Abstract: The invention in one aspect is an optical modulator which includes a waveguide region of semiconductor material. In order to achieve a gradual, essentially linear transfer function, the bandgap of the waveguide region is graded along the direction of light propogation or perpendicular thereto. In accordance with another aspect, the invention is an electroabsorption modulated laser where the portion of the waveguide region defining the modulator has a graded bandgap. In accordance with a method aspect, the waveguide region of the modulator is grown using a mask having a varying width to achieve the graded bandgap.

Abstract: A method of fabricating an expanded beam optical waveguide device (e.g., a laser), comprises the steps of (a) forming a first semiconductor waveguide region having first and second sections of different thickness and an intermediate vertical taper section of varying thickness coupling the first and second sections to one another, the first waveguide region being effective to expand the size of the beam as it propagates from the first section to the second section, (b) forming a second semiconductor region (e.g., a laser active region) on the first waveguide region, (c) etching the second region so as to form an essentially vertical first surface of length A-B which extends obliquely across the propagation axis of the device, (d) forming a third semiconductor region (e.g.