Patents by Inventor Shashank Sharma

Shashank Sharma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12353119
    Abstract: Various embodiments include a camera with folded optics and lens shifting capabilities. Some embodiments include voice coil motor (VCM) actuator arrangements to provide autofocus (AF) and/or optical image stabilization (OIS) movement. Some embodiments include suspension arrangements. The suspension arrangements may include leaf springs attached to a carrier structure for the lens.
    Type: Grant
    Filed: February 5, 2024
    Date of Patent: July 8, 2025
    Assignee: Apple Inc.
    Inventors: Scott W. Miller, Alfred N. Mireault, Brad V. Johnson, Nicholas D. Smyth, Rummel R. Adriano, Shashank Sharma, Steven Webster
  • Patent number: 12347679
    Abstract: The present disclosure provides systems and methods for processing channel structures of substrates that include positioning the substrate in a first processing chamber having a first processing volume. The substrate includes a channel structure with high aspect ratio features having aspect ratios greater than about 20:1. The method includes forming a silicon-containing layer over the channel structure to a hydrogen-or-deuterium plasma in the first processing volume at a flow rate of about 10 sccm to about 5000 sccm. The substrate is maintained at a temperature of about 100° C. to about 1100° C. during the exposing, the exposing forming a nucleated substrate. Subsequent to the exposing a thermal anneal operation is performed on the substrate.
    Type: Grant
    Filed: November 17, 2023
    Date of Patent: July 1, 2025
    Assignee: Applied Materials, Inc.
    Inventors: Xinming Zhang, Abhilash J. Mayur, Shashank Sharma, Norman L. Tam, Matthew Spuller
  • Patent number: 12326613
    Abstract: Some embodiments include a camera voice coil motor (VCM) actuator configured to shift a lens and/or an image sensor along multiple axes. The VCM actuator may include a bottom flexure and a top flexure that connect one or more dynamic members to one or more static members. The VCM actuator may include stationary magnets and coils held by dynamic members. In some cases, the VCM actuator may be configured to move the image sensor along an optical axis, to move the image sensor in directions orthogonal to the optical axis, and/or to tilt the image sensor relative to the orthogonal axis. In some examples, the VCM actuator may be configured to move the image sensor in directions orthogonal to the optical axis, to move the lens along the optical axis, and/or to tilt the lens relative to the optical axis.
    Type: Grant
    Filed: February 9, 2024
    Date of Patent: June 10, 2025
    Assignee: Apple Inc.
    Inventors: Shashank Sharma, Douglas S. Brodie, Scott W. Miller
  • Patent number: 12327763
    Abstract: Embodiments herein are directed to methods of forming titanium nitride films suitable for use as a bulk fill material for conductive features in a semiconductor device, such as for capacitor electrodes and/or buried word lines in a dynamic random-access memory (DRAM) device. In one embodiment, a method of forming conductive features in a semiconductor device is provided. The method includes thermally treating a substrate surface comprising at least portions of a titanium nitride layer in the presence of hydrogen radicals. Thermally treating the substrate includes positioning the substrate in a processing volume of a processing chamber, heating the substrate to a treatment temperature of more than about 250° C., generating the hydrogen radicals using a remote plasma source fluidly coupled to the processing volume, and maintaining the substrate at the treatment temperature while concurrently exposing the at least portions of the titanium nitride layer to the generated hydrogen radicals.
    Type: Grant
    Filed: August 10, 2021
    Date of Patent: June 10, 2025
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Xinming Zhang, Shashank Sharma, Abhilash J. Mayur, Norman L. Tam, Matthew Spuller
  • Publication number: 20250180987
    Abstract: Embodiments described herein relate to a method for developing a resist layer that includes tin and oxygen with an exposed region and an unexposed region. In an embodiment, the includes applying a surface treatment to the resist layer, where the surface treatment incorporates fluorine into the unexposed region. In an embodiment, the method further includes developing the resist layer with a dry develop process that includes a source gas including hydrogen, where the developed resist layer has an opening through the resist layer.
