Patents by Inventor Shaun Dean Wilson

Shaun Dean Wilson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Rutherford backscattering detection for use in Ion implantation
    Patent number: 6255662
    Abstract: A Rutherford backscattering detector for determining the angle of incidence between an ion beam and the crystalline lattice structure of a semiconductor workpiece. A process chamber defines a chamber interior into which one or more workpieces can be inserted for ion treatment, and a rotating workpiece support is disposed within the process chamber for mounting one or more semiconductor workpieces. An energy source sets up an ion plasma from which is created an ion beam which is caused to impact the surface of the semiconductor workpiece. A Rutherford backscattering detector measures the intensity of backscattered particles and the backscattered ion intensity is correlated to an angle of incidence between the ion beam and the crystalline structure of the semiconductor workpiece.
    Type: Grant
    Filed: October 27, 1998
    Date of Patent: July 3, 2001
    Assignee: Axcelis Technologies, Inc.
    Inventors: Leonard Michael Rubin, Shaun Dean Wilson, Yuri Erokhin