Patents by Inventor Shao Hua Liu

Shao Hua Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Highly efficient automatic particle cleaner method for EUV systems
    Patent number: 11953839
    Abstract: In a method of cleaning a lithography system, during idle mode, a stream of air is directed, through a first opening, into a chamber of a wafer table of an EUV lithography system. One or more particles is extracted by the directed stream of air from surfaces of one or more wafer chucks in the chamber of the wafer table. The stream of air and the extracted one or more particle are drawn, through a second opening, out of the chamber of the wafer table.
    Type: Grant
    Filed: December 5, 2022
    Date of Patent: April 9, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Yu Tu, Shao-Hua Wang, Yen-Hao Liu, Chueh-Chi Kuo, Li-Jui Chen, Heng-Hsin Liu
  • Carrier for rolls of metal plate
    Patent number: 6536591
    Abstract: A carrier (10) for carrying a roll of metal plate includes a frame (20), a support plate (40), a shield (60), and a flexible cushion (80). The frame includes a base (22) and a beam (24). The support plate is attached to the base and has an arcuate outer surface, for providing maximum contact area between the carrier and a center hole of the roll. The shield is attached to the beam, for preventing a side of the roll from being damaged by the beam. The cushion is attached to the support plate, for preventing surface damage to the roll. A plurality of ribs (44) is welded to the base, for reinforcing the support plate.
    Type: Grant
    Filed: December 20, 2000
    Date of Patent: March 25, 2003
    Assignee: Hon Hai Precision Ind. Co., Ltd.
    Inventors: Kun Jung Huang, Shao Hua Liu
  • Carrier for rolls of metal plate
    Publication number: 20020045025
    Abstract: A carrier (10) for carrying a roll of metal plate includes a frame (20), a support plate (40), a shield (60), and a flexible cushion (80). The frame includes a base (22) and a beam (24). The support plate is attached to the base and has an arcuate outer surface, for providing maximum contact area between the carrier and a center hole of the roll. The shield is attached to the beam, for preventing a side of the roll from being damaged by the beam. The cushion is attached to the support plate, for preventing surface damage to the roll. A plurality of ribs (44) is welded to the base, for reinforcing the support plate.
    Type: Application
    Filed: December 20, 2000
    Publication date: April 18, 2002
    Inventors: Kun Jung Huang, Shao Hua Liu
  • Insect repellent containing 1-dodecene
    Patent number: 5030660
    Abstract: An insect repellent composition containing, as an active ingredient, 1-dodecene is described. When applied to an insect or a habitat thereof, the composition is effective in deterring insects.
    Type: Grant
    Filed: November 1, 1989
    Date of Patent: July 9, 1991
    Assignee: Wisconsin Alumni Research Foundation
    Inventors: Dale M. Norris, Shao-Hua Liu