Patents by Inventor Shashank Sharma

Shashank Sharma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11223756
    Abstract: An apparatus includes a lens assembly that includes at least one lens that defines an optical axis, a lens holder coupled to the lens assembly, a substrate, an image sensor disposed on the substrate, and an actuator coupled between the lens holder and the substrate and configured to adjust a position of the substrate relative to the lens assembly to reposition the image sensor along the optical axis. The apparatus also includes a position sensor that includes a magnet and a magnetic field sensor. The position sensor is coupled to the substrate and the lens holder. The magnetic field sensor is configured to generate magnetic field data indicating a position of the substrate relative to the lens holder. The apparatus additionally includes circuitry configured to control the actuator based on the magnetic field data to place the image sensor within a depth of focus of the lens assembly.
    Type: Grant
    Filed: December 3, 2019
    Date of Patent: January 11, 2022
    Assignee: Waymo LLC
    Inventor: Shashank Sharma
  • Patent number: 11223766
    Abstract: Various embodiments include a camera voice coil motor (VCM) actuator configured to shift an image sensor along multiple axes. Some embodiments include a magnet and coil arrangement. Some embodiments include a position sensing arrangement. Some embodiments include a flexure arrangement. Some embodiments include a coil structure and coil carrier assembly.
    Type: Grant
    Filed: December 4, 2020
    Date of Patent: January 11, 2022
    Assignee: Apple Inc.
    Inventors: Shashank Sharma, Scott W. Miller
  • Publication number: 20220005704
    Abstract: Methods and apparatuses for processing substrates, such as during metal silicide applications, are provided. In one or more embodiments, a method of processing a substrate includes depositing an epitaxial layer on the substrate, depositing a metal silicide seed layer on the epitaxial layer, and exposing the metal silicide seed layer to a nitridation process to produce a metal silicide nitride layer from at least a portion of the metal silicide seed layer. The method also includes depositing a metal silicide bulk layer on the metal silicide nitride layer and forming or depositing a nitride capping layer on the metal silicide bulk layer, where the nitride capping layer contains a metal nitride, a silicon nitride, a metal silicide nitride, or a combination thereof.
    Type: Application
    Filed: September 17, 2021
    Publication date: January 6, 2022
    Inventors: Xuebin LI, Wei LIU, Gaurav THAREJA, Shashank SHARMA, Patricia M. LIU, Schubert CHU
  • Publication number: 20220005705
    Abstract: Methods and apparatuses for processing substrates, such as during metal silicide applications, are provided. In one or more embodiments, a method of processing a substrate includes depositing an epitaxial layer on the substrate, depositing a metal silicide seed layer on the epitaxial layer, and exposing the metal silicide seed layer to a nitridation process to produce a metal silicide nitride layer from at least a portion of the metal silicide seed layer. The method also includes depositing a metal silicide bulk layer on the metal silicide nitride layer and forming or depositing a nitride capping layer on the metal silicide bulk layer, where the nitride capping layer contains a metal nitride, a silicon nitride, a metal silicide nitride, or a combination thereof.
    Type: Application
    Filed: September 17, 2021
    Publication date: January 6, 2022
    Inventors: Xuebin LI, Wei LIU, Gaurav THAREJA, Shashank SHARMA, Patricia M. LIU, Schubert CHU
  • Publication number: 20210409604
    Abstract: Various embodiments include a camera with image sensor shifting capabilities and a flexure arrangement. In various embodiments, the flexure arrangement may include an upper flexure and a lower flexure. The upper flexure may include a suspension wire that extends between two sheets. The lower flexure may include one or more flexure arms that connect a moveable platform to a stationary platform.
    Type: Application
    Filed: September 10, 2021
    Publication date: December 30, 2021
    Applicant: Apple Inc.
    Inventor: Shashank Sharma
  • Publication number: 20210385387
    Abstract: Some embodiments include a camera system having a first camera unit and a second camera unit. The first camera unit may include a first actuator. The second camera unit may include a second actuator. In some embodiments, the first actuator may move one or more components of the first camera unit to provide autofocus and/or optical image stabilization functionality to the first camera unit. In some embodiments, the second actuator may move one or more components of the second camera unit to provide autofocus and/or optical image stabilization functionality to the second camera unit. In some examples, the first camera unit may be configured to capture a first image of a first visual field. The second camera unit may be configured to capture, simultaneously with the first camera unit capturing the first image, a second image of a second visual field.
    Type: Application
    Filed: August 20, 2021
    Publication date: December 9, 2021
    Applicant: Apple Inc.
    Inventors: Shashank Sharma, Scott W. Miller, Aurelien R. Hubert
  • Publication number: 20210373279
    Abstract: Various embodiments include a camera with folded optics and lens shifting capabilities. In some examples, a folded optics arrangement of the camera may include one or more lens elements and light path folding elements (e.g., prisms). Some embodiments include voice coil motor (VCM) actuator arrangements, carrier arrangements, and/or suspension arrangements to provide autofocus (AF) and/or optical image stabilization (OIS) movement. Furthermore, some embodiments include position sensor arrangements for position sensing with respect to AF and/or OIS movement.