    Type: Application
    Filed: November 8, 2024
    Publication date: June 5, 2025
    Inventors: NASRIN KAZEM, NIRANJANA BALESAN, MADHUR SACHAN, NANCY FUNG, KAI NG, SHASHANK SHARMA
  • Patent number: 12298588
    Abstract: Various embodiments include a camera with folded optics and lens shifting capabilities. In some examples, a folded optics arrangement of the camera may include one or more lens elements and light path folding elements (e.g., prisms). Some embodiments include voice coil motor (VCM) actuator arrangements, carrier arrangements, and/or suspension arrangements to provide autofocus (AF) and/or optical image stabilization (OIS) movement. Furthermore, some embodiments include position sensor arrangements for position sensing with respect to AF and/or OIS movement.
    Type: Grant
    Filed: June 28, 2023
    Date of Patent: May 13, 2025
    Assignee: Apple Inc.
    Inventors: Nicholas D. Smyth, Alfred N. Mireault, Scott W. Miller, Shashank Sharma
  • Patent number: 12295097
    Abstract: A planar sensor array, like an imaging sensor array, can be mounted to a ceramic circuit board to provide improved mechanical stability and heat dissipation. Embodiments herein provide improvements to such assemblies by providing two or more recesses in the ceramic circuit board opposite the sensor array. Electronic components can be placed in these recesses, reducing the overall size and moment of inertia of the sensor assembly relative to placement on the same side of the ceramic circuit board as the sensor array. Placing the electronics in the two or more recesses allows for simplified mounting of the assembly to heat sinks, flexible circuit boards, or other elements. The two or more recesses are separated by a stiffening cross-brace portion of the ceramic circuit board that enhances the mechanical strength of the ceramic circuit board.
    Type: Grant
    Filed: December 14, 2021
    Date of Patent: May 6, 2025
    Assignee: Waymo LLC
    Inventor: Shashank Sharma
  • Patent number: 12253740
    Abstract: The present disclosure relates to optical systems, vehicles, and methods for providing improved mechanical performance of a camera and corresponding optical elements. An example optical system includes an outer housing and an inner support member. The optical system also includes an optical window coupled to the outer housing and the inner support member. The optical window is configured to be temperature-controllable. The optical system also includes a camera coupled to the inner support member. The camera is optically coupled to the optical window. Additionally, the outer housing, the optical window, and the camera are configured to be impact resistant.
    Type: Grant
    Filed: December 8, 2020
    Date of Patent: March 18, 2025
    Assignee: Waymo LLC
    Inventors: Shashank Sharma, Matthew Last
  • Publication number: 20250087505
    Abstract: A system includes a chamber body defining a processing volume. The system further includes a substrate support pedestal positioned in the processing volume and operable to support a substrate, the substrate support pedestal including one or more channels, where a coolant medium flows through the one or more channels to facilitate heat transfer from the substrate to the coolant medium. The system further includes a coolant medium circulator to circulate the coolant medium through the one or more channels. The system further includes a substrate temperature sensor operatively coupled to the chamber body, where the substrate temperature sensor measures a temperature of the substrate. The system further includes a coolant medium circulation controller, coupled to the coolant medium circulator and the substrate temperature sensor, to control a rate at which the coolant medium is circulated through the one or more channels.
    Type: Application
    Filed: September 12, 2023
    Publication date: March 13, 2025
    Inventors: Shashank Sharma, Wolfgang Robert Aderhold, Vikash Banthia
  • Publication number: 20250063242
    Abstract: A camera includes a camera focus adjustment device, a lens, and an image sensor coupled to the camera focus adjustment device. The camera focus adjustment device includes a flexure structure. The flexure structure includes an outer framework of structural members continuously interconnected by flexure notch hinges. The flexure structure also includes two inner structural members oriented in parallel and extending from the outer framework of structural members. A gap is between the two inner structural members. The camera focus adjustment device also includes a piezoelectric material within the gap and a pair of wedges within the gap. The pair of wedges is affixed to the piezoelectric material and to one inner structural member of the two inner structural members. Based on temperature-based piezoelectric activity associated with the piezoelectric material, the camera focus adjustment device is operable to move the image sensor relative to the lens.
