Abstract: An on chip leakage-current detection device including a first inverter where the magnitude of delay of the output signal of the first inverter is determined by a leakage current of a target device. The leakage-current detection device further includes: a capacitor that is charged by the output signal of the first inverter; a second inverter coupled to capacitor that switches states when the capacitor is charged to a switching level; an odd number of additional inverters coupled in a sequence with a second-inverter output. The output of the leakage-current detection device has a frequency proportional to the leakage of the target device.