    Type: Application
    Filed: August 16, 2021
    Publication date: December 2, 2021
    Applicant: Apple Inc.
    Inventors: Nicholas D. Smyth, Alfred N. Mireault, Scott W. Miller, Shashank Sharma
  • Publication number: 20210360147
    Abstract: Some embodiments include a camera voice coil motor (VCM) actuator that includes an additive coil structure for shifting a lens along one or multiple axes. The additive coil structure may include a base portion configured to couple with a lens carrier and at least partially surround a perimeter of the lens carrier. In various examples, the additive coil structure may include folded portions that individually include a respective coil that is located proximate a respective magnet. According to various embodiments, the additive coil structure may be formed using an additive process.
    Type: Application
    Filed: July 30, 2021
    Publication date: November 18, 2021
    Applicant: Apple Inc.
    Inventors: Douglas S. Brodie, Aurelien R. Hubert, Scott W. Miller, Shashank Sharma
  • Patent number: 11152221
    Abstract: Methods and apparatuses for processing substrates, such as during metal silicide applications, are provided. In one or more embodiments, a method of processing a substrate includes depositing an epitaxial layer on the substrate, depositing a metal silicide seed layer on the epitaxial layer, and exposing the metal silicide seed layer to a nitridation process to produce a metal silicide nitride layer from at least a portion of the metal silicide seed layer. The method also includes depositing a metal silicide bulk layer on the metal silicide nitride layer and forming or depositing a nitride capping layer on the metal silicide bulk layer, where the nitride capping layer contains a metal nitride, a silicon nitride, a metal silicide nitride, or a combination thereof.
    Type: Grant
    Filed: February 7, 2020
    Date of Patent: October 19, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Xuebin Li, Wei Liu, Gaurav Thareja, Shashank Sharma, Patricia M. Liu, Schubert Chu
  • Publication number: 20210318593
    Abstract: Various embodiments include a camera with a voice coil motor (VCM) actuator assembly to provide autofocus (AF) and/or optical image stabilization (OIS) movement. The VCM actuator assembly is configured to move an image sensor of the camera in three dimensions (e.g. X, Y, and Z) to provide the AF and/or OIS movements. The VCM actuator assembly is asymmetrical and includes an at least partially open side that allows an optical assembly of the camera to pass through the open side of the VCM actuator. In some embodiments, the optical assembly is part of a folded optics arrangement of the camera that includes one or more prisms/and or lenses.
    Type: Application
    Filed: June 25, 2021
    Publication date: October 14, 2021
    Applicant: Apple Inc.
    Inventor: Shashank Sharma
  • Patent number: 11122205
    Abstract: Various embodiments include a camera with image sensor shifting capabilities and a flexure arrangement. In various embodiments, the flexure arrangement may include an upper flexure and a lower flexure. The upper flexure may include a suspension wire that extends between two sheets. The lower flexure may include one or more flexure arms that connect a moveable platform to a stationary platform.
    Type: Grant
    Filed: September 6, 2019
    Date of Patent: September 14, 2021
    Assignee: Apple Inc.
    Inventor: Shashank Sharma
  • Publication number: 20210280428
    Abstract: The present disclosure provides systems and methods for processing channel structures of substrates that include positioning the substrate in a first processing chamber having a first processing volume. The substrate includes a channel structure with high aspect ratio features having aspect ratios greater than about 20:1. The method includes forming a silicon-containing layer over the channel structure to a hydrogen-or-deuterium plasma in the first processing volume at a flow rate of about 10 sccm to about 5000 sccm. The substrate is maintained at a temperature of about 100° C. to about 1100° C. during the exposing, the exposing forming a nucleated substrate. Subsequent to the exposing a thermal anneal operation is performed on the substrate.
    Type: Application
    Filed: February 12, 2021
    Publication date: September 9, 2021
    Inventors: Xinming ZHANG, Abhilash J. MAYUR, Shashank SHARMA, Norman L. TAM, Matthew SPULLER
  • Publication number: 20210280418
    Abstract: The present disclosure provides systems and methods for processing channel structures of substrates that include positioning the substrate in a first processing chamber having a first processing volume being in fluid communication with a plasma source. The substrate can include a channel structure with high aspect ratio features having aspect ratios greater than about 20:1. The method can also include forming an oxide cap layer over a silicon-containing layer of the channel structure and exposing the oxide cap layer to a hydrogen-or-deuterium radical to nucleate the silicon-containing layer of the channel structures of the substrate. Forming the oxide cap layer and exposing the channel structure with the hydrogen radical occurs in the first processing chamber to form a nucleated substrate. The method can also include positioning the nucleated substrate in a second processing chamber with a second processing volume and heating the nucleated substrate in the second processing chamber.