    Type: Application
    Filed: November 5, 2024
    Publication date: February 20, 2025
    Inventor: Shashank Sharma
  • Publication number: 20250062123
    Abstract: Embodiments disclosed herein include a method of thermal treatment or radical species treatment of a photoresist a metal-oxide photoresist. In an embodiment, a method of patterning a metal-oxide photoresist, such as a Sn-based photoresist, includes depositing the metal-oxide photoresist over a substrate, exposing the metal-oxide photoresist with an extreme ultra-violet (EUV) exposure to form exposed regions and non-exposed regions, developing the exposed metal-oxide photoresist, and performing a thermal treatment and/or a radical species treatment of the metal-oxide photoresist.
    Type: Application
    Filed: August 17, 2023
    Publication date: February 20, 2025
    Inventors: SHASHANK SHARMA, KAI B. NG, NORMAN TAM, YUQI GUO, ANDY LO, HUIXIONG DAI, KHOI PHAN, CHIHAN HSU, MADHUR SACHAN, NASRIN KAZEM, ZHENXING HAN
  • Patent number: 12231769
    Abstract: Some embodiments include a camera voice coil motor (VCM) actuator that includes an additive coil structure for shifting a lens along one or multiple axes. The additive coil structure may include a base portion configured to couple with a lens carrier and at least partially surround a perimeter of the lens carrier. In various examples, the additive coil structure may include folded portions that individually include a respective coil that is located proximate a respective magnet. According to various embodiments, the additive coil structure may be formed using an additive process.
    Type: Grant
    Filed: June 7, 2023
    Date of Patent: February 18, 2025
    Assignee: Apple Inc.
    Inventors: Douglas S. Brodie, Aurelien R. Hubert, Scott W. Miller, Shashank Sharma
  • Patent number: 12204115
    Abstract: In some embodiments, a camera includes a lens assembly in a lens carrier, an image sensor for capturing a digital representation of light transiting the lens, and a voice coil motor. In some embodiments, the voice coil motor includes a spring suspension assembly for moveably mounting the lens carrier to an actuator base, a plurality of permanent magnets mounted to the actuator base through a magnet holder assembly and a focusing coil fixedly mounted to the lens carrier and mounted to the actuator base through the suspension assembly. In some embodiments, the permanent magnets each generate a magnetic field of a respective permanent magnet field strength, and the magnet holder assembly generates a holder magnetic field of a holder magnetic field strength.
    Type: Grant
    Filed: May 31, 2022
    Date of Patent: January 21, 2025
    Assignee: Apple Inc.
    Inventors: Scott W. Miller, Steven Webster, Shashank Sharma
  • Patent number: 12200337
    Abstract: A camera includes a camera focus adjustment device, a lens, and an image sensor coupled to the camera focus adjustment device. The camera focus adjustment device includes a flexure structure. The flexure structure includes an outer framework of structural members continuously interconnected by flexure notch hinges. The flexure structure also includes two inner structural members oriented in parallel and extending from the outer framework of structural members. A gap is between the two inner structural members. The camera focus adjustment device also includes a piezoelectric material within the gap and a pair of wedges within the gap. The pair of wedges is affixed to the piezoelectric material and to one inner structural member of the two inner structural members. Based on temperature-based piezoelectric activity associated with the piezoelectric material, the camera focus adjustment device is operable to move the image sensor relative to the lens.
    Type: Grant
    Filed: May 3, 2023
    Date of Patent: January 14, 2025
    Assignee: Waymo LLC
    Inventor: Shashank Sharma
  • Patent number: 12200331
    Abstract: Various embodiments include a camera with a folded optics arrangement and include a voice coil motor (VCM) actuator assembly to provide autofocus (AF) and/or optical image stabilization (OIS) movement. The camera with folded optics and the associated VCM actuator assembly have a first rotational normal mode of free vibration such that lenses of the camera rotate about an optical axis of the camera such that the rotational motion in the first rotational mode of free vibration is invisible from a perspective of an image sensor of the camera.
    Type: Grant
    Filed: December 2, 2022
    Date of Patent: January 14, 2025
    Assignee: Apple Inc.
