Abstract: Systems for sequencing biopolymers and methods of manufacturing the systems are disclosed. In one example, such a system may include an application specific integrated circuit (ASIC) layer, a post array layer beneath the AISC layer, and a nanopore layer above the ASIC layer. The ASIC layer is formed by building active circuitry on a front side of a semiconductor wafer and polishing a back side of the semiconductor wafer. The post array layer is formed by etching a front side of a support substrate and the post array layer provides mechanical support to the ASIC layer. The nanopore layer contains membrane and nanopores. The membrane inhibits passage of water-soluble molecules and the nanopores permit passage of water-soluble molecules. In some embodiments, the system may have short through-substrate vias extending through the ASIC layer. In some embodiments, wafer bonding processes may be used when fabricating the system.

Abstract: One example of a flow cell includes a base support and a multi-layer stack positioned over the base support. The multi-layer stack includes a resin layer positioned over the base support; and a hydrophobic layer positioned over the resin layer. A depression is defined in the multi-layer stack through the hydrophobic material and through a portion of the resin.

Abstract: Devices for sequencing biopolymers, methods of manufacturing the devices, and methods of using the devices are disclosed. In one example, such a device has a nanopore and a horizontal nanochannel. In some embodiments, the horizontal nanochannel may take a tortuous path. In some embodiments, such a device includes gas or air bubble generators or pressure pulse generators to block or unblock the horizontal nanochannel.