    Type: Application
    Filed: December 16, 2020
    Publication date: September 9, 2021
    Inventors: Xinming ZHANG, Abhilash J. MAYUR, Shashank SHARMA, Norman L. TAM, Matthew SPULLER, Zeqiong ZHAO
  • Patent number: 11114320
    Abstract: Embodiments disclosed herein include a processing system and a method of forming a contact. The processing system includes a plurality of process chambers configured to deposit, etch, and/or anneal a source/drain region of a substrate. The method includes depositing a doped semiconductor layer over a source/drain region, forming an anchor layer in a trench, and depositing a conductor in the trench. The method of forming a contact results in reduced contact resistance by using integrated processes, which allows various operations of the source/drain contact formation to be performed within the same processing system.
    Type: Grant
    Filed: November 21, 2019
    Date of Patent: September 7, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Gaurav Thareja, Takashi Kuratomi, Avgerinos V. Gelatos, Xianmin Tang, Sanjay Natarajan, Keyvan Kashefizadeh, Zhebo Chen, Jianxin Lei, Shashank Sharma
  • Patent number: 11102416
    Abstract: Some embodiments include a camera system having a first camera unit and a second camera unit. The first camera unit may include a first actuator. The second camera unit may include a second actuator. In some embodiments, the first actuator may move one or more components of the first camera unit to provide autofocus and/or optical image stabilization functionality to the first camera unit. In some embodiments, the second actuator may move one or more components of the second camera unit to provide autofocus and/or optical image stabilization functionality to the second camera unit. In some examples, the first camera unit may be configured to capture a first image of a first visual field. The second camera unit may be configured to capture, simultaneously with the first camera unit capturing the first image, a second image of a second visual field.
    Type: Grant
    Filed: August 14, 2020
    Date of Patent: August 24, 2021
    Assignee: Apple Inc.
    Inventors: Shashank Sharma, Scott W. Miller, Aurelien R. Hubert
  • Patent number: 11092773
    Abstract: Various embodiments include a camera with folded optics and lens shifting capabilities. In some examples, a folded optics arrangement of the camera may include one or more lens elements and light path folding elements (e.g., prisms). Some embodiments include voice coil motor (VCM) actuator arrangements, carrier arrangements, and/or suspension arrangements to provide autofocus (AF) and/or optical image stabilization (OIS) movement. Furthermore, some embodiments include position sensor arrangements for position sensing with respect to AF and/or OIS movement.
    Type: Grant
    Filed: January 25, 2019
    Date of Patent: August 17, 2021
    Assignee: Apple Inc.
    Inventors: Nicholas D. Smyth, Alfred N. Mireault, Scott W. Miller, Shashank Sharma
  • Patent number: 11082602
    Abstract: Some embodiments include a camera voice coil motor (VCM) actuator that includes an additive coil structure for shifting a lens along one or multiple axes. The additive coil structure may include a base portion configured to couple with a lens carrier and at least partially surround a perimeter of the lens carrier. In various examples, the additive coil structure may include folded portions that individually include a respective coil that is located proximate a respective magnet. According to various embodiments, the additive coil structure may be formed using an additive process.
    Type: Grant
    Filed: April 24, 2020
    Date of Patent: August 3, 2021
    Assignee: Apple Inc.
    Inventors: Douglas S. Brodie, Aurelien R. Hubert, Scott W. Miller, Shashank Sharma
  • Publication number: 20210227142
    Abstract: Various embodiments include a camera voice coil motor (VCM) actuator configured to shift an image sensor along multiple axes. Some embodiments include a magnet and coil arrangement. Some embodiments include a position sensing arrangement. Some embodiments include a flexure arrangement. Some embodiments include a coil structure and coil carrier assembly.
    Type: Application
    Filed: December 4, 2020
    Publication date: July 22, 2021
    Applicant: Apple Inc.
    Inventors: Shashank Sharma, Scott W. Miller
  • Publication number: 20210223662
    Abstract: Various embodiments include a camera with folded optics and lens shifting capabilities. Some embodiments include voice coil motor (VCM) actuator arrangements to provide autofocus (AF) and/or optical image stabilization (OIS) movement. Some embodiments include suspension arrangements.
    Type: Application
    Filed: April 2, 2021
    Publication date: July 22, 2021
    Applicant: Apple Inc.
    Inventors: Scott W. Miller, Alfred N. Mireault, Brad V. Johnson, Nicholas D. Smyth, Rummel R. Adriano, Shashank Sharma, Steven Webster
  • Patent number: 11048147
    Abstract: Various embodiments include a camera with a voice coil motor (VCM) actuator assembly to provide autofocus (AF) and/or optical image stabilization (OIS) movement. The VCM actuator assembly is configured to move an image sensor of the camera in three dimensions (e.g. X, Y, and Z) to provide the AF and/or OIS movements. The VCM actuator assembly is asymmetrical and includes an at least partially open side that allows an optical assembly of the camera to pass through the open side of the VCM actuator. In some embodiments, the optical assembly is part of a folded optics arrangement of the camera that includes one or more prisms/and or lenses.
    Type: Grant
    Filed: September 16, 2019
    Date of Patent: June 29, 2021
    Assignee: Apple Inc.
    Inventor: Shashank Sharma