    Inventors: Shashank Sharma, Brad V. Johnson, Alfred N. Mireault
  • Publication number: 20240401193
    Abstract: Vapor deposition precursor recovery systems and methods are provided. Methods and systems include a precursor container housing a precursor material and a carrier gas container housing a carrier gas. Systems and methods include a condenser assembly having a condenser in fluid connection with an exhaust line, a recycled precursor container, and a cooling circuit. Systems and methods include a vaporizer having one or more inlets in fluid connection with the precursor container and the carrier gas container, and an outlet in fluid connection with a gas distributor and the condenser assembly. Systems and methods include where the condenser is maintained at an internal temperature of greater than or about 10° C. below a boiling point of the precursor material and greater than or about 10° C. above a boiling point of the carrier gas.
    Type: Application
    Filed: June 1, 2023
    Publication date: December 5, 2024
    Applicant: Applied Materials, Inc.
    Inventor: Shashank Sharma
  • Patent number: 12143734
    Abstract: Example embodiments relate to enhanced depth of focus cameras using variable apertures and pixel binning. An example embodiment includes a device. The device includes an image sensor. The image sensor includes an array of light-sensitive pixels and a readout circuit. The device also includes a variable aperture. Additionally, the device includes a controller that is configured to cause: the variable aperture to adjust to a first aperture size when a high-light condition is present, the variable aperture to adjust to a second aperture size when a low-light condition is present, the readout circuit to perform a first level of pixel binning when the high-light condition is present, and the readout circuit to perform a second level of pixel binning when the low-light condition is present. The second aperture size is larger than the first aperture size. The second level of pixel binning is greater than the first level of pixel binning.
    Type: Grant
    Filed: February 15, 2023
    Date of Patent: November 12, 2024
    Assignee: Waymo LLC
    Inventors: Shashank Sharma, Ralph H. Shepard
  • Publication number: 20240314435
    Abstract: Various embodiments include a camera voice coil motor (VCM) actuator configured to shift an image sensor along multiple axes. Some embodiments include a magnet and coil arrangement. Some embodiments include a position sensing arrangement. Some embodiments include a flexure arrangement. Some embodiments include a coil structure and coil carrier assembly.
    Type: Application
    Filed: May 22, 2024
    Publication date: September 19, 2024
    Applicant: Apple Inc.
    Inventors: Shashank Sharma, Scott W. Miller
  • Publication number: 20240305889
    Abstract: In some embodiments, a camera actuator includes an actuator base, an autofocus voice coil motor, and an optical image stabilization voice coil motor. In some embodiments, the autofocus voice coil motor includes a lens carrier mounting attachment moveably mounted to the actuator base, a plurality of shared magnets mounted to the base, and an autofocus coil fixedly mounted to the lens carrier mounting attachment for producing forces for moving a lens carrier in a direction of an optical axis of one or more lenses of the lens carrier. In some embodiments, the optical image stabilization voice coil motor includes an image sensor carrier moveably mounted to the actuator base, and optical image stabilization coils moveably mounted to the image sensor carrier within the magnetic fields of the shared magnets, for producing forces for moving the image sensor carrier in a plurality of directions orthogonal to the optical axis.
    Type: Application
    Filed: May 17, 2024
    Publication date: September 12, 2024
    Applicant: Apple Inc.
    Inventors: Aurelien R. Hubert, Qiang Yang, Douglas S. Brodie, Scott W. Miller, Shashank Sharma
  • Publication number: 20240290585
    Abstract: A method of post-deposition processing includes performing a preheat process in a radical treatment chamber, the preheat process comprising exposing a substrate having a metal layer formed thereon to purge gas and purging the purge gas at a pressure of between 400 Torr and 535 Torr, and performing a radical treatment process in the radical treatment chamber, the radical treatment process comprising exposing the substrate to radical species.
    Type: Application
    Filed: February 23, 2023
    Publication date: August 29, 2024
    Inventors: Pradeep SAMPATH KUMAR, Norman L. TAM, Shashank SHARMA, Eric R. RIESKE, Victor CALDERON, Mahesh RAMAKRISHNA, Michael P. KAMP, Dongming IU, Edward T. XIA, Eric T. TRAN