Abstract: Embodiments herein describe methods, devices, and systems for a reticle gripper damper and isolation system for handling reticles and reducing vibrations in a reticle handler for lithography apparatuses and systems. A reticle handler apparatus includes a reticle handler arm, a reticle baseplate configured to hold the reticle, and a gripper arranged to connect the reticle baseplate to the reticle handler arm. The gripper includes a static structure that is coupled to the reticle handler arm, an isolation structure that is coupled to the static structure, and one or more damping elements. The gripper is configured to reduce vibrations of the reticle in the reticle handler apparatus using the one or more damping elements.

Abstract: Embodiments herein describe methods, devices, and systems for a reticle gripper damper and isolation system for handling reticles and reducing vibrations in a reticle handler for lithography apparatuses and systems. A reticle handler apparatus includes a reticle handler arm, a reticle baseplate configured to hold the reticle, and a gripper arranged to connect the reticle baseplate to the reticle handler arm. The gripper includes a static structure that is coupled to the reticle handler arm, an isolation structure that is coupled to the static structure, and one or more damping elements. The gripper is configured to reduce vibrations of the reticle in the reticle handler apparatus using the one or more damping elements.

Abstract: A bracket assembly for connecting an overhead roof structure to below roof structure elements of a building. The below roof structure elements include a wall having a top plate member or ceiling support structure. The bracket assembly includes overhead fixing members, a bracket member, bearing member, sleeve member, and below roof structure fastener, which are interconnected and fastened together. One end of the bracket member is connectable to the overhead fixing members to the overhead roof structure and the other end is connectable to the below roof structure fastener which is connectable to the below roof structure. The bearing and sleeve members are located and connected between the bracket member and the below roof structure such that the bracket member rests without loading on the bearing member which then rests on the sleeve member which when used rests without loading on the below roof structure, providing structural integrity.

Abstract: A bracket assembly for connecting an overhead roof structure to below roof structure elements of a building. The below roof structure elements include a wall having a top plate member or ceiling support structure. The bracket assembly includes overhead fixing members, a bracket member, bearing member, sleeve member, and below roof structure fastener, which are interconnected and fastened together. One end of the bracket member is connectable to the overhead fixing members to the overhead roof structure and the other end is connectable to the below roof structure fastener which is connectable to the below roof structure. The bearing and sleeve members are located and connected between the bracket member and the below roof structure such that the bracket member rests without loading on the bearing member which then rests on the sleeve member which when used rests without loading on the below roof structure, providing structural integrity.