Pingping Gou, Song-Moon Suh, Jeffrey C. Hudgens, Yuji Murayama, Anurag Bansal, Shaofeng Chen, Michael Kuchar
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Patent number: 11302520Abstract: Implementations of the disclosure generally provide an improved pedestal heater for a processing chamber. The pedestal heater includes a temperature-controlled plate having a first surface and a second surface opposing the first surface. The temperature-controlled plate includes an inner zone comprising a first set of heating elements, an outer zone comprising a second set of heating elements, the outer zone surrounding the inner zone, and a continuous thermal choke disposed between the inner zone and the outer zone, and a substrate receiving plate having a first surface and a second surface opposing the first surface, the second surface of the substrate receiving plate is coupled to the first surface of the temperature-controlled plate. The continuous thermal choke enables a very small temperature gradient to be created and manipulated between the inner zone and the outer zone, allowing center-fast or edge-fast etching profile to achieve on a surface of the substrate.Type: GrantFiled: June 23, 2015Date of Patent: April 12, 2022Assignee: APPLIED MATERIALS, INC.Inventors: Tien Fak Tan, Dmitry Lubomirsky, Kirby H. Floyd, Son T. Nguyen, David Palagashvili, Alexander Tam, Shaofeng Chen
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Publication number: 20220076988Abstract: A susceptor for use in a processing chamber for supporting a wafer includes a susceptor substrate having a front side and a back side opposite the front side, and a coating layer deposited on the susceptor substrate. The front side has a pocket configured to hold a wafer to be processed in a processing chamber, the pocket being textured with a first pattern. The back side is textured with a second pattern.Type: ApplicationFiled: March 4, 2021Publication date: March 10, 2022Inventors: Hui CHEN, Xinning LUAN, Kirk Allen FISHER, Shawn Joseph BONHAM, Aimee S. ERHARDT, Zhepeng CONG, Shaofeng CHEN, Schubert S. CHU, James M. AMOS, Philip Michael AMOS, John NEWMAN